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Polishing apparatus and polishing method Grant 9,440,327 - Hiroo , et al. September 13, 2 | 2016-09-13 |
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Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus Grant 8,845,391 - Sone , et al. September 30, 2 | 2014-09-30 |
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