ONO; Masanori

Patent Applications and Registrations

Patent applications and USPTO patent grants for ONO; Masanori.The latest application filed is for "temperature controlled substrate support assembly".

Company Profile

2.13.14

ONO; Masanori - Chiba JP
Ono; Masanori - Tokyo N/A JP
Ono, Masanori - Hamamatsu-shi JP
Ono; Masanori - Chiba-Prefecture JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Temperature Controlled Substrate Support Assembly App 20220013374 - PARKHE; Vijay D. ; et al.	2022-01-13
Temperature controlled substrate support assembly Grant 11,158,526 - Parkhe , et al. October 26, 2	2021-10-26
Real time monitoring with closed loop chucking force control Grant 10,460,916 - Boyd, Jr. , et al. Oc	2019-10-29
Pixilated cooling, temperature controlled substrate support assembly Grant 10,403,534 - Parkhe , et al. Sep	2019-09-03
Real Time Monitoring With Closed Loop Chucking Force Control App 20180330926 - BOYD, JR.; Wendell Glenn ; et al.	2018-11-15
Electrostatic chuck with external flow adjustments for improved temperature distribution Grant 10,121,688 - Busche , et al. November 6, 2	2018-11-06
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods Grant 9,875,923 - Boyd, Jr. , et al. January 23, 2	2018-01-23
Electrostatic Chuck With External Flow Adjustments For Improved Temperature Distribution App 20170213754 - Busche; Matthew J. ; et al.	2017-07-27
Control Systems Employing Deflection Sensors To Control Clamping Forces Applied By Electrostatic Chucks, And Related Methods App 20170103911 - BOYD, JR.; Wendell ; et al.	2017-04-13
Electrostatic chuck with external flow adjustments for improved temperature distribution Grant 9,622,375 - Busche , et al. April 11, 2	2017-04-11
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods Grant 9,558,981 - Boyd, Jr. , et al. January 31, 2	2017-01-31
Electrostatic chuck with internal flow adjustments for improved temperature distribution Grant 9,520,315 - Parkhe , et al. December 13, 2	2016-12-13
Pixilated Temperature Controlled Substrate Support Assembly App 20150228513 - PARKHE; Vijay D. ; et al.	2015-08-13
Electrostatic Chuck With Internal Flow Adjustments For Improved Temperature Distribution App 20150187626 - Parkhe; Vijay D. ; et al.	2015-07-02
Electrostatic Chuck With External Flow Adjustments For Improved Temperature Distribution App 20150187625 - Busche; Matthew J. ; et al.	2015-07-02
Control Systems Employing Deflection Sensors To Control Clamping Forces Applied By Electrostatic Chucks, And Related Methods App 20150138687 - BOYD, JR.; Wendell ; et al.	2015-05-21
Pixilated Cooling, Temperature Controlled Substrate Support Assembly App 20150129165 - PARKHE; Vijay D. ; et al.	2015-05-14
Method for isolating smooth muscle stem cells Grant 8,747,838 - Maruyama , et al. June 10, 2	2014-06-10
Method For Isolating Smooth Muscle Stem Cells App 20110033428 - Maruyama; Tetsuo ; et al.	2011-02-10
Oil application roller App 20020015603 - Kimura, Kohichi ; et al.	2002-02-07
Turbo-Molecular pump with metal matrix composite rotor and stator Grant 6,095,754 - Ono August 1, 2	2000-08-01

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