Omura; Yasuhiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Omura; Yasuhiro.The latest application filed is for "exposure apparatus, exposure method, and method for producing device".

Company Profile

0.77.78

Omura; Yasuhiro - Kumagaya JP
OMURA; Yasuhiro - Kounosu-shi JP
OMURA; Yasuhiro - Tokyo JP
Omura; Yasuhiro - Kounosu JP
OMURA; Yasuhiro - Kumagaya-shi JP
Omura; Yasuhiro - Kainosu JP
Omura; Yasuhiro - Saitama-ken JP
OMURA; Yasuhiro - Konnosa-shi JP
Omura; Yasuhiro - Kainosu-shi JP
Omura; Yasuhiro - Saitama JP
Omura; Yasuhiro - Kumgaya JP
Omura; Yasuhiro - Chiyoda-ku JP
Omura; Yasuhiro - Chuo-ku JP
Omura; Yasuhiro - Tokai JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Projection optical system, exposure apparatus, and exposure method Grant 10,156,792 - Omura Dec	2018-12-18
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20180348653 - KOBAYASHI; Naoyuki ; et al.	2018-12-06
Projection Optical System, Exposure Apparatus, And Exposure Method App 20180299785 - OMURA; Yasuhiro	2018-10-18
Exposure apparatus, exposure method, and method for producing device Grant 10,048,602 - Kobayashi , et al. August 14, 2	2018-08-14
Reduction projection optical system, exposure apparatus, and exposure method Grant 9,933,705 - Omura April 3, 2	2018-04-03
Projection Optical System, Exposure Apparatus, And Exposure Method App 20180052398 - OMURA; Yasuhiro ; et al.	2018-02-22
Projection optical system, exposure apparatus, and exposure method Grant 9,891,539 - Omura , et al. February 13, 2	2018-02-13
Projection optical system, exposure apparatus, and exposure method Grant 9,846,366 - Omura December 19, 2	2017-12-19
Reducing immersion projection optical system Grant 9,606,443 - Omura March 28, 2	2017-03-28
Projection optical system, exposure apparatus, and exposure method Grant 9,500,943 - Omura November 22, 2	2016-11-22
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20160252828 - KOBAYASHI; Naoyuki ; et al.	2016-09-01
Projection Optical System, Exposure Apparatus, And Exposure Method App 20160252825 - OMURA; Yasuhiro ; et al.	2016-09-01
Projection optical system, exposure apparatus, and exposure method Grant 9,360,763 - Omura , et al. June 7, 2	2016-06-07
Exposure apparatus, exposure method, and method for producing device Grant 9,316,921 - Kobayashi , et al. April 19, 2	2016-04-19
Projection optical system, exposure apparatus, and exposure method Grant 9,310,696 - Omura , et al. April 12, 2	2016-04-12
Projection optical system, exposure apparatus, and exposure method Grant 9,086,635 - Omura July 21, 2	2015-07-21
Catadioptric projection optical system, exposure apparatus, and exposure method Grant 9,081,295 - Omura July 14, 2	2015-07-14
Projection Optical System, Exposure Apparatus, And Exposure Method App 20150029482 - OMURA; Yasuhiro ; et al.	2015-01-29
Projection Optical System, Exposure Apparatus, And Exposure Method App 20150029476 - OMURA; Yasuhiro ; et al.	2015-01-29
Projection optical system, exposure apparatus, and exposure method Grant 8,854,601 - Omura , et al. October 7, 2	2014-10-07
Projection Optical System, Exposure Apparatus, And Exposure Method App 20140211180 - OMURA; Yasuhiro	2014-07-31
Projection Optical System, Exposure Apparatus, And Exposure Method App 20140211183 - OMURA; Yasuhiro	2014-07-31
Projection Optical System, Exposure Apparatus, And Exposure Method App 20140211182 - OMURA; Yasuhiro	2014-07-31
Projection optical system, exposure apparatus, and device manufacturing method Grant 8,665,418 - Omura March 4, 2	2014-03-04
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20140055763 - KOBAYASHI; Naoyuki ; et al.	2014-02-27
Exposure apparatus, exposure method, and method for producing device Grant 8,605,252 - Kobayashi , et al. December 10, 2	2013-12-10
Projection Optical System, Exposure Apparatus, And Exposure Method App 20130314679 - OMURA; Yasuhiro	2013-11-28
Projection Optical System, Exposure Apparatus, And Exposure Method App 20130194560 - OMURA; Yasuhiro ; et al.	2013-08-01
Optical system, exposure system, and exposure method Grant 8,436,983 - Omura May 7, 2	2013-05-07
Optical system, exposure system, and exposure method Grant 8,351,021 - Omura January 8, 2	2013-01-08
Optical system, exposure system, and exposure method Grant 8,339,578 - Omura December 25, 2	2012-12-25
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20120224154 - KOBAYASHI; Naoyuki ; et al.	2012-09-06
Exposure method, exposure apparatus and device manufacturing method Grant 8,253,924 - Uehara , et al. August 28, 2	2012-08-28
Exposure apparatus, exposure method, and method for producing device Grant 8,208,119 - Kobayashi , et al. June 26, 2	2012-06-26
Projection Optical System, Exposure Apparatus, And Exposure Method App 20120092760 - OMURA; Yasuhiro	2012-04-19
Projection optical system, exposure apparatus, and exposure method Grant 8,102,508 - Omura , et al. January 24, 2	2012-01-24
Projection Optical System, Exposure Apparatus, And Exposure Method App 20120002186 - Omura; Yasuhiro ; et al.	2012-01-05
Projection optical system, exposure apparatus, exposure system, and exposure method Grant 8,009,271 - Omura August 30, 2	2011-08-30
Catadioptric imaging system with prolate spheroidal-shaped mirrors Grant 7,990,609 - Omura August 2, 2	2011-08-02
Projection optical system, exposure system, and exposure method Grant 7,978,310 - Ikezawa , et al. July 12, 2	2011-07-12
Projection optical system, exposure apparatus, and exposure method Grant 7,936,441 - Omura May 3, 2	2011-05-03
Projection Optical System, Exposure Apparatus, And Exposure Method App 20110002032 - Omura; Yasuhiro	2011-01-06
Projection Optical System, Exposure System, And Exposure Method App 20100159401 - IKEZAWA; Hironori ; et al.	2010-06-24
Optical system, exposure system, and exposure method App 20100142051 - Omura; Yasuhiro	2010-06-10
Optical system, exposure system, and exposure method App 20100141921 - Omura; Yasuhiro	2010-06-10
Optical system,exposure system, and exposure method App 20100141926 - Omura; Yasuhiro	2010-06-10
Projection optical system, exposure system, and exposure method Grant 7,710,653 - Ikezawa , et al. May 4, 2	2010-05-04
Projection optical system and method for photolithography and exposure apparatus and method using same Grant 7,701,640 - Omura , et al. April 20, 2	2010-04-20
Projection optical system and method for photolithography and exposure apparatus and method using same Grant 7,688,517 - Omura , et al. March 30, 2	2010-03-30
Projection optical system, exposure system, and exposure method Grant 7,688,422 - Ikezawa , et al. March 30, 2	2010-03-30
Projection optical system and method for photolithography and exposure apparatus and method using same Grant 7,619,827 - Omura , et al. November 17, 2	2009-11-17
Projection optical system and method for photolithography and exposure apparatus and method using same Grant 7,609,455 - Omura , et al. October 27, 2	2009-10-27
Projection optical system and method for photolithography and exposure apparatus and method using same Grant 7,580,197 - Omura , et al. August 25, 2	2009-08-25
Immersion objective optical system, exposure apparatus, device fabrication method, and boundary optical element Grant 7,557,997 - Omura , et al. July 7, 2	2009-07-07
Projection optical system, exposure apparatus, and exposure method App 20090168189 - Omura; Yasuhiro	2009-07-02
Projection optical system and method for photolithography and exposure apparatus and method using same Grant 7,551,362 - Omura , et al. June 23, 2	2009-06-23
Projection optical system, exposure apparatus, and exposure method App 20090092925 - Omura; Yasuhiro	2009-04-09
Projection optical system, exposure apparatus, and exposure method App 20090046268 - Omura; Yasuhiro ; et al.	2009-02-19
Catadioptric imaging system, exposure apparatus, and device manufacturing method App 20090027768 - Omura; Yasuhiro	2009-01-29
Projection optical system, exposure apparatus, and exposure method Grant 7,471,374 - Omura , et al. December 30, 2	2008-12-30
Catadioptric Imaging System, Exposure Device, And Device Manufacturing Method App 20080304036 - OMURA; Yasuhiro	2008-12-11
Projection optical system, exposure apparatus, and exposure method Grant 7,457,042 - Omura November 25, 2	2008-11-25
Optical System, Exposing Apparatus and Exposing Method App 20080273185 - Omura; Yasuhiro ; et al.	2008-11-06
Projection Optical System, Exposure Apparatus, And Device Manufacturing Method App 20080259440 - Omura; Yasuhiro	2008-10-23
Exposure Method, Exposure Apparatus and Device Manufacturing Method App 20080218714 - Uehara; Yusaku ; et al.	2008-09-11
Projection Optical System, Exposure Apparatus, and Exposure Method App 20080165336 - Omura; Yasuhiro ; et al.	2008-07-10
Exposure Apparatus, Exposure Method, and Method for Producing Device App 20080106707 - Kobayashi; Naoyuki ; et al.	2008-05-08
Projection optical system and method for photolithography and exposure apparatus and method using same App 20080094696 - Omura; Yasuhiro ; et al.	2008-04-24
Projection optical system and method for photolithography and exposure apparatus and method using same Grant 7,362,508 - Omura , et al. April 22, 2	2008-04-22
Immersion objective optical system, exposure apparatus, device fabrication method, and boundary optical element App 20080080067 - Omura; Yasuhiro ; et al.	2008-04-03
Projection optical system, exposure apparatus, and exposure method Grant 7,348,575 - Omura March 25, 2	2008-03-25
Projection optical system and method for photolithography and exposure apparatus and method using same App 20080068573 - Omura; Yasuhiro ; et al.	2008-03-20
Projection optical system and method for photolithography and exposure apparatus and method using same App 20080068724 - Omura; Yasuhiro ; et al.	2008-03-20
Projection optical system and method for photolithography and exposure apparatus and method using same App 20080068576 - Omura; Yasuhiro ; et al.	2008-03-20
Projection optical system and method for photolithography and exposure apparatus and method using same App 20080049336 - Omura; Yasuhiro ; et al.	2008-02-28
Projection optical system and method for photolithography and exposure apparatus and method using same App 20080049306 - Omura; Yasuhiro ; et al.	2008-02-28
Projection Optical System, Exposure Apparatus, Exposure System, And Exposure Method App 20080018870 - Omura; Yasuhiro	2008-01-24
Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices Grant 7,319,508 - Omura , et al. January 15, 2	2008-01-15
Optical System, Exposure System, and Exposure Method App 20070296941 - Omura; Yasuhiro	2007-12-27
Projection optical system, exposure apparatus, and exposure method App 20070297072 - Omura; Yasuhiro	2007-12-27
Projection optical system, exposure apparatus, and exposure method Grant 7,312,463 - Omura December 25, 2	2007-12-25
Projection optical system, exposure apparatus, and exposure method Grant 7,309,870 - Omura December 18, 2	2007-12-18
Projection Optical System, Exposure System, And Exposure Method App 20070285633 - Ikezawa; Hironori ; et al.	2007-12-13
Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices Grant 7,301,605 - Omura , et al. November 27, 2	2007-11-27
Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices App 20070268474 - Omura; Yasuhiro ; et al.	2007-11-22
Projection optical system, exposure system, and exposure method App 20070188879 - Ikezawa; Hironori ; et al.	2007-08-16
Projection optical system, exposure apparatus, and exposure method App 20070037080 - Omura; Yasuhiro	2007-02-15
Projection optical system, exposure apparatus, and exposure method App 20070037079 - Omura; Yasuhiro	2007-02-15
Projection optical system, exposure apparatus, and exposure method App 20070024960 - Omura; Yasuhiro	2007-02-01
Projection optical system, exposure apparatus, and device production method Grant 7,154,585 - Shigematsu , et al. December 26, 2	2006-12-26
Projection optical system, exposure apparatus, and exposure method App 20060121364 - Omura; Yasuhiro	2006-06-08
Projection optical system, exposure apparatus, and exposure method App 20060087633 - Omura; Yasuhiro ; et al.	2006-04-27
Projection optical system, exposure apparatus, and exposure method App 20060001981 - Omura; Yasuhiro	2006-01-05
Projection optical system and method for photolithography and exposure apparatus and method using same App 20050248856 - Omura, Yasuhiro ; et al.	2005-11-10
Projection optical system, exposure apparatus and exposure method Grant 6,909,492 - Omura June 21, 2	2005-06-21
Projection optical system and an exposure apparatus with the projection optical system App 20050122499 - Omura, Yasuhiro ; et al.	2005-06-09
Projection optical system, exposure apparatus incorporating this projection optical system, and manufacturing method for micro devices using the exposure apparatus Grant 6,903,803 - Omura June 7, 2	2005-06-07
Projection exposure methods and apparatus, and projection optical systems Grant 6,864,961 - Omura March 8, 2	2005-03-08
Optical system and exposure apparatus provided with the optical system Grant 6,844,915 - Owa , et al. January 18, 2	2005-01-18
Projection optical system, exposure system provided with the projection optical system, and exposure method using the projection optical system Grant 6,844,982 - Omura January 18, 2	2005-01-18
Projection optical system and an exposure apparatus with the projection optical system Grant 6,831,731 - Omura , et al. December 14, 2	2004-12-14
Production method of projection optical system Grant 6,788,389 - Fujishima , et al. September 7, 2	2004-09-07
Projection exposure apparatus App 20040150878 - Omura, Yasuhiro	2004-08-05
Projection optical system, exposure apparatus, and exposure method Grant 6,768,537 - Suzuki , et al. July 27, 2	2004-07-27
Projection optical system, manufacturing method thereof, and projection exposure apparatus Grant 6,757,051 - Takahashi , et al. June 29, 2	2004-06-29
Projection optical system, exposure apparatus incorporating this projection optical system, and manufacturing method for micro devices using the exposure apparatus App 20040119962 - Omura, Yasuhiro	2004-06-24
Projection Optical System, Projection Exposure Apparatus Having The Projection Optical System, Projection Method Thereof, Exposure Method Thereof And Fabricating Method For Fabricating A Device Using The Projection Exposure Apparatus Grant 6,750,948 - Omura June 15, 2	2004-06-15
Projection eposure apparatus and method App 20040070852 - Omura, Yasuhiro ; et al.	2004-04-15
Projection optical system, projection exposure apparatus, and projection exposure method Grant 6,714,280 - Omura March 30, 2	2004-03-30
Exposure apparatus and method Grant 6,707,601 - Suenaga , et al. March 16, 2	2004-03-16
Projection optical system, exposure apparatus, and device production method App 20040009415 - Shigematsu, Koji ; et al.	2004-01-15
Projection optical system, exposure system provided with the projection optical system, and exposure method using the projection optical system App 20040004771 - Omura, Yasuhiro	2004-01-08
Projection exposure methods and apparatus, and projection optical systems Grant 6,674,513 - Omura January 6, 2	2004-01-06
Projection optical system, exposure apparatus and exposure method App 20030234912 - Omura, Yasuhiro	2003-12-25
Projection exposure apparatus with a catadioptric projection optical system Grant 6,661,499 - Omura , et al. December 9, 2	2003-12-09
Projection optical system, exposure apparatus, and exposure method App 20030218729 - Suzuki, Takeshi ; et al.	2003-11-27
Exposure apparatus and method App 20030210459 - Suenaga, Yutaka ; et al.	2003-11-13
Exposure apparatus and method Grant 6,646,797 - Suenaga , et al. November 11, 2	2003-11-11
Projection exposure methods and apparatus, and projection optical systems App 20030206282 - Omura, Yasuhiro	2003-11-06
Projection exposure apparatus and method Grant 6,639,732 - Omura , et al. October 28, 2	2003-10-28
Catadioptric imaging system and a projection exposure apparatus provided with said imaging system Grant 6,639,734 - Omura October 28, 2	2003-10-28
Projection optical system, fabrication method thereof, exposure apparatus and exposure method App 20030197946 - Omura, Yasuhiro	2003-10-23
Projection exposure methods and apparatus, and projection optical systems Grant 6,606,144 - Omura August 12, 2	2003-08-12
Projection exposure methods and apparatus, and projection optical systems App 20030147061 - Omura, Yasuhiro	2003-08-07
Projection exposure apparatus and method App 20030137749 - Omura, Yasuhiro ; et al.	2003-07-24
Exposure apparatus and method App 20030090786 - Suenaga, Yutaka ; et al.	2003-05-15
Projection optical system, projection exposure apparatus, and projection exposure method Grant 6,556,353 - Omura April 29, 2	2003-04-29
Projection optical system, projection exposure apparatus, and projection exposure method App 20030063393 - Omura, Yasuhiro	2003-04-03
Projection optical system and an exposure apparatus with the projection optical system App 20030058421 - Omura, Yasuhiro ; et al.	2003-03-27
Production method of projection optical system App 20030053036 - Fujishima, Youhei ; et al.	2003-03-20
Catadioptric imaging system and a projection exposure apparatus provided with said imaging system App 20030030917 - Omura, Yasuhiro	2003-02-13
Optical system and exposure apparatus provided with the optical system App 20030025894 - Owa, Soichi ; et al.	2003-02-06
Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices App 20030011755 - Omura, Yasuhiro ; et al.	2003-01-16
Optical system and exposure apparatus equipped with the optical system App 20030011893 - Shiraishi, Naomasa ; et al.	2003-01-16
Projection exposure apparatus with a catadioptric projection optical system App 20030011756 - Omura, Yasuhiro ; et al.	2003-01-16
Projection optical system, projection exposure apparatus, and projection exposure method App 20020186355 - Omura, Yasuhiro	2002-12-12
Projection optical system, and projection exposure apparatus having the projection optical system, projection method thereof, exposure method thereof and fabricating method for fabricating a device using the projection exposure apparatus App 20020176063 - Omura, Yasuhiro	2002-11-28
Catadioptric imaging system and a projection exposure apparatus provided with said imaging system Grant 6,473,243 - Omura October 29, 2	2002-10-29
Projection exposure apparatus with a catadioptric projection optical system Grant 6,466,303 - Omura , et al. October 15, 2	2002-10-15
Projection exposure apparatus and method App 20020145811 - Omura, Yasuhiro	2002-10-10
Exposure apparatus and method Grant 6,451,507 - Suenaga , et al. September 17, 2	2002-09-17
Projection optical system, manufacturing method thereof, and projection exposure apparatus App 20020044260 - Takahashi, Tetsuo ; et al.	2002-04-18
Projection optical system, exposure apparatus incorporating this projection optical system, and manufacturing method for micro devices using the exposure apparatus App 20020005938 - Omura, Yasuhiro	2002-01-17
Catadioptric reduction optical system Grant 6,069,749 - Omura May 30, 2	2000-05-30
Catadioptric optical system and adjusting method Grant 5,835,284 - Takahashi , et al. November 10, 1	1998-11-10
Catadioptric system for photolithography Grant 5,835,275 - Takahashi , et al. November 10, 1	1998-11-10
Catadioptric system for photolithography Grant 5,805,357 - Omura September 8, 1	1998-09-08
Apparatus for descaling metal strip Grant 4,251,956 - Hirata , et al. February 24, 1	1981-02-24