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name:-0.0028009414672852
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Onoda; Naka Patent Filings

Onoda; Naka

Patent Applications and Registrations

Patent applications and USPTO patent grants for Onoda; Naka.The latest application filed is for "immersion exposure device cleaning method, dummy wafer, and immersion exposure device".

Company Profile
0.2.1
  • Onoda; Naka - Kanagawa JP
  • Onoda; Naka - Tokyo JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Immersion exposure device cleaning method, dummy wafer, and immersion exposure device
App 20100103392 - Matsui; Yoshinori ;   et al.
2010-04-29
Electron beam exposure method using a moving stage
Grant 6,040,583 - Onoda March 21, 2
2000-03-21
Method of electron beam exposure for superimposing second pattern over existing pattern
Grant 5,908,733 - Onoda June 1, 1
1999-06-01

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