Patent | Date |
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Methods and systems for preventing unsafe operations Grant 10,361,106 - Orschel , et al. | 2019-07-23 |
Methods And Systems For Preventing Unsafe Operations App 20180315631 - Orschel; Benno ;   et al. | 2018-11-01 |
Methods and systems for preventing unsafe operations Grant 10,032,659 - Orschel , et al. July 24, 2 | 2018-07-24 |
Systems and methods for performing phase shift interferometry while a wafer is vibrating Grant 10,030,964 - Orschel , et al. July 24, 2 | 2018-07-24 |
Systems and methods for controlling temperatures in an epitaxial reactor Grant 10,007,255 - Orschel , et al. June 26, 2 | 2018-06-26 |
Systems And Methods For Performing Phase Shift Interferometry While A Wafer Is Vibrating App 20170363413 - ORSCHEL; Benno ;   et al. | 2017-12-21 |
Method and system for a meta-recipe control software architecture Grant 9,727,045 - Orschel , et al. August 8, 2 | 2017-08-08 |
Methods and systems for deterministic and multithreaded script objects and script engine Grant 9,459,935 - Orschel October 4, 2 | 2016-10-04 |
Systems and methods for interferometric phase measurement Grant 9,384,540 - Orschel July 5, 2 | 2016-07-05 |
Method and system for full resolution real-time data logging Grant 9,330,014 - Orschel , et al. May 3, 2 | 2016-05-03 |
Systems And Methods For Controlling Temperatures In An Epitaxial Reactor App 20150378372 - Orschel; Benno ;   et al. | 2015-12-31 |
Systems And Methods For Interferometric Phase Measurement App 20150153166 - Orschel; Benno | 2015-06-04 |
Methods And Systems For Deterministic And Multithreaded Script Objects And Script Engine App 20140223440 - Orschel; Benno | 2014-08-07 |
Method And System For Full Resolution Real-time Data Logging App 20140189273 - Orschel; Benno ;   et al. | 2014-07-03 |
Methods And Systems For Preventing Unsafe Operations App 20140188261 - Orschel; Benno ;   et al. | 2014-07-03 |
Method And System For A Meta-recipe Control Software Architecture App 20140188269 - Orschel; Benno ;   et al. | 2014-07-03 |
Procedure for in-situ determination of thermal gradients at the crystal growth front Grant 8,673,075 - Orschel , et al. March 18, 2 | 2014-03-18 |
Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process Grant 8,641,822 - Orschel , et al. February 4, 2 | 2014-02-04 |
Method and apparatus for controlling the growth process of a monocrystalline silicon ingot Grant 8,545,623 - Orschel , et al. October 1, 2 | 2013-10-01 |
Method for correcting speed deviations between actual and nominal pull speed during crystal growth Grant 8,496,765 - Orschel , et al. July 30, 2 | 2013-07-30 |
Procedure For In-situ Determination Of Thermal Gradients At The Crystal Growth Front App 20120186512 - Orschel; Benno ;   et al. | 2012-07-26 |
Procedure for in-situ determination of thermal gradients at the crystal growth front Grant 8,221,545 - Orschel , et al. July 17, 2 | 2012-07-17 |
Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process Grant 8,012,255 - Orschel , et al. September 6, 2 | 2011-09-06 |
Method For Correcting Speed Deviations Between Actual And Nominal Pull Speed During Crystal Growth App 20110060467 - Orschel; Benno ;   et al. | 2011-03-10 |
Method and apparatus for controlling the growth process of a monocrystalline silicon ingot App 20100319611 - Orschel; Benno ;   et al. | 2010-12-23 |
Method And Apparatus For Controlling Diameter Of A Silicon Crystal Ingot In A Growth Process App 20100206219 - Orschel; Benno ;   et al. | 2010-08-19 |
Procedure for in-situ determination of thermal gradients at the crystal growth front App 20100024718 - Orschel; Benno ;   et al. | 2010-02-04 |
Method And Apparatus For Controlling Diameter Of A Silicon Crystal Ingot In A Growth Process App 20100024716 - Orschel; Benno ;   et al. | 2010-02-04 |
Reversed action diameter control in a semiconductor crystal growth system App 20100024717 - Orschel; Benno ;   et al. | 2010-02-04 |
Method for determining a minority carrier diffusion length using surface photo voltage measurements Grant 7,521,954 - Orschel , et al. April 21, 2 | 2009-04-21 |
Method For Determining A Minority Carrier Diffusion Length Using Surface Photo Voltage Measurements App 20080116909 - ORSCHEL; Benno ;   et al. | 2008-05-22 |