Patent | Date |
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Method For Manufacturing Sputtering Target, Method For Forming Oxide Film, And Transistor App 20220020586 - YAMAZAKI; Shunpei ;   et al. | 2022-01-20 |
Method for manufacturing sputtering target, method for forming oxide film, and transistor Grant 11,139,166 - Yamazaki , et al. October 5, 2 | 2021-10-05 |
Metal Oxide Film And Method For Forming Metal Oxide Film App 20210225887 - TAKAHASHI; Masahiro ;   et al. | 2021-07-22 |
Composite Oxide Semiconductor And Method For Manufacturing The Same App 20210151569 - YAMAZAKI; Shunpei ;   et al. | 2021-05-20 |
Metal oxide film and method for forming metal oxide film Grant 10,892,282 - Takahashi , et al. January 12, 2 | 2021-01-12 |
Composite oxide semiconductor and method for manufacturing the same Grant 10,886,373 - Yamazaki , et al. January 5, 2 | 2021-01-05 |
Method For Manufacturing Sputtering Target, Method For Forming Oxide Film, And Transistor App 20200144059 - YAMAZAKI; Shunpei ;   et al. | 2020-05-07 |
Manufacturing Method Of Semiconductor Device App 20200035711 - OOTA; Masashi ;   et al. | 2020-01-30 |
Method for manufacturing sputtering target, method for forming oxide film, and transistor Grant 10,522,347 - Yamazaki , et al. Dec | 2019-12-31 |
Composite Oxide Semiconductor And Method For Manufacturing The Same App 20190341460 - YAMAZAKI; Shunpei ;   et al. | 2019-11-07 |
Metal oxide film and method for forming metal oxide film Grant 10,461,099 - Takahashi , et al. Oc | 2019-10-29 |
Composite oxide semiconductor and method for manufacturing the same Grant 10,388,738 - Yamazaki , et al. A | 2019-08-20 |
Metal oxide semiconductor device Grant 10,374,030 - Yamazaki , et al. | 2019-08-06 |
Method for manufacturing sputtering target Grant 10,316,404 - Yamazaki , et al. | 2019-06-11 |
Metal Oxide Film And Method For Forming Metal Oxide Film App 20180323220 - TAKAHASHI; Masahiro ;   et al. | 2018-11-08 |
Semiconductor device and method of manufacturing the same Grant 10,084,096 - Yamazaki , et al. September 25, 2 | 2018-09-25 |
Semiconductor film, transistor, semiconductor device, display device, and electronic appliance Grant 10,032,928 - Shimomura , et al. July 24, 2 | 2018-07-24 |
Semiconductor element, method for manufacturing semiconductor element, and semiconductor device including semiconductor element Grant 10,026,847 - Yamazaki , et al. July 17, 2 | 2018-07-17 |
Metal Oxide Film And Method For Forming Metal Oxide Film App 20180151596 - TAKAHASHI; Masahiro ;   et al. | 2018-05-31 |
Semiconductor device Grant 9,911,864 - Ishihara , et al. March 6, 2 | 2018-03-06 |
Metal oxide film and method for forming metal oxide film Grant 9,881,939 - Takahashi , et al. January 30, 2 | 2018-01-30 |
Metal oxide film and method for forming metal oxide film Grant 9,871,058 - Takahashi , et al. January 16, 2 | 2018-01-16 |
Semiconductor Device And Method Of Manufacturing The Same App 20180013005 - YAMAZAKI; Shunpei ;   et al. | 2018-01-11 |
Semiconductor Device App 20170373135 - YAMAZAKI; Shunpei ;   et al. | 2017-12-28 |
Method For Manufacturing Sputtering Target App 20170350002 - Yamazaki; Shunpei ;   et al. | 2017-12-07 |
Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide Grant 9,831,353 - Kawata , et al. November 28, 2 | 2017-11-28 |
Metal oxide film and method for forming metal oxide film Grant 9,831,274 - Takahashi , et al. November 28, 2 | 2017-11-28 |
Oxide semiconductor, transistor, and semiconductor device Grant 9,825,179 - Yamazaki , et al. November 21, 2 | 2017-11-21 |
Semiconductor device Grant 9,806,201 - Yamazaki , et al. October 31, 2 | 2017-10-31 |
Semiconductor Device App 20170301796 - ISHIHARA; Noritaka ;   et al. | 2017-10-19 |
Composite Oxide Semiconductor And Method For Manufacturing The Same App 20170288023 - YAMAZAKI; Shunpei ;   et al. | 2017-10-05 |
Semiconductor device Grant 9,761,734 - Ishihara , et al. September 12, 2 | 2017-09-12 |
Semiconductor device and method of manufacturing the same Grant 9,761,733 - Yamazaki , et al. September 12, 2 | 2017-09-12 |
Oxide semiconductor film Grant 9,748,328 - Yamazaki , et al. August 29, 2 | 2017-08-29 |
Method For Manufacturing Sputtering Target, Method For Forming Oxide Film, And Transistor App 20170178904 - YAMAZAKI; Shunpei ;   et al. | 2017-06-22 |
Semiconductor device and electronic device including the semiconductor device Grant 9,685,563 - Tsubuku , et al. June 20, 2 | 2017-06-20 |
Semiconductor Film, Transistor, Semiconductor Device, Display Device, And Electronic Appliance App 20170141233 - SHIMOMURA; Akihisa ;   et al. | 2017-05-18 |
Method for forming multilayer film including oxide semiconductor film and method for manufacturing semiconductor device Grant 9,595,435 - Tsubuku , et al. March 14, 2 | 2017-03-14 |
Film Forming Apparatus App 20170062192 - OOTA; Masashi ;   et al. | 2017-03-02 |
Oxide Semiconductor, Transistor, And Semiconductor Device App 20170062620 - YAMAZAKI; Shunpei ;   et al. | 2017-03-02 |
Conductive Oxide Film, Display Device, And Method For Forming Conductive Oxide Film App 20170058393 - YAMAZAKI; Shunpei ;   et al. | 2017-03-02 |
Oxide semiconductor stacked film and semiconductor device Grant 9,583,570 - Yamazaki , et al. February 28, 2 | 2017-02-28 |
Oxide semiconductor film and method for forming oxide semiconductor film Grant 9,577,107 - Shimomura , et al. February 21, 2 | 2017-02-21 |
Semiconductor film, transistor, semiconductor device, display device, and electronic appliance Grant 9,559,174 - Shimomura , et al. January 31, 2 | 2017-01-31 |
Conductive oxide film, display device, and method for forming conductive oxide film Grant 9,535,277 - Yamazaki , et al. January 3, 2 | 2017-01-03 |
Manufacturing Method Of Semiconductor Device App 20160343733 - OOTA; Masashi ;   et al. | 2016-11-24 |
Semiconductor Device And Electronic Device Including The Semiconductor Device App 20160343867 - TSUBUKU; Masashi ;   et al. | 2016-11-24 |
Semiconductor device Grant 9,496,413 - Tsubuku , et al. November 15, 2 | 2016-11-15 |
Oxide semiconductor film and semiconductor device Grant 9,496,330 - Yamazaki , et al. November 15, 2 | 2016-11-15 |
Semiconductor Device App 20160284860 - ISHIHARA; Noritaka ;   et al. | 2016-09-29 |
Method of manufacturing a semiconductor device having an oxide semiconductor layer with increased hydrogen concentration Grant 9,437,428 - Oota , et al. September 6, 2 | 2016-09-06 |
Semiconductor device Grant 9,425,217 - Ishihara , et al. August 23, 2 | 2016-08-23 |
Semiconductor film, transistor, semiconductor device, display device, and electronic appliance Grant 9,406,760 - Shimomura , et al. August 2, 2 | 2016-08-02 |
Semiconductor Film, Transistor, Semiconductor Device, Display Device, And Electronic Appliance App 20160197193 - SHIMOMURA; Akihisa ;   et al. | 2016-07-07 |
Semiconductor Device, Display Device, Display Module, Electronic Device, Oxide, and Manufacturing Method of Oxide App 20160190346 - KAWATA; Takuya ;   et al. | 2016-06-30 |
Semiconductor Device App 20160190232 - YAMAZAKI; Shunpei ;   et al. | 2016-06-30 |
Semiconductor Device App 20160181432 - TSUBUKU; Masashi ;   et al. | 2016-06-23 |
Method For Manufacturing Sputtering Target, Method For Forming Oxide Film, And Transistor App 20160160342 - YAMAZAKI; Shunpei ;   et al. | 2016-06-09 |
Semiconductor Device And Method Of Manufacturing The Same App 20160155852 - YAMAZAKI; Shunpei ;   et al. | 2016-06-02 |
Semiconductor device and electronic device including the semiconductor device Grant 9,349,875 - Tsubuku , et al. May 24, 2 | 2016-05-24 |
Semiconductor device and measurement device Grant 9,343,578 - Yamazaki , et al. May 17, 2 | 2016-05-17 |
Semiconductor device Grant 9,293,541 - Yamazaki , et al. March 22, 2 | 2016-03-22 |
Semiconductor device Grant 9,281,407 - Tsubuku , et al. March 8, 2 | 2016-03-08 |
Method for manufacturing sputtering target, method for forming oxide film, and transistor Grant 9,267,199 - Yamazaki , et al. February 23, 2 | 2016-02-23 |
Semiconductor Device And Electronic Device Including The Semiconductor Device App 20150364610 - TSUBUKU; Masashi ;   et al. | 2015-12-17 |
Oxide Semiconductor Stacked Film And Semiconductor Device App 20150349133 - YAMAZAKI; Shunpei ;   et al. | 2015-12-03 |
Oxide, Semiconductor Device, Module, And Electronic Device App 20150329371 - KUROSAWA; Yoichi ;   et al. | 2015-11-19 |
Semiconductor Device App 20150311291 - YAMAZAKI; Shunpei ;   et al. | 2015-10-29 |
Metal Oxide Film And Method For Forming Metal Oxide Film App 20150294994 - TAKAHASHI; Masahiro ;   et al. | 2015-10-15 |
Metal Oxide Film And Method For Forming Metal Oxide Film App 20150270405 - TAKAHASHI; Masahiro ;   et al. | 2015-09-24 |
Semiconductor Device App 20150255534 - YAMAZAKI; Shunpei ;   et al. | 2015-09-10 |
Oxide semiconductor stacked film and semiconductor device Grant 9,123,573 - Yamazaki , et al. September 1, 2 | 2015-09-01 |
Semiconductor Film, Transistor, Semiconductor Device, Display Device, And Electronic Appliance App 20150243738 - SHIMOMURA; Akihisa ;   et al. | 2015-08-27 |
Semiconductor Device App 20150236165 - TSUBUKU; Masashi ;   et al. | 2015-08-20 |
Semiconductor device with oxide semiconductor Grant 9,064,966 - Yamazaki , et al. June 23, 2 | 2015-06-23 |
Manufacturing Method Of Semiconductor Device App 20150155169 - OOTA; Masashi ;   et al. | 2015-06-04 |
Semiconductor device Grant 9,035,305 - Tsubuku , et al. May 19, 2 | 2015-05-19 |
Semiconductor Device App 20150084043 - ISHIHARA; Noritaka ;   et al. | 2015-03-26 |
Method For Forming Oxide Film, And Method For Manufacturing Semiconductor Device App 20150064840 - SHIMOMURA; Akihisa ;   et al. | 2015-03-05 |
Oxide Semiconductor Stacked Film And Semiconductor Device App 20150048368 - YAMAZAKI; Shunpei ;   et al. | 2015-02-19 |
Semiconductor Device App 20150048365 - TSUBUKU; Masashi ;   et al. | 2015-02-19 |
Oxide Semiconductor Film And Semiconductor Device App 20150034947 - YAMAZAKI; Shunpei ;   et al. | 2015-02-05 |
Oxide semiconductor stacked film and semiconductor device Grant 8,890,159 - Yamazaki , et al. November 18, 2 | 2014-11-18 |
Semiconductor device Grant 8,860,023 - Tsubuku , et al. October 14, 2 | 2014-10-14 |
Oxide Semiconductor Film And Method For Forming Oxide Semiconductor Film App 20140284597 - SHIMOMURA; Akihisa ;   et al. | 2014-09-25 |
Method For Manufacturing Sputtering Target, Method For Forming Oxide Film, And Transistor App 20140241978 - YAMAZAKI; Shunpei ;   et al. | 2014-08-28 |
Semiconductor Device App 20140183527 - Yamazaki; Shunpei ;   et al. | 2014-07-03 |
Semiconductor Device And Measurement Device App 20140183530 - Yamazaki; Shunpei ;   et al. | 2014-07-03 |
Metal Oxide Film And Method For Forming Metal Oxide Film App 20140124776 - Takahashi; Masahiro ;   et al. | 2014-05-08 |
Polymer electrolyte fuel cell, membrane electrode assembly and manufacturing method thereof Grant 8,715,878 - Oota , et al. May 6, 2 | 2014-05-06 |
Method For Forming Multilayer Film Including Oxide Semiconductor Film And Method For Manufacturing Semiconductor Device App 20140113405 - TSUBUKU; Masashi ;   et al. | 2014-04-24 |
Conductive Oxide Film, Display Device, And Method For Forming Conductive Oxide Film App 20140063368 - YAMAZAKI; Shunpei ;   et al. | 2014-03-06 |
Oxide Semiconductor Stacked Film And Semiconductor Device App 20140034946 - YAMAZAKI; Shunpei ;   et al. | 2014-02-06 |
Membrane electrode assembly, manufacturing method thereof and fuel cell Grant 8,617,771 - Oota December 31, 2 | 2013-12-31 |
Semiconductor Device App 20130292675 - TSUBUKU; Masashi ;   et al. | 2013-11-07 |
Membrane electrode assembly, manufacturing method thereof and fuel cell Grant 8,481,225 - Oota July 9, 2 | 2013-07-09 |
Semiconductor Element, Method For Manufacturing Semiconductor Element, And Semiconductor Device Including Semiconductor Element App 20130126868 - YAMAZAKI; Shunpei ;   et al. | 2013-05-23 |
Proton transporting material, starting material thereof, ion exchange membrane, membrane electrolyte assembly, and fuel cell using the same Grant 8,338,054 - Haramoto , et al. December 25, 2 | 2012-12-25 |
Proton Transporting Material, Starting Material Thereof, Ion Exchange Membrane, Membrane Electrolyte Assembly, And Fuel Cell Using The Same App 20110003902 - Haramoto; Yuichiro ;   et al. | 2011-01-06 |
Membrane Electrode Assembly, Manufacturing Method Thereof and Fuel Cell App 20100273086 - OOTA; Masashi | 2010-10-28 |
Membrane Electrode Assembly, Manufacturing Method Thereof and Fuel Cell App 20100221639 - Oota; Masashi | 2010-09-02 |
Polymer Electrolyte Fuel Cell, Membrane Electrode Assembly and Manufacturing Method Thereof App 20100062306 - Oota; Masashi ;   et al. | 2010-03-11 |