| Patent | Date |
|---|
Methods for variable etch depths
Grant 11,456,205 - Evans , et al. September 27, 2 | 2022-09-27 |
Modulation of rolling K vectors of angled gratings
Grant 11,456,152 - Olson , et al. September 27, 2 | 2022-09-27 |
Formation Of Angled Gratings
App 20220301926 - MEYER TIMMERMAN THIJSSEN; Rutger ; et al. | 2022-09-22 |
Controlling Etch Angles By Substrate Rotation In Angled Etch Tools
App 20220260764 - MEYER TIMMERMAN THIJSSEN; Rutger ; et al. | 2022-08-18 |
Optical component having variable depth gratings and method of formation
Grant 11,404,278 - Hautala , et al. August 2, 2 | 2022-08-02 |
Shadow Mask Apparatus And Methods For Variable Etch Depths
App 20220238295 - Olson; Joseph C. ; et al. | 2022-07-28 |
Controlling etch angles by substrate rotation in angled etch tools
Grant 11,397,289 - Meyer Timmerman Thijssen , et al. July 26, 2 | 2022-07-26 |
In situ angle measurement using channeling
Grant 11,387,073 - Sinclair , et al. July 12, 2 | 2022-07-12 |
Formation of angled gratings
Grant 11,380,578 - Meyer Timmerman Thijssen , et al. July 5, 2 | 2022-07-05 |
Modulation of ion beam angle
Grant 11,367,589 - Olson , et al. June 21, 2 | 2022-06-21 |
Method Of Forming A Plurality Of Gratings
App 20220161363 - EVANS; Morgan ; et al. | 2022-05-26 |
Shadow mask apparatus and methods for variable etch depths
Grant 11,335,531 - Olson , et al. May 17, 2 | 2022-05-17 |
Electrodynamic Mass Analysis With Rf Biased Ion Source
App 20220139691 - Likhanskii; Alexandre ; et al. | 2022-05-05 |
Techniques For Variable Deposition Profiles
App 20220119955 - Zeeshan; M. Arif ; et al. | 2022-04-21 |
Devices And Methods For Variable Etch Depths
App 20220100078 - Zeeshan; M. Arif ; et al. | 2022-03-31 |
Handling And Processing Double-sided Devices On Fragile Substrates
App 20220077794 - MCMILLAN; Wayne ; et al. | 2022-03-10 |
Apparatus And Techniques For Angled Etching Using Multielectrode Extraction Source
App 20220051880 - Kurunczi; Peter F. ; et al. | 2022-02-17 |
Method of forming a plurality of gratings
Grant 11,247,298 - Evans , et al. February 15, 2 | 2022-02-15 |
System and method for forming surface relief gratings
Grant 11,226,439 - Olson , et al. January 18, 2 | 2022-01-18 |
Methods of producing slanted gratings with variable etch depths
Grant 11,226,441 - Evans , et al. January 18, 2 | 2022-01-18 |
Handling and processing double-sided devices on fragile substrates
Grant 11,205,978 - McMillan , et al. December 21, 2 | 2021-12-21 |
Apparatus And System Including High Angle Extraction Optics
App 20210391155 - Campbell; Christopher ; et al. | 2021-12-16 |
Apparatus and techniques for angled etching using multielectrode extraction source
Grant 11,195,703 - Kurunczi , et al. December 7, 2 | 2021-12-07 |
Methods of forming devices on a substrate
Grant 11,193,198 - Olson , et al. December 7, 2 | 2021-12-07 |
Methods For Variable Etch Depths
App 20210351069 - Evans; Morgan ; et al. | 2021-11-11 |
Controlling Etch Angles By Substrate Rotation In Angled Etch Tools
App 20210333450 - MEYER TIMMERMAN THIJSSEN; Rutger ; et al. | 2021-10-28 |
System And Methods Using An Inline Surface Engineering Source
App 20210313154 - Hatem; Christopher ; et al. | 2021-10-07 |
In Situ Angle Measurement Using Channeling
App 20210305011 - Sinclair; Frank ; et al. | 2021-09-30 |
Techniques for forming angled structures
Grant 11,119,405 - Evans , et al. September 14, 2 | 2021-09-14 |
Shadow Mask Apparatus And Methods For Variable Etch Depths
App 20210257179 - Olson; Joseph C. ; et al. | 2021-08-19 |
Etch Improvement
App 20210247554 - MEYER TIMMERMAN THIJSSEN; Rutger ; et al. | 2021-08-12 |
System and methods using an inline surface engineering source
Grant 11,069,511 - Hatem , et al. July 20, 2 | 2021-07-20 |
Apparatus And Techniques For Substrate Processing Using Independent Ion Source And Radical Source
App 20210166946 - Renau; Anthony ; et al. | 2021-06-03 |
Methods Of Producing Slanted Gratings With Variable Etch Depths
App 20210141131 - Evans; Morgan ; et al. | 2021-05-13 |
Optical component having depth modulated angled gratings and method of formation
Grant 10,935,799 - Meyer Timmerman Thijssen , et al. March 2, 2 | 2021-03-02 |
Gate all around device and method of formation using angled ions
Grant 10,930,735 - Sung , et al. February 23, 2 | 2021-02-23 |
Modulation Of Rolling K Vectors Of Angled Gratings
App 20210027985 - OLSON; Joseph C. ; et al. | 2021-01-28 |
Optical Component Having Variable Depth Gratings And Method Of Formation
App 20210005461 - Hautala; John ; et al. | 2021-01-07 |
Beamline Architecture With Integrated Plasma Processing
App 20200411342 - Hatem; Christopher R. ; et al. | 2020-12-31 |
Methods of producing slanted gratings with variable etch depths
Grant 10,823,888 - Evans , et al. November 3, 2 | 2020-11-03 |
Optical component having variable depth gratings and method of formation
Grant 10,818,499 - Hautala , et al. October 27, 2 | 2020-10-27 |
Apparatus, System And Techniques For Mass Analyzed Ion Beam
App 20200294755 - Sinclair; Frank ; et al. | 2020-09-17 |
System and method for detecting etch depth of angled surface relief gratings
Grant 10,775,158 - Olson , et al. Sept | 2020-09-15 |
Apparatus, system and techniques for mass analyzed ion beam
Grant 10,763,072 - Sinclair , et al. Sep | 2020-09-01 |
Modulation Of Rolling K Vectors Of Angled Gratings
App 20200194227 - OLSON; Joseph C. ; et al. | 2020-06-18 |
Methods For Controlling Etch Depth By Localized Heating
App 20200189036 - EVANS; Morgan ; et al. | 2020-06-18 |
Methods Of Forming Devices On A Substrate
App 20200190658 - OLSON; Joseph C. ; et al. | 2020-06-18 |
Methods Of Optical Device Fabrication Using An Ion Beam Source
App 20200192028 - GODET; Ludovic ; et al. | 2020-06-18 |
Method Of Forming Gratings
App 20200192010 - OLSON; Joseph C. ; et al. | 2020-06-18 |
Method Of Forming A Plurality Of Gratings
App 20200192031 - EVANS; Morgan ; et al. | 2020-06-18 |
Handling And Processing Double-sided Devices On Fragile Substrates
App 20200195172 - MCMILLAN; Wayne ; et al. | 2020-06-18 |
Modulation Of Ion Beam Angle
App 20200194228 - OLSON; Joseph C. ; et al. | 2020-06-18 |
Ion Beam Source For Optical Device Fabrication
App 20200194217 - GODET; Ludovic ; et al. | 2020-06-18 |
Scanned Angled Etching Apparatus And Techniques Providing Separate Co-linear Radicals And Ions
App 20200194226 - Kurunczi; Peter F. ; et al. | 2020-06-18 |
Apparatus And Techniques For Angled Etching Using Multielectrode Extraction Source
App 20200185201 - Kurunczi; Peter F. ; et al. | 2020-06-11 |
Gate All Around Device And Method Of Formation Using Angled Ions
App 20200185228 - Sung; Min Gyu ; et al. | 2020-06-11 |
System And Method For Detecting Etch Depth Of Angled Surface Relief Gratings
App 20200158495 - Olson; Joseph C. ; et al. | 2020-05-21 |
System And Method For Forming Surface Relief Gratings
App 20200150325 - Olson; Joseph C. ; et al. | 2020-05-14 |
Formation Of Angled Gratings
App 20200144109 - MEYER TIMMERMAN THIJSSEN; Rutger ; et al. | 2020-05-07 |
Optical Component Having Depth Modulated Angled Gratings And Method Of Formation
App 20200124865 - MEYER TIMMERMAN THIJSSEN; RUTGER ; et al. | 2020-04-23 |
Techniques For Forming Angled Structures
App 20200117080 - Evans; Morgan ; et al. | 2020-04-16 |
Gate all around device and method of formation using angled ions
Grant 10,607,847 - Sung , et al. | 2020-03-31 |
System And Methods Using An Inline Surface Engineering Source
App 20190393019 - Hatem; Christopher ; et al. | 2019-12-26 |
Optical Component Having Variable Depth Gratings And Method Of Formation
App 20190258008 - Hautala; John ; et al. | 2019-08-22 |
Modifying bulk properties of a glass substrate
Grant 10,377,665 - Olson , et al. A | 2019-08-13 |
Controlling etch angles by substrate rotation in angled etch tools
Grant 10,302,826 - Meyer Timmerman Thijssen , et al. | 2019-05-28 |
Electrodynamic mass analysis
Grant 10,192,727 - Sinclair , et al. Ja | 2019-01-29 |
Electrodynamic Mass Analysis
App 20180286653 - Sinclair; Frank ; et al. | 2018-10-04 |
Modifying Bulk Properties Of A Glass Substrate
App 20170144929 - Olson; Joseph C. ; et al. | 2017-05-25 |
High-throughput ion implanter
Grant 9,437,392 - Weaver , et al. September 6, 2 | 2016-09-06 |
Electric/magnetic field guided acid diffusion
Grant 9,377,692 - Xie , et al. June 28, 2 | 2016-06-28 |
Workpiece Processing Method And Apparatus
App 20160111254 - Evans; Morgan D. ; et al. | 2016-04-21 |
Double ended electrode manipulator
Grant 9,269,536 - Ballou , et al. February 23, 2 | 2016-02-23 |
Ion beam uniformity control using ion beam blockers
Grant 9,269,538 - Olson February 23, 2 | 2016-02-23 |
Plasma cathode charged particle lithography system
Grant 9,269,542 - Sinclair , et al. February 23, 2 | 2016-02-23 |
Electric/magnetic Field Guided Acid Diffusion
App 20150355549 - XIE; Peng ; et al. | 2015-12-10 |
Ion Beam Uniformity Control Using Ion Beam Blockers
App 20150270099 - Olson; Joseph C. | 2015-09-24 |
Apparatus to control an ion beam
Grant 9,029,811 - Purser , et al. May 12, 2 | 2015-05-12 |
Plasma Cathode Charged Particle Lithography System
App 20150123006 - Sinclair; Frank ; et al. | 2015-05-07 |
Dual Stage Scanner For Ion Beam Control
App 20150108361 - Purser; Kenneth H. ; et al. | 2015-04-23 |
Apparatus To Control An Ion Beam
App 20150108362 - Purser; Kenneth H. ; et al. | 2015-04-23 |
Platen control
Grant 9,012,337 - Chang , et al. April 21, 2 | 2015-04-21 |
Apparatus and techniques for controlling ion implantation uniformity
Grant 9,006,692 - Todorov , et al. April 14, 2 | 2015-04-14 |
Dual stage scanner for ion beam control
Grant 8,993,980 - Purser , et al. March 31, 2 | 2015-03-31 |
Method and system for modifying resist openings using multiple angled ions
Grant 8,974,683 - Godet , et al. March 10, 2 | 2015-03-10 |
Apparatus and method for controllably implanting workpieces
Grant 8,937,004 - Renau , et al. January 20, 2 | 2015-01-20 |
Dual mode ion implanter
Grant 8,884,244 - Purser , et al. November 11, 2 | 2014-11-11 |
Apparatus And Techniques For Controlling Ion Implantation Uniformity
App 20140326179 - Todorov; Stanislav S. ; et al. | 2014-11-06 |
Apparatus and techniques for controlling ion implantation uniformity
Grant 8,853,653 - Todorov , et al. October 7, 2 | 2014-10-07 |
Apparatus and techniques for controlling ion angular spread
Grant 8,841,631 - Sinclair , et al. September 23, 2 | 2014-09-23 |
Inductively coupled plasma ion source with multiple antennas for wide ion beam
Grant 8,809,803 - Biloiu , et al. August 19, 2 | 2014-08-19 |
Apparatus and method for multiple slot ion implantation
Grant 8,716,682 - Renau , et al. May 6, 2 | 2014-05-06 |
Method and system for controlling critical dimension and roughness in resist features
Grant 8,698,109 - Godet , et al. April 15, 2 | 2014-04-15 |
Inductively Coupled Plasma Ion Source With Multiple Antennas For Wide Ion Beam
App 20140042337 - Biloiu; Costel ; et al. | 2014-02-13 |
Double Ended Electrode Manipulator
App 20130270450 - Ballou; Jon ; et al. | 2013-10-17 |
Apparatus And Method For Controllably Implanting Workpieces
App 20130234034 - Renau; Anthony ; et al. | 2013-09-12 |
Apparatus and method for controllably implanting workpieces
Grant 8,461,030 - Renau , et al. June 11, 2 | 2013-06-11 |
Method And System For Controlling Critical Dimension And Roughness In Resist Features
App 20130135598 - Godet; Ludovic ; et al. | 2013-05-30 |
High-throughput Ion Implanter
App 20130108799 - Weaver; William T. ; et al. | 2013-05-02 |
Method And System For Modifying Resist Openings Using Multiple Angled Ions
App 20130062309 - Godet; Ludovic ; et al. | 2013-03-14 |
Method and system for controlling critical dimension and roughness in resist features
Grant 8,354,655 - Godet , et al. January 15, 2 | 2013-01-15 |
Ion beam tuning
Grant 8,330,125 - Chang , et al. December 11, 2 | 2012-12-11 |
Method And System For Controlling Critical Dimension And Roughness In Resist Features
App 20120280140 - Godet; Ludovic ; et al. | 2012-11-08 |
Apparatus And Method For Multiple Slot Ion Implantation
App 20120248328 - Renau; Anthony ; et al. | 2012-10-04 |
Mass analysis magnet for a ribbon beam
Grant 8,263,941 - Benveniste , et al. September 11, 2 | 2012-09-11 |
Ion source
Grant 8,188,445 - Godet , et al. May 29, 2 | 2012-05-29 |
Platen Control
App 20120088035 - Chang; Shengwu ; et al. | 2012-04-12 |
Method And System For Modifying Patterned Photoresist Using Multi-step Ion Implantation
App 20120083136 - Godet; Ludovic ; et al. | 2012-04-05 |
Insulator system for a terminal structure of an ion implantation system
Grant 8,143,604 - Low , et al. March 27, 2 | 2012-03-27 |
Ion Beam Tuning
App 20120068081 - Chang; Shengwu ; et al. | 2012-03-22 |
Method and system for modifying patterned photoresist using multi-step ion implantation
Grant 8,133,804 - Godet , et al. March 13, 2 | 2012-03-13 |
Uniformity Control Using Ion Beam Blockers
App 20120056107 - DISTASO; Daniel ; et al. | 2012-03-08 |
Apparatus for measuring beam characteristics and a method thereof
Grant 8,097,866 - Olson , et al. January 17, 2 | 2012-01-17 |
Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter
Grant 8,049,192 - Bassom , et al. November 1, 2 | 2011-11-01 |
Ion Source
App 20110186749 - Godet; Ludovic ; et al. | 2011-08-04 |
Apparatus And System For Controlling Ion Ribbon Beam Uniformity In An Ion Implanter
App 20110155929 - Bassom; Neil J. ; et al. | 2011-06-30 |
Apparatus And Method For Controllably Implanting Workpieces
App 20110124186 - Renau; Anthony ; et al. | 2011-05-26 |
Techniques For Making High Voltage Connections
App 20110094862 - MAY; Douglas E. ; et al. | 2011-04-28 |
Technique for ion beam angle spread control
Grant 7,868,305 - Gupta , et al. January 11, 2 | 2011-01-11 |
Techniques for making high voltage connections
Grant 7,863,531 - May , et al. January 4, 2 | 2011-01-04 |
High tilt implant angle performance using in-axis tilt
Grant 7,820,985 - Gupta , et al. October 26, 2 | 2010-10-26 |
Techniques for controlling a charged particle beam
Grant 7,820,986 - Lubicki , et al. October 26, 2 | 2010-10-26 |
Implanting with improved uniformity and angle control on tilted wafers
Grant 7,812,325 - Buonodono , et al. October 12, 2 | 2010-10-12 |
Mass Analysis Magnet For A Ribbon Beam
App 20100116983 - Benveniste; Victor ; et al. | 2010-05-13 |
Techniques For Atomic Layer Deposition
App 20100098851 - MURAKAWA; Shigemi ; et al. | 2010-04-22 |
Method Of Determining Angle Misalignment In Beam Line Ion Implanters
App 20100090131 - GUPTA; Atul ; et al. | 2010-04-15 |
Bi mode ion implantation with non-parallel ion beams
Grant RE41,214 - Renau , et al. April 13, 2 | 2010-04-13 |
Technique for improving ion implantation throughput and dose uniformity
Grant 7,683,347 - Gupta , et al. March 23, 2 | 2010-03-23 |
Ion beam current uniformity monitor, ion implanter and related method
Grant 7,663,125 - Callahan , et al. February 16, 2 | 2010-02-16 |
Techniques for providing ion source feed materials
Grant 7,655,932 - Hatem , et al. February 2, 2 | 2010-02-02 |
Energy Contamination Monitor With Neutral Current Detection
App 20100019141 - Olson; Joseph C. ; et al. | 2010-01-28 |
Method of determining angle misalignment in beam line ion implanters
Grant 7,642,529 - Gupta , et al. January 5, 2 | 2010-01-05 |
Ion implantation device with a dual pumping mode and method thereof
Grant 7,622,722 - England , et al. November 24, 2 | 2009-11-24 |
Apparatus For Measuring Beam Characteristics And A Method Thereof
App 20090206273 - Olson; Joseph C. ; et al. | 2009-08-20 |
RF electron source for ionizing gas clusters
App 20090166555 - Olson; Joseph C. ; et al. | 2009-07-02 |
High tilt implant angle performance using in-axis tilt
App 20090166566 - Gupta; Atul ; et al. | 2009-07-02 |
Techniques for providing a ribbon-shaped gas cluster ion beam
Grant 7,547,900 - Renau , et al. June 16, 2 | 2009-06-16 |
Techniques For Making High Voltage Connections
App 20090078554 - May; Douglas E. ; et al. | 2009-03-26 |
Techniques For Controlling A Charged Particle Beam
App 20090072163 - Lubicki; Piotr R. ; et al. | 2009-03-19 |
Techniques For Terminal Insulation In An Ion Implanter
App 20090057573 - LOW; Russell John ; et al. | 2009-03-05 |
Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation
Grant 7,462,844 - Chang , et al. December 9, 2 | 2008-12-09 |
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms
Grant 7,459,704 - Olson , et al. December 2, 2 | 2008-12-02 |
Electron confinement inside magnet of ion implanter
Grant 7,459,692 - Renau , et al. December 2, 2 | 2008-12-02 |
Methods and apparatus for beam density measurement in two dimensions
Grant 7,453,070 - Gupta , et al. November 18, 2 | 2008-11-18 |
Ion beam implant current, spot width and position tuning
Grant 7,442,944 - Chang , et al. October 28, 2 | 2008-10-28 |
Ion beam contamination determination
Grant 7,402,820 - Low , et al. July 22, 2 | 2008-07-22 |
Techniques For Providing Ion Source Feed Materials
App 20080169427 - HATEM; Christopher R. ; et al. | 2008-07-17 |
Technique for tuning an ion implanter system
Grant 7,397,047 - Chang , et al. July 8, 2 | 2008-07-08 |
Technique for ion beam angle spread control for advanced applications
Grant 7,394,078 - Gupta , et al. July 1, 2 | 2008-07-01 |
Techniques For Providing A Ribbon-shaped Gas Cluster Ion Beam
App 20080149826 - RENAU; Anthony ; et al. | 2008-06-26 |
Technique for isocentric ion beam scanning
Grant 7,391,038 - Olson , et al. June 24, 2 | 2008-06-24 |
Ion Implantation Device With A Dual Pumping Mode And Method Thereof
App 20080105833 - England; Jonathan Gerald ; et al. | 2008-05-08 |
Method of determining angle misalignment in beam line ion implanters
App 20080096359 - Gupta; Atul ; et al. | 2008-04-24 |
Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control
Grant 7,361,913 - Low , et al. April 22, 2 | 2008-04-22 |
Ion implanter with variable scan frequency
Grant 7,358,510 - Olson , et al. April 15, 2 | 2008-04-15 |
Technique for uniformity tuning in an ion implanter system
Grant 7,355,188 - Olson , et al. April 8, 2 | 2008-04-08 |
Technique For Improving Ion Implantation Throughput And Dose Uniformity
App 20080078953 - GUPTA; Atul ; et al. | 2008-04-03 |
Implanting With Improved Uniformity And Angle Control On Tilted Wafers
App 20080078950 - Buonodono; James ; et al. | 2008-04-03 |
Ion Beam Current Uniformity Monitor, Ion Implanter And Related Method
App 20080073584 - Callahan; William G. ; et al. | 2008-03-27 |
Methods and apparatus for beam density measurement in two dimensions
App 20080073550 - Gupta; Atul ; et al. | 2008-03-27 |
Technique for ion beam angle process control
Grant 7,348,576 - Gupta , et al. March 25, 2 | 2008-03-25 |
Methods and apparatus for adjusting beam parallelism in ion implanters
Grant RE40,009 - Olson , et al. January 22, 2 | 2008-01-22 |
Ion beam contamination determination
App 20070241276 - Low; Russell ; et al. | 2007-10-18 |
Insulator system for a terminal structure of an ion implantation system
App 20070235663 - Low; Russell ; et al. | 2007-10-11 |
Cathode assembly for indirectly heated cathode ion source
Grant 7,276,847 - Olson , et al. October 2, 2 | 2007-10-02 |
Technique for isocentric ion beam scanning
App 20070221870 - Olson; Joseph C. ; et al. | 2007-09-27 |
Ion implanter with variable scan frequency
App 20070221872 - Olson; Joseph C. ; et al. | 2007-09-27 |
Technique for uniformity tuning in an ion implanter system
Grant 7,253,423 - Chang , et al. August 7, 2 | 2007-08-07 |
Ion beam neutral detection
Grant 7,250,617 - Renau , et al. July 31, 2 | 2007-07-31 |
Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation
App 20070085037 - Chang; Shengwu ; et al. | 2007-04-19 |
Methods and apparatus for ion beam angle measurement in two dimensions
Grant 7,202,483 - Olson , et al. April 10, 2 | 2007-04-10 |
Ion beam measurement apparatus and method
Grant 7,170,067 - Renau , et al. January 30, 2 | 2007-01-30 |
Uniformity control multiple tilt axes, rotating wafer and variable scan velocity
Grant 7,166,854 - Renau , et al. January 23, 2 | 2007-01-23 |
Uniformity control using multiple fixed wafer orientations and variable scan velocity
Grant 7,161,161 - Renau , et al. January 9, 2 | 2007-01-09 |
Technique for uniformity tuning in an ion implanter system
App 20060284114 - Olson; Joseph C. ; et al. | 2006-12-21 |
Technique for uniformity tuning in an ion implanter system
App 20060266957 - Chang; Shengwu ; et al. | 2006-11-30 |
Indirectly heated cathode ion source
Grant 7,138,768 - Maciejowski , et al. November 21, 2 | 2006-11-21 |
Technique for tuning an ion implanter system
App 20060249696 - Chang; Shengwu ; et al. | 2006-11-09 |
Methods and apparatus for adjusting ion implant parameters for improved process control
App 20060240651 - Renau; Anthony ; et al. | 2006-10-26 |
Methods and apparatus for ion beam angle measurement in two dimensions
App 20060219936 - Olson; Joseph C. ; et al. | 2006-10-05 |
Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control
App 20060219954 - Low; Russell J. ; et al. | 2006-10-05 |
Technique for ion beam angle process control
App 20060208203 - Gupta; Atul ; et al. | 2006-09-21 |
Technique for ion beam angle spread control for advanced applications
App 20060208204 - Gupta; Atul ; et al. | 2006-09-21 |
Technique for ion beam angle spread control
App 20060208202 - Gupta; Atul ; et al. | 2006-09-21 |
Source arc chamber for ion implanter having repeller electrode mounted to external insulator
Grant 7,102,139 - Low , et al. September 5, 2 | 2006-09-05 |
Ion beam measurement apparatus and method
App 20060192134 - Renau; Anthony ; et al. | 2006-08-31 |
Electron confinement inside magent of ion implanter
App 20060169911 - Renau; Anthony ; et al. | 2006-08-03 |
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms
App 20060169915 - Olson; Joseph C. ; et al. | 2006-08-03 |
Ion implant ion beam parallelism and direction integrity determination and adjusting
App 20060169922 - Chang; Shengwu ; et al. | 2006-08-03 |
Source Arc Chamber For Ion Implanter Having Repeller Electrode Mounted To External Insulator
App 20060163489 - Low; Russell J. ; et al. | 2006-07-27 |
Methods and apparatus for ion implantation with control of incidence angle by beam deflection
App 20060145095 - Olson; Joseph C. ; et al. | 2006-07-06 |
Weakening Focusing Effect Of Acceleration-deceleration Column Of Ion Implanter
App 20060108543 - Chang; Shengwu ; et al. | 2006-05-25 |
Weakening focusing effect of acceleration-deceleration column of ion implanter
Grant 7,045,799 - Chang , et al. May 16, 2 | 2006-05-16 |
Ion beam implant current, spot width and position tuning
App 20060076510 - Chang; Shengwu ; et al. | 2006-04-13 |
Gas flow restricting cathode system for ion implanter and related method
Grant 6,984,831 - Low , et al. January 10, 2 | 2006-01-10 |
Uniformity control using multiple tilt axes, rotating wafer and variable scan velocity
App 20050263721 - Renau, Anthony ; et al. | 2005-12-01 |
Uniformity control using multiple fixed wafer orientations and variable scan velocity
App 20050258379 - Renau, Anthony ; et al. | 2005-11-24 |
Gas flow restricting cathode system for ion implanter and related method
App 20050194550 - Low, Russell J. ; et al. | 2005-09-08 |
Ion beam neutral detection
App 20050178981 - Renau, Anthony ; et al. | 2005-08-18 |
Method and apparatus for determining beam parallelism and direction
Grant 6,791,094 - Olson , et al. September 14, 2 | 2004-09-14 |
Control system for indirectly heated cathode ion source
Grant 6,777,686 - Olson , et al. August 17, 2 | 2004-08-17 |
Methods and apparatus for scanned beam uniformity adjustment in ion implanters
Grant 6,710,359 - Olson , et al. March 23, 2 | 2004-03-23 |
Indirectly heated cathode ion source
App 20030218428 - Maciejowski, Peter E. ; et al. | 2003-11-27 |
Bi mode ion implantation with non-parallel ion beams
Grant 6,573,518 - Renau , et al. June 3, 2 | 2003-06-03 |
Methods and apparatus for scanned beam uniformity adjustment in ion implanters
App 20020134948 - Olson, Joseph C. ; et al. | 2002-09-26 |
Methods and apparatus for adjusting beam parallelism in ion implanters
Grant 6,437,350 - Olson , et al. August 20, 2 | 2002-08-20 |
Control system for indirectly heated cathode ion source
App 20010042836 - Olson, Joseph C. ; et al. | 2001-11-22 |
Cathode assembly for indirectly heated cathode ion source
App 20010043040 - Olson, Joseph C. ; et al. | 2001-11-22 |
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