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Neural interface methods and apparatus to provide artificial sensory capabilities to a subject Grant 10,993,665 - Buerger , et al. May 4, 2 | 2021-05-04 |
Trimming method for microresonators and microresonators made thereby Grant 10,148,244 - Henry , et al. De | 2018-12-04 |
Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals Grant 10,141,495 - Nordquist , et al. Nov | 2018-11-27 |
Method and apparatus of enhanced thermoelectric cooling and power conversion Grant 10,072,879 - El-Kady , et al. September 11, 2 | 2018-09-11 |
Methods for suppressing spurious modes in microresonators Grant 10,009,002 - Branch , et al. June 26, 2 | 2018-06-26 |
Attenuation of spurious responses in electromechanical filters Grant 9,941,857 - Olsson , et al. April 10, 2 | 2018-04-10 |
Second harmonic generation in resonant optical structures Grant 9,865,987 - Eichenfield , et al. January 9, 2 | 2018-01-09 |
Thermally-isolated silicon-based integrated circuits and related methods Grant 9,646,874 - Wojciechowski , et al. May 9, 2 | 2017-05-09 |
Single crystal micromechanical resonator Grant 9,641,154 - Olsson , et al. May 2, 2 | 2017-05-02 |
Single Crystal Micromechanical Resonator And Fabrication Methods Thereof App 20170054432 - Olsson; Roy H. ;   et al. | 2017-02-23 |
Single crystal micromechanical resonator and fabrication methods thereof Grant 9,525,398 - Olsson , et al. December 20, 2 | 2016-12-20 |
Methods for dry etching semiconductor devices Grant 9,484,216 - Bauer , et al. November 1, 2 | 2016-11-01 |
Programmable electroacoustic filter apparatus and method for its manufacture Grant 9,276,557 - Nordquist , et al. March 1, 2 | 2016-03-01 |
Apparatuses and methods for tuning center frequencies Grant 9,270,281 - Wojciechowski , et al. February 23, 2 | 2016-02-23 |
Tuning method for microresonators and microresonators made thereby Grant 9,203,134 - Henry , et al. December 1, 2 | 2015-12-01 |
Ovenized microelectromechanical system (MEMS) resonator Grant 8,669,823 - Olsson , et al. March 11, 2 | 2014-03-11 |
MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads Grant 8,597,985 - Chanchani , et al. December 3, 2 | 2013-12-03 |
Nano-optomechanical transducer Grant 8,600,200 - Rakich , et al. December 3, 2 | 2013-12-03 |
Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material Grant 8,525,619 - Olsson , et al. September 3, 2 | 2013-09-03 |
Synthetic thermoelectric materials comprising phononic crystals Grant 8,508,370 - El-Kady , et al. August 13, 2 | 2013-08-13 |
Phononic crystal devices Grant 8,094,023 - El-Kady , et al. January 10, 2 | 2012-01-10 |
Microfabricated bulk wave acoustic bandgap device Grant 7,836,566 - Olsson , et al. November 23, 2 | 2010-11-23 |
Microfabricated bulk wave acoustic bandgap device Grant 7,733,198 - Olsson , et al. June 8, 2 | 2010-06-08 |
Microelectromechanical resonator and method for fabrication Grant 7,652,547 - Wittwer , et al. January 26, 2 | 2010-01-26 |
Microelectromechanical resonator and method for fabrication Grant 7,616,077 - Wittwer , et al. November 10, 2 | 2009-11-10 |
Contour mode resonators with acoustic reflectors Grant 7,385,334 - Olsson , et al. June 10, 2 | 2008-06-10 |