Patent | Date |
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Positive-working chemical-amplification photoresist composition Grant 7,147,984 - Yukawa , et al. December 12, 2 | 2006-12-12 |
Positive-working chemical-amplification photoresist composition Grant 6,890,697 - Oomori , et al. May 10, 2 | 2005-05-10 |
Positive-working chemical-amplification photoresist composition Grant 6,869,745 - Oomori , et al. March 22, 2 | 2005-03-22 |
Positive-working chemical-amplification photoresist composition App 20050042544 - Oomori, Katsumi ;   et al. | 2005-02-24 |
Method for the preparation of a semiconductor device Grant 6,818,380 - Maemori , et al. November 16, 2 | 2004-11-16 |
Positive-working chemical-amplification photoresist composition Grant 6,815,144 - Oomori , et al. November 9, 2 | 2004-11-09 |
Positive-working chemical-amplification photoresist composition App 20040191677 - Yukawa, Hiroto ;   et al. | 2004-09-30 |
Method for the preparation of a semiconductor device Grant 6,777,158 - Maemori , et al. August 17, 2 | 2004-08-17 |
Positive-working chemical-amplification photoresist composition Grant 6,773,863 - Oomori , et al. August 10, 2 | 2004-08-10 |
Method for the preparation of a semiconductor device App 20040067615 - Maemori, Satoshi ;   et al. | 2004-04-08 |
Positive-working chemical-amplification photoresist composition App 20040023163 - Yukawa, Hiroto ;   et al. | 2004-02-05 |
Crosslinked positive-working photoresist composition Grant 6,630,282 - Oomori , et al. October 7, 2 | 2003-10-07 |
Positive-working chemical-amplification photoresist composition App 20030152865 - Oomori, Katsumi ;   et al. | 2003-08-14 |
Positive-working chemical-amplification photoresist composition App 20020119393 - Yukawa, Hiroto ;   et al. | 2002-08-29 |
Positive-working chemical-amplification photoresist composition App 20020094489 - Oomori, Katsumi ;   et al. | 2002-07-18 |
Positive-working chemical-amplification photoresist composition and method for forming a resist pattern using the same App 20020090567 - Oomori, Katsumi ;   et al. | 2002-07-11 |
Positive-working chemical-amplification photoresist composition App 20020090571 - Oomori, Katsumi ;   et al. | 2002-07-11 |
Positive-working chemical-amplification photoresist composition App 20020090570 - Oomori, Katsumi ;   et al. | 2002-07-11 |
Method for the preparation of a semiconductor device App 20020045133 - Maemori, Satoshi ;   et al. | 2002-04-18 |
Crosslinked positive-working photoresist composition App 20020034704 - Oomori, Katsumi ;   et al. | 2002-03-21 |
Positive-working photoresist composition App 20020031722 - Oomori, Katsumi ;   et al. | 2002-03-14 |
Positive-working chemical-amplification photoresist composition App 20020028407 - Oomori, Katsumi ;   et al. | 2002-03-07 |
Positive-working photoresist composition Grant 6,340,553 - Oomori , et al. January 22, 2 | 2002-01-22 |
Electron beam negative working resist composition Grant 6,153,354 - Katsumata , et al. November 28, 2 | 2000-11-28 |
Undercoating composition for photolithography Grant 5,756,255 - Sato , et al. May 26, 1 | 1998-05-26 |
Negative-working photoresist composition Grant 5,700,625 - Sato , et al. December 23, 1 | 1997-12-23 |