Patent | Date |
---|
Systems And Methods For Adjusting Prediction Models Between Facility Locations App 20220197264 - ONVLEE; Johannes ;   et al. | 2022-06-23 |
Lithographic apparatus and lithographic projection method Grant 10,459,354 - Van De Ruit , et al. Oc | 2019-10-29 |
Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrate Grant 10,444,647 - Bijnen , et al. Oc | 2019-10-15 |
Reticle cooling by non-uniform gas flow Grant 10,423,081 - Venturino , et al. Sept | 2019-09-24 |
Methods And Apparatus For Determining The Position Of A Target Structure On A Substrate, Methods And Apparatus For Determining T App 20190219936 - BIJNEN; Franciscus Godefridus Casper ;   et al. | 2019-07-18 |
Substrate Support, Lithographic Apparatus And Loading Method App 20190113853 - ONVLEE; Johannes ;   et al. | 2019-04-18 |
Gas flow optimization in reticle stage environment Grant 10,031,428 - Cuypers , et al. July 24, 2 | 2018-07-24 |
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,977,351 - Ebert , et al. May 22, 2 | 2018-05-22 |
Lithographic Apparatus And Lithographic Projection Method App 20180095369 - VAN DE RUIT; Kevin ;   et al. | 2018-04-05 |
Estimating deformation of a patterning device and/or a change in its position Grant 9,857,694 - Moest , et al. January 2, 2 | 2018-01-02 |
Reticle Cooling by Non-Uniform Gas Flow App 20170363973 - VENTURINO; Thomas ;   et al. | 2017-12-21 |
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170307986 - EBERT; Earl William ;   et al. | 2017-10-26 |
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,766,557 - Ebert , et al. September 19, 2 | 2017-09-19 |
Substrate handling apparatus and lithographic apparatus Grant 9,696,633 - Onvlee , et al. July 4, 2 | 2017-07-04 |
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20170160652 - EBERT; Earl William ;   et al. | 2017-06-08 |
Lithographic apparatus, programmable patterning device and lithographic method Grant 9,645,502 - De Jager , et al. May 9, 2 | 2017-05-09 |
Reticle cooling system in a lithographic apparatus Grant 9,632,434 - Ebert, Jr. , et al. April 25, 2 | 2017-04-25 |
Patterning device support, lithographic apparatus, and method of controlling patterning device temperature Grant 9,632,433 - Ebert, Jr. , et al. April 25, 2 | 2017-04-25 |
Estimating Deformation of a Patterning Device and/or a Change in Its Position App 20170068171 - MOEST; Bearrach ;   et al. | 2017-03-09 |
Lithographic apparatus and device manufacturing method Grant 9,372,412 - Van Zwet , et al. June 21, 2 | 2016-06-21 |
Lithographic apparatus, programmable patterning device and lithographic method Grant 9,335,638 - De Jager , et al. May 10, 2 | 2016-05-10 |
Lithographic apparatus and device manufacturing method Grant 9,316,926 - Van Zwet , et al. April 19, 2 | 2016-04-19 |
Lithographic apparatus and device manufacturing method Grant 9,235,140 - Van Zwet , et al. January 12, 2 | 2016-01-12 |
Lithographic Apparatus And Device Manufacturing Method App 20150370177 - VAN ZWET; Erwin John ;   et al. | 2015-12-24 |
Gas Flow Optimization in Reticle Stage Environment App 20150355557 - CUYPERS; Koen ;   et al. | 2015-12-10 |
Patterning Device Support, Lithographic Apparatus, And Method Of Controlling Patterning Device Temperature App 20150301456 - EBERT, JR.; Earl William ;   et al. | 2015-10-22 |
Lithographic apparatus and device manufacturing method Grant 9,134,630 - Van Zwet , et al. September 15, 2 | 2015-09-15 |
Reticle Cooling System In A Lithographic Apparatus App 20150241796 - EBERT, JR.; Earl William ;   et al. | 2015-08-27 |
Reticle Cleaning by Means of Sticky Surface App 20150241797 - Onvlee; Johannes ;   et al. | 2015-08-27 |
Reticle Heater to Keep Reticle Heating Uniform App 20150212432 - Onvlee; Johannes ;   et al. | 2015-07-30 |
Heating and Cooling Systems in a Lithographic Apparatus App 20150192856 - Onvlee; Johannes ;   et al. | 2015-07-09 |
Lithographic apparatus and device manufacturing method Grant 9,041,911 - Onvlee , et al. May 26, 2 | 2015-05-26 |
Lithographic apparatus and method Grant 8,947,641 - Onvlee , et al. February 3, 2 | 2015-02-03 |
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method App 20140071421 - De Jager; Pieter Willem Herman ;   et al. | 2014-03-13 |
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method App 20140055764 - DE JAGER; Pieter Willem Herman ;   et al. | 2014-02-27 |
Integrated post-exposure bake track Grant 8,636,458 - Auer-Jongepier , et al. January 28, 2 | 2014-01-28 |
Lithographic apparatus and method Grant 8,576,374 - Best , et al. November 5, 2 | 2013-11-05 |
Lithographic Apparatus And Device Manufacturing Method App 20130250267 - Van Zwet; Erwin John ;   et al. | 2013-09-26 |
Lithographic apparatus, programmable patterning device and lithographic method Grant 8,531,648 - De Jager , et al. September 10, 2 | 2013-09-10 |
Substrate Handling Apparatus And Lithographic Apparatus App 20130021593 - Onvlee; Johannes ;   et al. | 2013-01-24 |
Controllable radiation lithographic apparatus and method Grant 8,345,225 - Onvlee , et al. January 1, 2 | 2013-01-01 |
Lithographic Apparatus And Device Manufacturing Method App 20120314194 - Onvlee; Johannes ;   et al. | 2012-12-13 |
Lithographic Apparatus And Device Manufacturing Method App 20120307223 - Van Zwet; Erwin John ;   et al. | 2012-12-06 |
Lithographic Apparatus And Device Manufacturing Method App 20120307222 - Van Zwet; Erwin John ;   et al. | 2012-12-06 |
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method App 20110188016 - De Jager; Pieter Willem Herman ;   et al. | 2011-08-04 |
Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning device Grant 7,933,000 - Onvlee , et al. April 26, 2 | 2011-04-26 |
Lithographic apparatus and device manufacturing method Grant 7,817,241 - Auer-Jongepier , et al. October 19, 2 | 2010-10-19 |
Lithographic Apparatus And Device Manufacturing Method App 20100178612 - ONVLEE; Johannes ;   et al. | 2010-07-15 |
Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program Grant 7,756,597 - Van Den Nieuwelaar , et al. July 13, 2 | 2010-07-13 |
Lithographic apparatus and method Grant 7,714,981 - Onvlee , et al. May 11, 2 | 2010-05-11 |
Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method Grant 7,679,714 - Onvlee , et al. March 16, 2 | 2010-03-16 |
Lithographic Apparatus And Alignment Method App 20100060869 - Voznyi; Oleg Viacheslavovich ;   et al. | 2010-03-11 |
Controllable radiation lithographic apparatus and method App 20100045954 - ONVLEE; Johannes ;   et al. | 2010-02-25 |
Lithographic apparatus and device manufacturing method Grant 7,633,600 - Onvlee , et al. December 15, 2 | 2009-12-15 |
Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method Grant 7,630,118 - Onvlee December 8, 2 | 2009-12-08 |
Lithographic Apparatus And Method App 20090237635 - Best; Keith Frank ;   et al. | 2009-09-24 |
Lithography system, control system and device manufacturing method Grant 7,511,797 - Van De Mast , et al. March 31, 2 | 2009-03-31 |
Lithographic apparatus and device manufacturing method App 20090075012 - Van Dijk; Paulus Wilhelmus ;   et al. | 2009-03-19 |
Lithographic apparatus and device manufacturing method App 20090009746 - Auer-Jongepier; Suzan Leonie ;   et al. | 2009-01-08 |
Integrated post-exposure bake track App 20080304940 - Auer-Jongepier; Suzan L. ;   et al. | 2008-12-11 |
Inspection method and apparatus using same Grant 7,433,033 - Bleeker , et al. October 7, 2 | 2008-10-07 |
Lithography system, control system and device manufacturing method App 20080143985 - Mast; Franciscus Van De ;   et al. | 2008-06-19 |
Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method App 20080145791 - Onvlee; Johannes ;   et al. | 2008-06-19 |
Lithographic apparatus and device manufacturing method App 20080117391 - Onvlee; Johannes ;   et al. | 2008-05-22 |
Lithographic apparatus and method App 20080100818 - Onvlee; Johannes ;   et al. | 2008-05-01 |
Lithographic apparatus and method App 20080100819 - Onvlee; Johannes ;   et al. | 2008-05-01 |
Lithography system, control system and device manufacturing method Grant 7,352,439 - Van De Mast , et al. April 1, 2 | 2008-04-01 |
Particle detection device, lithographic apparatus and device manufacturing method Grant 7,349,082 - Onvlee , et al. March 25, 2 | 2008-03-25 |
Lithography system, control system and device manufacturing method App 20080036983 - De Mast; Franciscus Van ;   et al. | 2008-02-14 |
Inspection method and apparatus using same App 20070258086 - Bleeker; Arno Jan ;   et al. | 2007-11-08 |
Particle detection device, lithographic apparatus and device manufacturing method Grant 7,283,225 - Onvlee , et al. October 16, 2 | 2007-10-16 |
Lithographic apparatus and device manufacturing method App 20070099099 - Onvlee; Johannes ;   et al. | 2007-05-03 |
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program Grant 7,195,407 - Van Den Nieuwelaar , et al. March 27, 2 | 2007-03-27 |
Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program Grant 7,184,849 - Van Den Nieuwelaar , et al. February 27, 2 | 2007-02-27 |
Lithographic projection assembly, substrate handling apparatus and substrate handling method Grant 7,123,349 - Van Groos , et al. October 17, 2 | 2006-10-17 |
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program App 20060197929 - Van Den Nieuwelaar; Norbertus Josephus Martinus ;   et al. | 2006-09-07 |
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program Grant 7,068,351 - Van Den Nieuwelaar , et al. June 27, 2 | 2006-06-27 |
Particle detection device, lithographic apparatus and device manufacturing method App 20060072108 - Onvlee; Johannes ;   et al. | 2006-04-06 |
Particle detection device, lithographic apparatus and device manufacturing method App 20060072107 - Onvlee; Johannes ;   et al. | 2006-04-06 |
Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program App 20050278049 - Van Den Nieuwelaar, Norbertus Josephus Martinus ;   et al. | 2005-12-15 |
Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit lithographic processing cell, and computer program App 20050185952 - Van Den Nieuwelaar, Norbertus Josephus Martinus ;   et al. | 2005-08-25 |
Method of operating a lithographic apparatus or lithographic processsing cell, lithographic apparatus and lithographic processing cell App 20050137734 - Nieuwelaar, Norbertus Josephus Martinus Van Den ;   et al. | 2005-06-23 |
Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program App 20050102723 - Van Den Nieuwelaar, Norbertus Josephus Martinus ;   et al. | 2005-05-12 |
Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method App 20050007671 - Onvlee, Johannes | 2005-01-13 |
Lithographic projection assembly, substrate handling apparatus and substrate handling method App 20040218168 - Van Groos, Pieter Johannes Marius ;   et al. | 2004-11-04 |