OOYA; Yoshinobu
Patent Applications and Registrations
Patent applications and USPTO patent grants for OOYA; Yoshinobu.The latest application filed is for "plasma processing apparatus".
- OOYA; Yoshinobu - Miyagi JP
- Ooya; Yoshinobu - Nirasaki JP
- Ooya; Yoshinobu - Nirasaki City JP
- Ooya; Yoshinobu - Yamanashi N/A JP
- Ooya; Yoshinobu - Nirasaki-shi JP
| Patent | Date |
|---|---|
| Plasma Processing Apparatus App 20210272780 - TOMURA; Maju ; et al. | 2021-09-02 |
| Etching method Grant 10,410,877 - Takashima , et al. Sept | 2019-09-10 |
| Etching method Grant 10,381,237 - Takeda , et al. A | 2019-08-13 |
| Etching Method App 20180261465 - TAKEDA; Ryohei ; et al. | 2018-09-13 |
| Plasma Processing Apparatus App 20180174805 - TOMURA; Maju ; et al. | 2018-06-21 |
| Etching method Grant 9,997,374 - Takeda , et al. June 12, 2 | 2018-06-12 |
| Etching method and plasma processing apparatus Grant 9,922,806 - Tomura , et al. March 20, 2 | 2018-03-20 |
| Method for calculating distance, method for neutralizing electrostatic chuck, and processing apparatus Grant 9,812,996 - Nagai , et al. November 7, 2 | 2017-11-07 |
| Etching Method App 20170178921 - TAKEDA; Ryohei ; et al. | 2017-06-22 |
| Etching Method App 20170178922 - TAKASHIMA; Ryuichi ; et al. | 2017-06-22 |
| Etching method and etching apparatus Grant 9,659,789 - Takeda , et al. May 23, 2 | 2017-05-23 |
| Etching Method And Plasma Processing Apparatus App 20160379856 - TOMURA; Maju ; et al. | 2016-12-29 |
| Plasma processing apparatus Grant 9,478,387 - Ooya , et al. October 25, 2 | 2016-10-25 |
| Etching Method And Etching Apparatus App 20160189975 - TAKEDA; Ryohei ; et al. | 2016-06-30 |
| Method For Calculating Distance, Method For Neutralizing Electrostatic Chuck, And Processing Apparatus App 20150162233 - NAGAI; Kenji ; et al. | 2015-06-11 |
| Etching method Grant 8,906,808 - Takashima , et al. December 9, 2 | 2014-12-09 |
| Substrate processing apparatus and substrate processing method Grant 8,790,489 - Honda , et al. July 29, 2 | 2014-07-29 |
| Plasma Processing Apparatus App 20140102638 - Ooya; Yoshinobu ; et al. | 2014-04-17 |
| Plasma processing method and plasma processing apparatus Grant 8,642,478 - Ooya , et al. February 4, 2 | 2014-02-04 |
| Plasma etching apparatus, plasma etching method and storage medium Grant 8,641,916 - Yatsuda , et al. February 4, 2 | 2014-02-04 |
| Etching Method App 20140011363 - TAKASHIMA; Ryuichi ; et al. | 2014-01-09 |
| Plasma processing method Grant 8,420,547 - Ooya April 16, 2 | 2013-04-16 |
| Plasma etching method, plasma etching apparatus and storage medium Grant 8,383,001 - Mochiki , et al. February 26, 2 | 2013-02-26 |
| Plasma Processing Method And Plasma Processing Apparatus App 20120214313 - Ooya; Yoshinobu ; et al. | 2012-08-23 |
| Substrate Processing Apparatus And Substrate Processing Method App 20120000886 - HONDA; Masanobu ; et al. | 2012-01-05 |
| Plasma Processing Apparatus And Method App 20110272097 - Koshiishi; Akira ; et al. | 2011-11-10 |
| Plasma processing apparatus and method Grant 7,988,816 - Koshiishi , et al. August 2, 2 | 2011-08-02 |
| Plasma Etching Method, Plasma Etching Apparatus And Storage Medium App 20100213162 - Mochiki; Hiromasa ; et al. | 2010-08-26 |
| Plasma Processing Method App 20100210114 - OOYA; Yoshinobu | 2010-08-19 |
| Plasma Etching Apparatus, Plasma Etching Method And Storage Medium App 20100190350 - YATSUDA; Koichi ; et al. | 2010-07-29 |
| Plasma Etching Method, Plasma Etching Apparatus, Control Program And Computer-readable Storage Medium App 20090170335 - TANAKA; Satoshi ; et al. | 2009-07-02 |
| Plasma processing apparatus and method App 20060066247 - Koshiishi; Akira ; et al. | 2006-03-30 |
| Plasma ashing method App 20050106875 - Kubota, Kazuhiro ; et al. | 2005-05-19 |
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