Ooae; Yoshihisa
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ooae; Yoshihisa.The latest application filed is for "electron gun device".
- Ooae; Yoshihisa - Tokyo JP
- Ooae; Yoshihisa - Kawasaki JP
| Patent | Date |
|---|---|
| Electron gun device Grant 11,295,925 - Yasuda , et al. April 5, 2 | 2022-04-05 |
| Electron Gun Device App 20220051866 - YASUDA; Hiroshi ; et al. | 2022-02-17 |
| Stage device Grant 8,530,857 - Ooae , et al. September 10, 2 | 2013-09-10 |
| Multi-column electron beam exposure apparatus and magnetic field generation device Grant 8,390,201 - Yasuda , et al. March 5, 2 | 2013-03-05 |
| Stage device App 20110204255 - Ooae; Yoshihisa ; et al. | 2011-08-25 |
| Multi-column electron beam exposure apparatus and magnetic field generation device App 20110148297 - Yasuda; Hiroshi ; et al. | 2011-06-23 |
| Electron gun, electron beam exposure apparatus, and exposure method Grant 7,919,750 - Yasuda , et al. April 5, 2 | 2011-04-05 |
| Electron beam exposure apparatus involving the position and velocity calculation Grant 7,777,202 - Satoh , et al. August 17, 2 | 2010-08-17 |
| Electron beam exposure apparatus and method for cleaning the same Grant 7,737,421 - Yasuda , et al. June 15, 2 | 2010-06-15 |
| Electron gun, electron beam exposure apparatus, and exposure method App 20080315089 - Yasuda; Hiroshi ; et al. | 2008-12-25 |
| Electron beam exposure apparatus App 20080277598 - Satoh; Takamasa ; et al. | 2008-11-13 |
| Electron beam exposure apparatus and method for cleaning the same App 20080169433 - Yasuda; Hiroshi ; et al. | 2008-07-17 |
| Electron-beam exposure system App 20070181829 - Tanaka; Hitoshi ; et al. | 2007-08-09 |
| Electron beam, generating device, and testing device Grant 6,911,780 - Ooae , et al. June 28, 2 | 2005-06-28 |
| Electron beam generating apparatus and electron beam exposure apparatus Grant 6,727,658 - Ooae , et al. April 27, 2 | 2004-04-27 |
| Electron beam, generating device, and testing device App 20030201720 - Ooae, Yoshihisa ; et al. | 2003-10-30 |
| Electron beam generating apparatus and electron beam exposure apparatus App 20030155522 - Ooae, Yoshihisa ; et al. | 2003-08-21 |
| Electrostatic deflector for electron beam exposure apparatus Grant 6,509,568 - Ooae , et al. January 21, 2 | 2003-01-21 |
| Electrostatic deflector for electron beam exposure apparatus App 20020020354 - Ooae, Yoshihisa ; et al. | 2002-02-21 |
| Electrostatic deflector for electron beam exposure apparatus App 20010045528 - Ooae, Yoshihisa ; et al. | 2001-11-29 |
| Electrostatic deflector, for electron beam exposure apparatus, with reduced charge-up Grant 6,268,606 - Abe , et al. July 31, 2 | 2001-07-31 |
| Method and system for charged particle beam exposure Grant 6,046,459 - Yasutake , et al. April 4, 2 | 2000-04-04 |
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