loadpatents
Patent applications and USPTO patent grants for Orimoto; Shinji.The latest application filed is for "method and device for substrate processing".
Patent | Date |
---|---|
Stage device and processing apparatus Grant 11,417,504 - Nakagawasai , et al. August 16, 2 | 2022-08-16 |
Method And Device For Substrate Processing App 20220220606 - TAKEYAMA; Tamaki ;   et al. | 2022-07-14 |
Mounting Table And Substrate Processing Apparatus App 20220189813 - AIKAWA; Katsuyoshi ;   et al. | 2022-06-16 |
Stage device and processing apparatus Grant 11,293,092 - Nakagawasai , et al. April 5, 2 | 2022-04-05 |
Substrate Processing Apparatus And Method App 20210280777 - NAKAGAWASAI; Manabu ;   et al. | 2021-09-09 |
Placing Table Structure And Treatment Device App 20200381272 - ORIMOTO; Shinji ;   et al. | 2020-12-03 |
Temperature Measuring Mechanism, Temperature Measuring Method, And Stage Device App 20200303223 - Nakagawasai; Manabu ;   et al. | 2020-09-24 |
Stage Device And Processing Apparatus App 20200135434 - NAKAGAWASAI; Manabu ;   et al. | 2020-04-30 |
Stage Device And Processing Apparatus App 20200131625 - NAKAGAWASAI; Manabu ;   et al. | 2020-04-30 |
Sputtering Device App 20190390325 - TAKEI; Junichi ;   et al. | 2019-12-26 |
Substrate Stage And Film Forming Apparatus App 20190390326 - Takei; Junichi ;   et al. | 2019-12-26 |
Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member Grant 10,254,693 - Yokohara , et al. | 2019-04-09 |
Electrostatic attraction apparatus, electrostatic chuck and cooling treatment apparatus Grant 9,787,222 - Yamamoto , et al. October 10, 2 | 2017-10-10 |
Fixing Unit Of Plate-shaped Member, Pvd Processing Apparatus And Fixing Method Of Plate-shaped Member App 20150370204 - YOKOHARA; Hiroyuki ;   et al. | 2015-12-24 |
Electrostatic Attraction Apparatus, Electrostatic Chuck And Cooling Treatment Apparatus App 20150349668 - Yamamoto; Kaoru ;   et al. | 2015-12-03 |
Printing system Grant 6,814,002 - Orimoto November 9, 2 | 2004-11-09 |
Printing system App 20010018874 - Orimoto, Shinji | 2001-09-06 |
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