Patent | Date |
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Method and apparatus for depositing a monolayer on a three dimensional structure Grant 11,031,247 - Omstead June 8, 2 | 2021-06-08 |
Methods of forming silicon-containing dielectric materials and methods of forming a semiconductor device comprising nitrogen radicals and oxygen-containing, silicon-containing, or carbon-containing precursors Grant 10,930,846 - Omstead , et al. February 23, 2 | 2021-02-23 |
Methods Of Forming Silicon-containing Dielectric Materials And Methods Of Forming A Semiconductor Device App 20200052202 - Omstead; Thomas R. ;   et al. | 2020-02-13 |
Semiconductor device structures including silicon-containing dielectric materials Grant 10,468,595 - Omstead , et al. No | 2019-11-05 |
Semiconductor Device Structures Including Silicon-containing Dielectric Materials App 20190051826 - Omstead; Thomas R. ;   et al. | 2019-02-14 |
Semiconductor device structures including silicon-containing dielectric materials Grant 10,121,966 - Omstead , et al. November 6, 2 | 2018-11-06 |
Method And Apparatus For Depositing A Monolayer On A Three Dimensional Structure App 20180182627 - Omstead; Thomas R. | 2018-06-28 |
High efficiency apparatus and method for depositing a layer on a three dimensional structure Grant 9,929,015 - Omstead , et al. March 27, 2 | 2018-03-27 |
Method for selectively depositing a layer on a three dimensional structure Grant 9,847,228 - Ruffell , et al. December 19, 2 | 2017-12-19 |
Techniques And Apparatus For Anisotropic Metal Etching App 20160379844 - Omstead; Thomas R. ;   et al. | 2016-12-29 |
Method For Selectively Depositing A Layer On A Three Dimensional Structure App 20160379827 - Ruffell; Simon ;   et al. | 2016-12-29 |
Techniques and apparatus for anisotropic metal etching Grant 9,460,961 - Omstead , et al. October 4, 2 | 2016-10-04 |
Method for selectively depositing a layer on a three dimensional structure Grant 9,453,279 - Ruffell , et al. September 27, 2 | 2016-09-27 |
Semiconductor Device Structures Including Silicon-containing Dielectric Materials App 20160233419 - Omstead; Thomas R. ;   et al. | 2016-08-11 |
Techniques and apparatus for anisotropic metal etching Grant 9,396,965 - Ma , et al. July 19, 2 | 2016-07-19 |
Methods of forming silicon-containing dielectric materials and semiconductor device structures Grant 9,343,317 - Omstead , et al. May 17, 2 | 2016-05-17 |
Techniques And Apparatus For Anisotropic Metal Etching App 20160042922 - Omstead; Thomas R. ;   et al. | 2016-02-11 |
Techniques And Apparatus For Anisotropic Metal Etching App 20160042975 - MA; Tristan ;   et al. | 2016-02-11 |
Method And Apparatus For Depositing A Monolayer On A Three Dimensional Structure App 20160002784 - Omstead; Thomas R. | 2016-01-07 |
Method For Selectively Depositing A Layer On A Three Dimensional Structure App 20160005607 - Russell; Simon ;   et al. | 2016-01-07 |
High Efficiency Apparatus And Method For Depositing A Layer On A Three Dimensional Structure App 20160005594 - Omstead; Thomas R. ;   et al. | 2016-01-07 |
Methods Of Forming Silicon-containing Dielectric Materials And Semiconductor Device Structures, And Related Semiconductor Device Structures App 20150004805 - Omstead; Thomas R. ;   et al. | 2015-01-01 |
Low Platinum Fuel Cells, Catalysts, and Method for Preparing the Same App 20120238440 - Gu; Tao ;   et al. | 2012-09-20 |
Low platinum fuel cells, catalysts, and method for preparing the same Grant 8,211,593 - Gu , et al. July 3, 2 | 2012-07-03 |
Low platinum fuel cells, catalysts, and method for preparing the same App 20060172179 - Gu; Tao ;   et al. | 2006-08-03 |
Footwear containing improved audio/visual displays Grant 7,059,070 - Omstead , et al. June 13, 2 | 2006-06-13 |
Atomic layer deposition for fabricating thin films Grant 7,037,574 - Paranjpe , et al. May 2, 2 | 2006-05-02 |
Umbrella with hologram App 20050279390 - Omstead, Thomas R. ;   et al. | 2005-12-22 |
Musical instrument App 20050172785 - Fisher-Robbins, Holly E. ;   et al. | 2005-08-11 |
Atomic layer deposition systems and methods Grant 6,902,620 - Omstead , et al. June 7, 2 | 2005-06-07 |
Footwear containing improved audio/visual displays App 20050091884 - Omstead, Thomas R. ;   et al. | 2005-05-05 |
Method for obtaining adhesion for device manufacture Grant 6,713,373 - Omstead March 30, 2 | 2004-03-30 |
Apparatus for supporting a substrate in a reaction chamber Grant 6,692,575 - Omstead , et al. February 17, 2 | 2004-02-17 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method Grant 6,645,847 - Paranjpe , et al. November 11, 2 | 2003-11-11 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method Grant 6,627,995 - Paranjpe , et al. September 30, 2 | 2003-09-30 |
System for fabricating a device on a substrate with a process gas Grant 6,544,341 - Omstead , et al. April 8, 2 | 2003-04-08 |
Apparatus for dispensing gas for fabricating substrates Grant 6,508,197 - Omstead , et al. January 21, 2 | 2003-01-21 |
Atomic layer deposition for fabricating thin films App 20030003635 - Paranjpe, Ajit P. ;   et al. | 2003-01-02 |
Method for forming a copper film on a substrate Grant 6,461,675 - Paranjpe , et al. October 8, 2 | 2002-10-08 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method App 20020137332 - Paranjpe, Ajit P. ;   et al. | 2002-09-26 |
Method of chemical-vapor deposition of a material Grant 6,444,263 - Paranjpe , et al. September 3, 2 | 2002-09-03 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method App 20020102838 - Paranjpe, Ajit P. ;   et al. | 2002-08-01 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method Grant 6,365,502 - Paranjpe , et al. April 2, 2 | 2002-04-02 |
Method For Forming A Copper Film On A Substrate App 20020006468 - PARANJPE, AJIT P. ;   et al. | 2002-01-17 |
Method for fabricating a device on a substrate Grant 6,274,495 - Omstead , et al. August 14, 2 | 2001-08-14 |
Method and system for dispensing process gas for fabricating a device on a substrate Grant 6,190,732 - Omstead , et al. February 20, 2 | 2001-02-20 |
High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition Grant 5,876,573 - Moslehi , et al. March 2, 1 | 1999-03-02 |
Temperature controlled chuck for vacuum processing Grant 5,775,416 - Heimanson , et al. July 7, 1 | 1998-07-07 |
High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition Grant 5,746,897 - Heimanson , et al. May 5, 1 | 1998-05-05 |
Method for deposition of a conductor in integrated circuits Grant 5,663,098 - Creighton , et al. September 2, 1 | 1997-09-02 |