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Patent applications and USPTO patent grants for ONODA; Masatoshi.The latest application filed is for "substrate cooling device".
Patent | Date |
---|---|
Substrate Cooling Device App 20210305072 - ONODA; Masatoshi ;   et al. | 2021-09-30 |
Substrate accommodation device Grant 11,127,616 - Ueno , et al. September 21, 2 | 2021-09-21 |
Substrate Heating Device App 20200413493 - ONODA; Masatoshi ;   et al. | 2020-12-31 |
Substrate Accommodation Device App 20200286763 - Ueno; Koyu ;   et al. | 2020-09-10 |
Substrate Temperature Measurement Device And An Apparatus Having Substrate Temperature Measurement Device App 20200219739 - GOTO; Ryosuke ;   et al. | 2020-07-09 |
Substrate Holding Device App 20200211891 - NISHIMURA; Ippei ;   et al. | 2020-07-02 |
Vacuum processing system, vacuum processing device, lubricating agent supply device, and lubricating agent supplying method Grant 9,784,317 - Onoda October 10, 2 | 2017-10-10 |
Ion irradiation apparatus and ion irradiation method Grant 9,230,776 - Matsumoto , et al. January 5, 2 | 2016-01-05 |
Vacuum Processing System, Vacuum Processing Device, Lubricating Agent Supply Device, And Lubricating Agent Supplying Method App 20150308505 - ONODA; Masatoshi | 2015-10-29 |
Ion Irradiation Apparatus And Ion Irradiation Method App 20150262790 - MATSUMOTO; Takeshi ;   et al. | 2015-09-17 |
Ion implanter Grant 8,143,595 - Tatemichi , et al. March 27, 2 | 2012-03-27 |
Ion Implanter App 20100314552 - Tatemichi; Junichi ;   et al. | 2010-12-16 |
Plasma generating device Grant 7,849,814 - Onoda , et al. December 14, 2 | 2010-12-14 |
Vacuum processing apparatus and method operation thereof Grant 7,367,139 - Ando , et al. May 6, 2 | 2008-05-06 |
Plasma Generating Device App 20070266947 - Onoda; Masatoshi ;   et al. | 2007-11-22 |
Silicon film forming apparatus App 20070007128 - Tomyo; Atsushi ;   et al. | 2007-01-11 |
Vacuum processing apparatus and method operation thereof App 20060283041 - Ando; Yasunori ;   et al. | 2006-12-21 |
Apparatus and method for forming a thin flim App 20040076763 - Kirimura, Hiroya ;   et al. | 2004-04-22 |
Apparatus and method for processing substrate Grant 6,092,485 - Ando , et al. July 25, 2 | 2000-07-25 |
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