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Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device Grant 11,048,159 - Shoki , et al. June 29, 2 | 2021-06-29 |
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Reflective mask blank, reflective mask, method for manufacturing reflective mask blank, and method for manufacturing semiconductor device Grant 10,481,484 - Ikebe , et al. Nov | 2019-11-19 |
Method For Manufacturing Reflective Mask Blank, Reflective Mask Blank, Method For Manufacturing Reflective Mask, Reflective Mask, And Method For Manufacturing Semiconductor Device App 20190079382 - SHOKI; Tsutomu ;   et al. | 2019-03-14 |
Reflective Mask Blank, Reflective Mask, Method For Manufacturing Reflective Mask Blank, And Method For Manufacturing Semiconductor Device App 20180120692 - IKEBE; Yohei ;   et al. | 2018-05-03 |
Reflective mask blank, reflective mask, and method for manufacturing semiconductor device Grant 9,864,267 - Ikebe , et al. January 9, 2 | 2018-01-09 |
Substrate with multilayer reflective film, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method of manufacturing the same, and method of manufacturing a semiconductor device Grant 9,740,091 - Onoue , et al. August 22, 2 | 2017-08-22 |
Substrate with a multilayer reflective film, reflective mask blank for EUV lithography, reflective mask for EUV lithography and method of manufacturing the same, and method of manufacturing a semiconductor device Grant 9,720,317 - Onoue August 1, 2 | 2017-08-01 |
Reflective Mask Blank, Reflective Mask, And Method For Manufacturing Semiconductor Device App 20170038673 - IKEBE; Yohei ;   et al. | 2017-02-09 |
Substrate With A Multilayer Reflective Film, Reflective Mask Blank For Euv Lithography, Reflective Mask For Euv Lithography And Method Of Manufacturing The Same, And Method Of Manufacturing A Semiconductor Device App 20160202601 - ONOUE; Takahiro | 2016-07-14 |
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Substrate With Multilayer Reflective Film, Reflective Mask Blank For Euv Lithography, Reflective Mask For Euv Lithography, And Method Of Manufacturing The Same, And Method Of Manufacturing A Semiconductor Device App 20160147139 - ONOUE; Takahiro ;   et al. | 2016-05-26 |
Perpendicular magnetic recording medium and method of manufacturing perpendicular magnetic recording medium Grant 9,183,869 - Onoue November 10, 2 | 2015-11-10 |
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Perpendicular Magnetic Recording Medium App 20150262602 - ONOUE; TAKAHIRO ;   et al. | 2015-09-17 |
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Perpendicular magnetic recording medium and process for manufacture thereof Grant 9,047,903 - Onoue June 2, 2 | 2015-06-02 |
Substrate With Multilayer Reflective Film, Reflective Mask Blank For Euv Lithography, Method Of Manufacturing Reflective Mask For Euv Lithography And Method Of Manufacturing Semiconductor Device App 20140370424 - Onoue; Takahiro ;   et al. | 2014-12-18 |
Perpendicular magnetic recording medium Grant 8,895,163 - Onoue November 25, 2 | 2014-11-25 |
Method of producing a perpendicular magnetic recording medium Grant 8,883,249 - Tachibana , et al. November 11, 2 | 2014-11-11 |
Perpendicular magnetic recording medium and process for manufacture thereof Grant 8,871,368 - Onoue , et al. October 28, 2 | 2014-10-28 |
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Perpendicular Magnetic Recording Medium And Method Of Manufacturing Perpendicular Magnetic Recording Medium App 20140044992 - ONOUE; Takahiro | 2014-02-13 |
Method of manufacturing perpendicular magnetic recording medium and perpendicular magnetic recording medium Grant 8,623,528 - Umezawa , et al. January 7, 2 | 2014-01-07 |
Perpendicular magnetic recording medium Grant 8,603,649 - Onoue December 10, 2 | 2013-12-10 |
Magnetic recording medium with controlled grain diameters Grant 8,592,061 - Onoue , et al. November 26, 2 | 2013-11-26 |
Perpendicular magnetic recording medium and process for manufacture thereof Grant 8,580,410 - Onoue November 12, 2 | 2013-11-12 |
Perpendicular Magnetic Recording Medium And Method Of Manufacturing The Same App 20130230647 - ONOUE; Takahiro ;   et al. | 2013-09-05 |
Perpendicular magnetic recording medium and method of manufacturing the same Grant 8,431,258 - Onoue , et al. April 30, 2 | 2013-04-30 |
Perpendicular magnetic recording medium and method of manufacturing the same Grant 8,404,370 - Sato , et al. March 26, 2 | 2013-03-26 |
Magnetic recording medium, magnetic recording medium manufacturing method, and magnetic disk Grant 8,076,013 - Sonobe , et al. December 13, 2 | 2011-12-13 |
Perpendicular Magnetic Recording Medium App 20110223446 - Onoue; Takahiro ;   et al. | 2011-09-15 |
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Perpendicular Magnetic Recording Medium App 20110171495 - TACHIBANA; Toshiaki ;   et al. | 2011-07-14 |
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Perpendicular Magnetic Recording Medium App 20110097604 - Onoue; Takahiro | 2011-04-28 |
Vertical Magnetic Recording Medium And Method For Making Vertical Magnetic Recording Medium App 20110097600 - Onoue; Takahiro | 2011-04-28 |
Perpendicular Magnetic Recording Medium And Process For Manufacture Thereof App 20110097603 - Onoue; Takahiro | 2011-04-28 |
Perpendicular Magnetic Recording Medium App 20100323220 - Onoue; Takahiro | 2010-12-23 |
Perpendicular Magnetic Recording Medium And Method Of Manufacturing The Same App 20100279151 - Sakamoto; Kazuaki ;   et al. | 2010-11-04 |
Perpendicular Magnetic Recording Medium And Method Of Manufacturing The Same App 20100255348 - SATO; Tokichiro ;   et al. | 2010-10-07 |
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Magnetic Recording Medium App 20100039724 - Onoue; Takahiro ;   et al. | 2010-02-18 |
Magnetic Recording Medium, Magnetic Recording Medium Manufacturing Method, And Magnetic Disk App 20100021768 - Sonobe; Yoshiaki ;   et al. | 2010-01-28 |
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Perpendicular Magnetic Recording Medium Manufacturing Method App 20090191331 - Umezawa; Teiichiro ;   et al. | 2009-07-30 |
Perpendicular Magnetic Recording Disk And Method Of Manufacturing The Same App 20090117408 - Umezawa; Teiichiro ;   et al. | 2009-05-07 |