Oowada; Shin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Oowada; Shin.The latest application filed is for "substrate inspection method and a substrate processing method".

Company Profile

0.30.32

Oowada; Shin - Yokohama JP
Oowada; Shin - Yokohama-shi JP
Oowada; Shin - Kanagawa N/A JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2	2016-06-14
Substrate Inspection Method And A Substrate Processing Method App 20140367570 - Kimba; Toshifumi ; et al.	2014-12-18
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ; et al.	2014-10-30
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 8,822,919 - Kimba , et al. September 2, 2	2014-09-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2	2014-08-12
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ; et al.	2014-02-06
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2	2013-02-05
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ; et al.	2012-02-09
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2	2011-11-08
Apparatus For Inspection With Electron Beam, Method For Operating Same, And Method For Manufacturing Semiconductor Device Using Former App 20110104830 - Kimba; Toshifumi ; et al.	2011-05-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,928,378 - Kimba , et al. April 19, 2	2011-04-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,888,642 - Nakasuji , et al. February 15, 2	2011-02-15
Sheet beam-type testing apparatus Grant 7,829,871 - Nakasuji , et al. November 9, 2	2010-11-09
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,745,784 - Nakasuji , et al. June 29, 2	2010-06-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,601,972 - Nakasuji , et al. October 13, 2	2009-10-13
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20090050822 - Nakasuji; Mamoru ; et al.	2009-02-26
Electron Beam Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20090039262 - NAKASUJI; Mamoru ; et al.	2009-02-12
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ; et al.	2009-02-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20080308729 - Kimba; Toshifumi ; et al.	2008-12-18
Sheet Beam-type Testing Apparatus App 20080302963 - NAKASUJI; Mamoru ; et al.	2008-12-11
Electron beam apparatus and device production method using the electron beam apparatus Grant 7,439,502 - Nakasuji , et al. October 21, 2	2008-10-21
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,423,267 - Nakasuji , et al. September 9, 2	2008-09-09
Sheet beam-type testing apparatus Grant 7,417,236 - Nakasuji , et al. August 26, 2	2008-08-26
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2	2008-08-12
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,408,175 - Kimba , et al. August 5, 2	2008-08-05
Electron beam apparatus and device production method using the electron beam apparatus App 20080173815 - Nakasuji; Mamoru ; et al.	2008-07-24
Method for inspecting substrate, substrate inspecting system and electron App 20080121804 - Nakasuji; Mamoru ; et al.	2008-05-29
Inspection system by charged particle beam and method of manufacturing devices using the system App 20080042060 - Nakasuji; Mamoru ; et al.	2008-02-21
Electron beam apparatus and device production method using the electron beam apparatus App 20070272859 - Nakasuji; Mamoru ; et al.	2007-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,297,949 - Nakasuji , et al. November 20, 2	2007-11-20
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ; et al.	2007-10-11
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20070194235 - Kimba; Toshifumi ; et al.	2007-08-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,247,848 - Nakasuji , et al. July 24, 2	2007-07-24
Electron beam apparatus and device fabrication method using the electron beam apparatus Grant 7,244,932 - Nakasuji , et al. July 17, 2	2007-07-17
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2	2007-07-10
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,223,973 - Kimba , et al. May 29, 2	2007-05-29
Inspection system by charged particle beam and method of manufacturing devices using the system App 20070057186 - Nakasuji; Mamoru ; et al.	2007-03-15
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20070045536 - Nakasuji; Mamoru ; et al.	2007-03-01
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20070018101 - Nakasuji; Mamoru ; et al.	2007-01-25
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,135,676 - Nakasuji , et al. November 14, 2	2006-11-14
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,129,485 - Nakasuji , et al. October 31, 2	2006-10-31
Sheet beam-type inspection apparatus Grant 7,109,484 - Nakasuji , et al. September 19, 2	2006-09-19
Method for inspecting substrate, substrate inspecting system and electron beam apparatus Grant 7,109,483 - Nakasuji , et al. September 19, 2	2006-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,095,022 - Nakasuji , et al. August 22, 2	2006-08-22
Sheet beam-type testing apparatus App 20060138343 - Nakasuji; Mamoru ; et al.	2006-06-29
Sheet beam-type testing apparatus Grant 7,049,585 - Nakasuji , et al. May 23, 2	2006-05-23
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20050121611 - Kimba, Toshifumi ; et al.	2005-06-09
Sheet beam-type inspection apparatus App 20050092921 - Nakasuji, Mamoru ; et al.	2005-05-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 6,855,929 - Kimba , et al. February 15, 2	2005-02-15
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20040183013 - Nakasuji, Mamoru ; et al.	2004-09-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20030207475 - Nakasuji, Mamoru ; et al.	2003-11-06
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 6,593,152 - Nakasuji , et al. July 15, 2	2003-07-15
Electron beam apparatus and device production method using the electron beam apparatus App 20020148961 - Nakasuji, Mamoru ; et al.	2002-10-17
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20020148975 - Kimba, Toshifumi ; et al.	2002-10-17
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020142496 - Nakasuji, Mamoru ; et al.	2002-10-03
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20020130262 - Nakasuji, Mamoru ; et al.	2002-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020109090 - Nakasuji, Mamoru ; et al.	2002-08-15
Sheet beam-type inspection apparatus App 20020036264 - Nakasuji, Mamoru ; et al.	2002-03-28
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020033449 - Nakasuji, Mamoru ; et al.	2002-03-21
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ; et al.	2002-03-07

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