ONDA; Minoru
Patent Applications and Registrations
Patent applications and USPTO patent grants for ONDA; Minoru.The latest application filed is for "exposure apparatus, exposure method, and method for producing device".
- ONDA; Minoru - Ageo-shi JP
- Onda; Minoru - Ageo JP
- Onda; Minoru - Saitama-ken JP
- Onda; Minoru - Kawasaki JP
- Onda, Minoru - Kawasaki-shi JP
| Patent | Date |
|---|---|
| Exposure Apparatus, Exposure Method, And Method For Producing Device App 20160363870 - NAGASAKA; Hiroyuki ; et al. | 2016-12-15 |
| Exposure apparatus, exposure method, and method for producing device Grant 9,411,247 - Nagasaka , et al. August 9, 2 | 2016-08-09 |
| Exposure Apparatus, Exposure Method, And Method For Producing Device App 20140043593 - NAGASAKA; Hiroyuki ; et al. | 2014-02-13 |
| Exposure Apparatus, Exposure Method, Device Manufacturing Method, Program, And Recording Medium App 20130169944 - NISHII; Yasufumi ; et al. | 2013-07-04 |
| Exposure Apparatus, Exposure Method, and Method for Producing Device App 20080068567 - Nagasaka; Hiroyuki ; et al. | 2008-03-20 |
| Exposure apparatus, exposure method, and method for producing device App 20070222959 - Nagasaka; Hiroyuki ; et al. | 2007-09-27 |
| Projection exposure method and apparatus Grant 6,522,390 - Suzuki , et al. February 18, 2 | 2003-02-18 |
| Projection exposure method and apparatus App 20020012109 - Suzuki, Kousuke ; et al. | 2002-01-31 |
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