loadpatents
Patent applications and USPTO patent grants for Orsini; Rocco A..The latest application filed is for "droplet and filament target stabilizer for euv source nozzles".
Patent | Date |
---|---|
Erosion reduction for EUV laser produced plasma target sources Grant 6,912,267 - Orsini , et al. June 28, 2 | 2005-06-28 |
Droplet and filament target stabilizer for EUV source nozzles Grant 6,864,497 - Orsini , et al. March 8, 2 | 2005-03-08 |
Low vapor pressure, low debris solid target for EUV production Grant 6,835,944 - Orsini , et al. December 28, 2 | 2004-12-28 |
Target steering system for EUV droplet generators Grant 6,792,076 - Petach , et al. September 14, 2 | 2004-09-14 |
Droplet and filament target stabilizer for EUV source nozzles App 20040114720 - Orsini, Rocco A. ;   et al. | 2004-06-17 |
Linear filament array sheet for EUV production Grant 6,744,851 - Orsini , et al. June 1, 2 | 2004-06-01 |
Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source Grant 6,738,452 - McGregor , et al. May 18, 2 | 2004-05-18 |
Erosion reduction for EUV laser produced plasma target sources App 20040086080 - Orsini, Rocco A. ;   et al. | 2004-05-06 |
Low vapor pressure, low debris solid target for EUV production App 20040071266 - Orsini, Rocco A. ;   et al. | 2004-04-15 |
Target steering system for EUV droplet generators App 20030223541 - Petach, Michael B. ;   et al. | 2003-12-04 |
Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source App 20030223546 - McGregor, Roy D. ;   et al. | 2003-12-04 |
Linear filament array sheet for EUV production App 20030223543 - Orsini, Rocco A. ;   et al. | 2003-12-04 |
High temperature EUV source nozzle Grant 6,657,213 - Orsini , et al. December 2, 2 | 2003-12-02 |
High output extreme ultraviolet source Grant 6,633,048 - Orsini October 14, 2 | 2003-10-14 |
High temperature EUV source nozzle App 20020162974 - Orsini, Rocco A. ;   et al. | 2002-11-07 |
High output extreme ultraviolet source App 20020162975 - Orsini, Rocco A. | 2002-11-07 |
Liquid sprays as the target for a laser-plasma extreme ultraviolet light source Grant 6,324,256 - McGregor , et al. November 27, 2 | 2001-11-27 |
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