Patent | Date |
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Oxide Semiconductor Film And Semiconductor Device App 20210159345 - YAMAZAKI; Shunpei ;   et al. | 2021-05-27 |
Oxide semiconductor film and semiconductor device Grant 10,916,663 - Yamazaki , et al. February 9, 2 | 2021-02-09 |
Oxide Semiconductor Film And Semiconductor Device App 20180308989 - YAMAZAKI; Shunpei ;   et al. | 2018-10-25 |
Method for manufacturing oxide semiconductor film Grant 10,103,277 - Yamazaki , et al. October 16, 2 | 2018-10-16 |
Oxide Semiconductor Film And Semiconductor Device App 20170309754 - YAMAZAKI; Shunpei ;   et al. | 2017-10-26 |
Oxide semiconductor film and semiconductor device Grant 9,711,655 - Yamazaki , et al. July 18, 2 | 2017-07-18 |
Semiconductor device and method of manufacturing semiconductor device Grant 9,490,351 - Honda , et al. November 8, 2 | 2016-11-08 |
Oxide Semiconductor Film And Semiconductor Device App 20160240694 - YAMAZAKI; Shunpei ;   et al. | 2016-08-18 |
Oxide semiconductor film and semiconductor device Grant 9,331,208 - Yamazaki , et al. May 3, 2 | 2016-05-03 |
Oxide Semiconductor Film And Semiconductor Device App 20150179805 - YAMAZAKI; Shunpei ;   et al. | 2015-06-25 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20150179777 - HONDA; Tatsuya ;   et al. | 2015-06-25 |
Semiconductor device and manufacturing method thereof Grant 9,054,205 - Yamazaki , et al. June 9, 2 | 2015-06-09 |
Oxide semiconductor film and semiconductor device Grant 8,994,021 - Yamazaki , et al. March 31, 2 | 2015-03-31 |
Semiconductor device and method of manufacturing semiconductor device Grant 8,987,728 - Honda , et al. March 24, 2 | 2015-03-24 |
Manufacturing method and manufacturing apparatus of semiconductor substrate Grant 8,985,173 - Omata , et al. March 24, 2 | 2015-03-24 |
Manufacturing method of gallium oxide single crystal Grant 8,900,362 - Miyanaga , et al. December 2, 2 | 2014-12-02 |
Oxide Semiconductor Film And Semiconductor Device App 20140183532 - YAMAZAKI; Shunpei ;   et al. | 2014-07-03 |
Manufacturing method of oxide semiconductor film and manufacturing method of transistor Grant 8,703,531 - Honda , et al. April 22, 2 | 2014-04-22 |
Oxide semiconductor film and semiconductor device Grant 8,680,522 - Yamazaki , et al. March 25, 2 | 2014-03-25 |
Semiconductor device Grant 8,669,556 - Yamazaki , et al. March 11, 2 | 2014-03-11 |
Semiconductor Device And Manufacturing Method Thereof App 20140048801 - Yamazaki; Shunpei ;   et al. | 2014-02-20 |
Semiconductor device and manufacturing method thereof Grant 8,569,754 - Yamazaki , et al. October 29, 2 | 2013-10-29 |
Semiconductor device and method for manufacturing semiconductor device Grant 8,546,892 - Imoto , et al. October 1, 2 | 2013-10-01 |
Oxide Semiconductor Film And Semiconductor Device App 20130214273 - YAMAZAKI; Shunpei ;   et al. | 2013-08-22 |
Lighting device Grant 8,456,083 - Tanaka , et al. June 4, 2 | 2013-06-04 |
Lighting Device App 20130020932 - Tanaka; Koichiro ;   et al. | 2013-01-24 |
Method of crystallizing semiconductor film and method of manufacturing semiconductor device Grant 8,349,714 - Tanaka , et al. January 8, 2 | 2013-01-08 |
Method of manufacturing semiconductor device with crystallized semiconductor film Grant 8,338,278 - Tanaka , et al. December 25, 2 | 2012-12-25 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20120241734 - HONDA; Tatsuya ;   et al. | 2012-09-27 |
Lighting device Grant 8,232,723 - Tanaka , et al. July 31, 2 | 2012-07-31 |
Method for manufacturing semiconductor device Grant 8,227,353 - Omata , et al. July 24, 2 | 2012-07-24 |
Oxide Semiconductor Film And Semiconductor Device App 20120138922 - YAMAZAKI; Shunpei ;   et al. | 2012-06-07 |
Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device Grant 8,188,402 - Tanaka , et al. May 29, 2 | 2012-05-29 |
Semiconductor Device And Manufacturing Method Thereof App 20120112184 - Yamazaki; Shunpei ;   et al. | 2012-05-10 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20120097942 - Imoto; Yuki ;   et al. | 2012-04-26 |
Substrate with marker, manufacturing method thereof, laser irradiation apparatus, laser irradiation method, light exposure apparatus, and manufacturing method of semiconductor device Grant 8,138,058 - Tanaka , et al. March 20, 2 | 2012-03-20 |
Manufacturing Method Of Gallium Oxide Single Crystal App 20110220011 - MIYANAGA; Akiharu ;   et al. | 2011-09-15 |
Manufacturing Method And Manufacturing Apparatus Of Semiconductor Substrate App 20110214610 - Omata; Takatsugu ;   et al. | 2011-09-08 |
Manufacturing Method Of Oxide Semiconductor Film And Manufacturing Method Of Transistor App 20110217815 - HONDA; Tatsuya ;   et al. | 2011-09-08 |
Method for manufacturing crystalline semiconductor film and method for manufacturing thin film transistor Grant 7,960,261 - Omata June 14, 2 | 2011-06-14 |
Manufacturing method and manufacturing apparatus of semiconductor substrate Grant 7,947,570 - Omata , et al. May 24, 2 | 2011-05-24 |
Lighting Device App 20110062855 - Tanaka; Koichiro ;   et al. | 2011-03-17 |
Laser irradiation apparatus and laser irradiation method Grant 7,772,523 - Tanaka , et al. August 10, 2 | 2010-08-10 |
Beam homogenizer, and laser irradiation method, laser irradiation apparatus, and laser annealing method of non-single crystalline semiconductor film using the same Grant 7,664,365 - Tanaka , et al. February 16, 2 | 2010-02-16 |
Manufacturing Method And Manufacturing Apparatus Of Semiconductor Substrate App 20090181518 - OMATA; Takatsugu ;   et al. | 2009-07-16 |
Beam Homogenizer, and Laser Irradiation Method, Laser Irradiation Apparatus, and Laser Annealing Method of Non-Single Crystalline Semiconductor Film Using the Same App 20080280425 - Tanaka; Koichiro ;   et al. | 2008-11-13 |
Method for Manufacturing Crystalline Semiconductor Film and Method for Manufacturing Thin Film Transistor App 20080233719 - Omata; Takatsugu | 2008-09-25 |
Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device App 20080223838 - Tanaka; Koichiro ;   et al. | 2008-09-18 |
Method Of Crystallizing Semiconductor Film And Method Of Manufacturing Semiconductor Device App 20080214021 - TANAKA; Koichiro ;   et al. | 2008-09-04 |
Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device Grant 7,393,764 - Tanaka , et al. July 1, 2 | 2008-07-01 |
Method Of Manufacturing Semiconductor Device App 20080131663 - TANAKA; Koichiro ;   et al. | 2008-06-05 |
Substrate with Marker, Manufacturing Method Thereof, Laser Irradiation Apparatus, Laser Irradiation Method, Light Exposure Apparatus, and Manufacturing Method of Semiconductor Device App 20080121819 - Tanaka; Koichiro ;   et al. | 2008-05-29 |
Method for manufacturing semiconductor device App 20080057718 - Omata; Takatsugu ;   et al. | 2008-03-06 |
Laser irradiation apparatus and laser irradiation method App 20070158315 - Tanaka; Koichiro ;   et al. | 2007-07-12 |
Laser treatment apparatus, laser treatment method, and manufacturing method of semiconductor device App 20060141754 - Tanaka; Koichiro ;   et al. | 2006-06-29 |