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Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate Grant 10,557,200 - Ikeda , et al. Feb | 2020-02-11 |
Vehicle display device Grant 10,414,432 - Saito , et al. Sept | 2019-09-17 |
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Tuner, microwave plasma source and impedance matching method Grant 9,520,273 - Osada , et al. December 13, 2 | 2016-12-13 |
Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus Grant 9,520,272 - Ikeda , et al. December 13, 2 | 2016-12-13 |
Tuner, Microwave Plasma Source And Impedance Matching Method App 20160276139 - Osada; Yuki ;   et al. | 2016-09-22 |
Plasma Processing Device App 20160222516 - IKEDA; Taro ;   et al. | 2016-08-04 |
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Acquisition Method For S-parameters In Microwave Introduction Modules, And Malfunction Detection Method App 20150212127 - Ikeda; Taro ;   et al. | 2015-07-30 |
Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portion Grant 9,072,158 - Ikeda , et al. June 30, 2 | 2015-06-30 |
Surface wave plasma generating antenna and surface wave plasma processing apparatus Grant 8,945,342 - Ikeda , et al. February 3, 2 | 2015-02-03 |
Microwave Emission Mechanism, Microwave Plasma Source And Surface Wave Plasma Processing Apparatus App 20140361684 - Ikeda; Taro ;   et al. | 2014-12-11 |
Microwave Radiation Antenna, Microwave Plasma Source And Plasma Processing Apparatus App 20140158302 - IKEDA; Taro ;   et al. | 2014-06-12 |
Microwave Irradiation Apparatus App 20140034636 - YAMAMOTO; Nobuhiko ;   et al. | 2014-02-06 |
Microwave Emitting Device And Surface Wave Plasma Processing Apparatus App 20130192760 - IKEDA; Taro ;   et al. | 2013-08-01 |
Microwave Introducing Mechanism, Microwave Plasma Source And Microwave Plasma Processing Apparatus App 20130180661 - Ikeda; Taro ;   et al. | 2013-07-18 |
Electromagnetic-radiation Power-supply Mechanism And Microwave Introduction Mechanism App 20120299671 - IKEDA; Taro ;   et al. | 2012-11-29 |
Tuner and microwave plasma source Grant 8,308,898 - Kasai , et al. November 13, 2 | 2012-11-13 |
Surface Wave Plasma Generating Antenna And Surface Wave Plasma Processing Apparatus App 20120222816 - IKEDA; Taro ;   et al. | 2012-09-06 |
Plasma processing apparatus Grant 8,163,128 - Kasai , et al. April 24, 2 | 2012-04-24 |
Microwave Plasma Source And Plasma Processing Apparatus App 20120090782 - Ikeda; Taro ;   et al. | 2012-04-19 |
Tuner And Microwave Plasma Source App 20120067523 - KASAI; Shigeru ;   et al. | 2012-03-22 |
Magnetron control method, magnetron service life judgment method, microwave generation device, magnetron service life judgment device, processing device, computer program, and storage medium Grant 7,915,827 - Kasai , et al. March 29, 2 | 2011-03-29 |
Plasma Processing Apparatus App 20090041640 - KASAI; Shigeru ;   et al. | 2009-02-12 |
Magnetron Control Method, Magnetron Service Life Judgment Method, Microwave Generation Device, Magnetron Service Life Judgment Device, Processing Device, Computer Program, And Storage Medium App 20080309239 - Kasai; Shigeru ;   et al. | 2008-12-18 |
Plasma processing apparatus Grant 7,445,690 - Kasai , et al. November 4, 2 | 2008-11-04 |
Coaxial type impedance matching device and impedance detecting method for plasma generation Grant 7,355,379 - Kitamura , et al. April 8, 2 | 2008-04-08 |
Plasma processing apparatus Grant 7,226,524 - Kasai , et al. June 5, 2 | 2007-06-05 |
Coaxial type impedance matching device and impedance detecting method for plasma generation Grant 7,176,634 - Kitamura , et al. February 13, 2 | 2007-02-13 |
Coaxial type impedance matching device and impedance detecting method for plasma generation App 20060144519 - Kitamura; Toshiaki ;   et al. | 2006-07-06 |
Lubrication structure for rolling bearing Grant 7,070,333 - Ito , et al. July 4, 2 | 2006-07-04 |
Plasma processing apparatus App 20050160987 - Kasai, Shigeru ;   et al. | 2005-07-28 |
Lubrication structure for rolling bearing App 20050077109 - Ito, Akira ;   et al. | 2005-04-14 |
Coaxial type impedance matching device and impedance detecting method for plasma generation App 20050057164 - Kitamura, Toshiaki ;   et al. | 2005-03-17 |
Plasma processor App 20050034815 - Kasai, Shigeru ;   et al. | 2005-02-17 |
Coaxial type impedance matching device Grant 6,856,211 - Yamada , et al. February 15, 2 | 2005-02-15 |
Coaxial type impedance matching device and impedance detecting method for plasma generation Grant 6,819,052 - Kitamura , et al. November 16, 2 | 2004-11-16 |
Coaxial type impedance matching device App 20040023561 - Yamada, Fumio ;   et al. | 2004-02-05 |
Plasma generating method, plasma apparatus, phase difference detecting method, impedance detecting method, measuring device, and coaxial type impedance matching device App 20030230984 - Kitamura, Toshiaki ;   et al. | 2003-12-18 |