| Patent | Date |
|---|
Method Of Linearized Film Oxidation Growth
App 20220254622 - OLSEN; Christopher S. ; et al. | 2022-08-11 |
Process System With Variable Flow Valve
App 20220223383 - SHONO; Eric Kihara ; et al. | 2022-07-14 |
Oscillating Flow Boundary Layers In Apparatus, Methods, And Systems For Processing Substrates
App 20220213595 - YANG; Tsung-Han ; et al. | 2022-07-07 |
Novel And Effective Homogenize Flow Mixing Design
App 20220165547 - PANDEY; Vishwas Kumar ; et al. | 2022-05-26 |
Apparatus And System For Delivering Gas To A Process Chamber
App 20220154338 - OLSEN; Christopher S. ; et al. | 2022-05-19 |
Conformal oxidation processes for 3D NAND
Grant 11,322,347 - Swenberg , et al. May 3, 2 | 2022-05-03 |
Growth Of Thin Oxide Layer With Amorphous Silicon And Oxidation
App 20220130837 - OLSEN; Christopher S. | 2022-04-28 |
Steam Oxidation Initiation For High Aspect Ratio Conformal Radical Oxidation
App 20220051890 - OLSEN; Christopher S. ; et al. | 2022-02-17 |
Steam oxidation initiation for high aspect ratio conformal radical oxidation
Grant 11,189,485 - Olsen , et al. November 30, 2 | 2021-11-30 |
Gas Injector With Baffle
App 20210322934 - PANDEY; Vishwas Kumar ; et al. | 2021-10-21 |
Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber
App 20210272776 - PANDEY; Vishwas Kumar ; et al. | 2021-09-02 |
Cleaning method
Grant 11,087,979 - Olsen , et al. August 10, 2 | 2021-08-10 |
Argon addition to remote plasma oxidation
Grant 11,081,340 - Lo , et al. August 3, 2 | 2021-08-03 |
Gas injector with baffle
Grant 11,077,410 - Pandey , et al. August 3, 2 | 2021-08-03 |
Chamber inlet
Grant D924,825 - Shono , et al. July 13, 2 | 2021-07-13 |
Method And Apparatus For Selective Nitridation Process
App 20210202702 - ROGERS; Matthew Scott ; et al. | 2021-07-01 |
Dogbone inlet cone profile for remote plasma oxidation chamber
Grant 11,049,696 - Pandey , et al. June 29, 2 | 2021-06-29 |
Machine-learning Based System For Virtual Flow Metering
App 20210089905 - Olsen; Christopher S. ; et al. | 2021-03-25 |
Method and apparatus for selective nitridation process
Grant 10,950,698 - Rogers , et al. March 16, 2 | 2021-03-16 |
Side Inject Designs For Improved Radical Concentrations
App 20210074505 - SHONO; Eric Kihara ; et al. | 2021-03-11 |
Method And Apparatus For Precleaning A Substrate Surface Prior To Epitaxial Growth
App 20210010160 - OLSEN; Christopher S. ; et al. | 2021-01-14 |
Methods for conformal treatment of dielectric films with low thermal budget
Grant 10,886,122 - Pan , et al. January 5, 2 | 2021-01-05 |
High pressure ammonia nitridation of tunnel oxide for 3DNAND applications
Grant 10,870,911 - Olsen December 22, 2 | 2020-12-22 |
Cleaning method
Grant 10,861,693 - Stone , et al. December 8, 2 | 2020-12-08 |
Side inject designs for improved radical concentrations
Grant 10,847,337 - Shono , et al. November 24, 2 | 2020-11-24 |
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
Grant 10,837,122 - Olsen , et al. November 17, 2 | 2020-11-17 |
Resource density screening tool
Grant 10,767,471 - Olsen , et al. Sep | 2020-09-08 |
Argon Addition To Remote Plasma Oxidation
App 20200251331 - Kind Code | 2020-08-06 |
Asymmetric Injection For Better Wafer Uniformity
App 20200240014 - Shono; Eric Kihara ; et al. | 2020-07-30 |
Steam Oxidation Initiation For High Aspect Ratio Conformal Radical Oxidation
App 20200227256 - OLSEN; Christopher S. ; et al. | 2020-07-16 |
Apparatus and method for selective oxidation at lower temperature using remote plasma source
Grant 10,714,333 - Pan , et al. | 2020-07-14 |
Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber
App 20200219703 - PANDEY; Vishwas Kumar ; et al. | 2020-07-09 |
Method And Apparatus For Supplying Improved Gas Flow To A Processing Volume Of A Processing Chamber
App 20200199748 - PANDEY; Vishwas Kumar ; et al. | 2020-06-25 |
Conformal Oxidation Processes For 3d Nand
App 20200194251 - SWENBERG; Johanes F. ; et al. | 2020-06-18 |
Argon addition to remote plasma oxidation
Grant 10,636,650 - Lo , et al. | 2020-04-28 |
Dogbone inlet cone profile for remote plasma oxidation chamber
Grant 10,636,626 - Pandey , et al. | 2020-04-28 |
Method And Apparatus For Precleaning A Substrate Surface Prior To Epitaxial Growth
App 20190382917 - OLSEN; Christopher S. ; et al. | 2019-12-19 |
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
Grant 10,428,441 - Olsen , et al. October 1, 2 | 2019-10-01 |
Method And Apparatus For Providing Radical Species To A Processing Volume Of A Processing Chamber
App 20190295822 - OLSEN; Christopher S. ; et al. | 2019-09-26 |
Side Inject Designs For Improved Radical Concentrations
App 20190228942 - SHONO; Eric Kihara ; et al. | 2019-07-25 |
Dogbone Inlet Cone Profile For Remote Plasma Oxidation Chamber
App 20190228951 - PANDEY; Vishwas Kumar ; et al. | 2019-07-25 |
Argon Addition To Remote Plasma Oxidation
App 20190221427 - LO; Hansel ; et al. | 2019-07-18 |
High Pressure Ammonia Nitridation Of Tunnel Oxide For 3dnand Applications
App 20190203332 - OLSEN; Christopher S. | 2019-07-04 |
Cleaning Method
App 20190172712 - OLSEN; Christopher S. ; et al. | 2019-06-06 |
Gas Injector With Baffle
App 20190105614 - PANDEY; Vishwas Kumar ; et al. | 2019-04-11 |
Method And Apparatus For Selective Nitridation Process
App 20190088485 - ROGERS; Matthew Scott ; et al. | 2019-03-21 |
Substrate support ring for more uniform layer thickness
Grant 10,211,046 - Pan , et al. Feb | 2019-02-19 |
Cleaning method
Grant 10,199,221 - Olsen , et al. Fe | 2019-02-05 |
Remote Plasma Oxidation Chamber
App 20180347045 - OLSEN; Christopher S. ; et al. | 2018-12-06 |
Resource Density Screening Tool
App 20180334902 - OLSEN; Christopher S. ; et al. | 2018-11-22 |
Cleaning Method
App 20180138038 - OLSEN; Christopher S. ; et al. | 2018-05-17 |
Steam Oxidation Initiation For High Aspect Ratio Conformal Radical Oxidation
App 20180076026 - OLSEN; Christopher S. ; et al. | 2018-03-15 |
Method And Apparatus For Precleaning A Substrate Surface Prior To Epitaxial Growth
App 20180016705 - OLSEN; Christopher S. ; et al. | 2018-01-18 |
Cleaning method
Grant 9,870,921 - Olsen , et al. January 16, 2 | 2018-01-16 |
H.sub.2/O.sub.2 side inject to improve process uniformity for low temperature oxidation process
Grant 9,869,017 - Tjandra , et al. January 16, 2 | 2018-01-16 |
High Pressure Ammonia Nitridation Of Tunnel Oxide For 3dnand Applications
App 20170349996 - OLSEN; Christopher S. | 2017-12-07 |
Method and apparatus for multizone plasma generation
Grant 9,809,881 - Rogers , et al. November 7, 2 | 2017-11-07 |
Methods For Conformal Treatment Of Dielectric Films With Low Thermal Budget
App 20170316930 - PAN; HENG ; et al. | 2017-11-02 |
Methods for conformal treatment of dielectric films with low thermal budget
Grant 9,728,401 - Pan , et al. August 8, 2 | 2017-08-08 |
Cleaning Method
App 20170178894 - STONE; Peter ; et al. | 2017-06-22 |
Method and apparatus for precleaning a substrate surface prior to epitaxial growth
Grant 9,683,308 - Olsen , et al. June 20, 2 | 2017-06-20 |
Cleaning Method
App 20170084456 - OLSEN; Christopher S. ; et al. | 2017-03-23 |
Methods and apparatus for selective oxidation of a substrate
Grant 9,514,968 - Tjandra , et al. December 6, 2 | 2016-12-06 |
Multi-layer charge trap silicon nitride/oxynitride layer engineering with interface region control
Grant 9,502,521 - Ganguly , et al. November 22, 2 | 2016-11-22 |
Apparatus And Method For Selective Oxidation At Lower Temperature Using Remote Plasma Source
App 20160300712 - PAN; Heng ; et al. | 2016-10-13 |
Post treatment methods for oxide layers on semiconductor devices
Grant 9,431,237 - Ma , et al. August 30, 2 | 2016-08-30 |
H2/o2 Side Inject To Improve Process Uniformity For Low Temperature Oxidation Process
App 20160010206 - TJANDRA; Agus Sofian ; et al. | 2016-01-14 |
Gas injection apparatus and substrate process chamber incorporating same
Grant 9,123,758 - Tjandra , et al. September 1, 2 | 2015-09-01 |
Methods And Apparatus For Selective Oxidation Of A Substrate
App 20150206777 - TJANDRA; AGUS ; et al. | 2015-07-23 |
NH3 containing plasma nitridation of a layer on a substrate
Grant 9,054,048 - Liu , et al. June 9, 2 | 2015-06-09 |
Method for conformal treatment of dielectric films using inductively coupled plasma
Grant 9,012,336 - Pan , et al. April 21, 2 | 2015-04-21 |
Methods and apparatus for selective oxidation of a substrate
Grant 8,993,458 - Tjandra , et al. March 31, 2 | 2015-03-31 |
Method And Apparatus For Precleaning A Substrate Surface Prior To Epitaxial Growth
App 20150040822 - OLSEN; Christopher S. ; et al. | 2015-02-12 |
Substrate Support Ring For More Uniform Layer Thickness
App 20150020736 - Pan; Heng ; et al. | 2015-01-22 |
Remote plasma radical treatment of silicon oxide
Grant 8,916,484 - Olsen , et al. December 23, 2 | 2014-12-23 |
Apparatus and Method for Conformal Treatment of Dielectric Films Using Inductively Coupled Plasma
App 20140302686 - Pan; Heng ; et al. | 2014-10-09 |
Remote radical hydride dopant incorporation for delta doping in silicon
Grant 8,846,509 - Olsen , et al. September 30, 2 | 2014-09-30 |
Methods For Conformal Treatment Of Dielectric Films With Low Thermal Budget
App 20140273539 - PAN; HENG ; et al. | 2014-09-18 |
Post-Deposition Treatment Methods For Silicon Nitride
App 20140273530 - Nguyen; Victor ; et al. | 2014-09-18 |
Method and apparatus for selective nitridation process
Grant 8,808,564 - Rogers , et al. August 19, 2 | 2014-08-19 |
Remote Plasma Radical Treatment Of Silicon Oxide
App 20140227888 - OLSEN; CHRISTOPHER S. ; et al. | 2014-08-14 |
Gas Injection Apparatus And Substrate Process Chamber Incorporating Same
App 20140216585 - TJANDRA; AGUS SOFIAN ; et al. | 2014-08-07 |
Remote plasma radical treatment of silicon oxide
Grant 8,741,785 - Olsen , et al. June 3, 2 | 2014-06-03 |
Apparatus And Method For Selective Oxidation At Lower Temperature Using Remote Plasma Source
App 20140034632 - PAN; Heng ; et al. | 2014-02-06 |
Methods And Apparatus For Selective Oxidation Of A Substrate
App 20130210240 - TJANDRA; AGUS ; et al. | 2013-08-15 |
Methods of forming oxide layers on substrates
Grant 8,492,292 - Yokota , et al. July 23, 2 | 2013-07-23 |
Remote Radical Hydride Dopant Incorporation For Delta Doping In Silicon
App 20130137249 - Olsen; Christopher S. ; et al. | 2013-05-30 |
Method And Apparatus For Selective Nitridation Process
App 20130122713 - Rogers; Matthew S. ; et al. | 2013-05-16 |
Methods for forming conformal oxide layers on semiconductor devices
Grant 8,435,906 - Tjandra , et al. May 7, 2 | 2013-05-07 |
Remote Plasma Radical Treatment Of Silicon Oxide
App 20130109164 - Olsen; Christopher S. ; et al. | 2013-05-02 |
Nh3 Containing Plasma Nitridation Of A Layer On A Substrate
App 20130012032 - LIU; WEI ; et al. | 2013-01-10 |
Method And Apparatus For Multizone Plasma Generation
App 20120208371 - ROGERS; MATTHEW SCOTT ; et al. | 2012-08-16 |
Passivation process for solar cell fabrication
Grant 8,168,462 - Borden , et al. May 1, 2 | 2012-05-01 |
Method of forming an aluminum oxide layer
Grant 8,163,343 - Kher , et al. April 24, 2 | 2012-04-24 |
Multi-Layer Charge Trap Silicon Nitride/Oxynitride Layer Engineering with Interface Region Control
App 20110281429 - Ganguly; Udayan ; et al. | 2011-11-17 |
Dual frequency low temperature oxidation of a semiconductor device
Grant 8,043,981 - Ma , et al. October 25, 2 | 2011-10-25 |
Method of selective nitridation
Grant 7,972,933 - Olsen , et al. July 5, 2 | 2011-07-05 |
Multi-Layer Charge Trap Silicon Nitride/Oxynitride Layer Engineering with Interface Region Control
App 20110101442 - Ganguly; Udayan ; et al. | 2011-05-05 |
Method of forming dielectric layers on a substrate and apparatus therefor
Grant 7,910,497 - Olsen , et al. March 22, 2 | 2011-03-22 |
Apparatus and Methods for Cyclical Oxidation and Etching
App 20110061812 - Ganguly; Udayan ; et al. | 2011-03-17 |
Apparatus and Methods for Cyclical Oxidation and Etching
App 20110065276 - Ganguly; Udayan ; et al. | 2011-03-17 |
Apparatus and Methods for Cyclical Oxidation and Etching
App 20110061810 - Ganguly; Udayan ; et al. | 2011-03-17 |
Methods Of Forming Oxide Layers On Substrates
App 20100330814 - Yokota; Yoshitaka ; et al. | 2010-12-30 |
Passivation process for solar cell fabrication
App 20100311203 - Borden; Peter ; et al. | 2010-12-09 |
Plasma surface treatment for SI and metal nanocrystal nucleation
Grant 7,846,793 - Olsen , et al. December 7, 2 | 2010-12-07 |
Dual Frequency Low Temperature Oxidation of a Semiconductor Device
App 20100267247 - Ma; Kai ; et al. | 2010-10-21 |
Post Treatment Methods for Oxide Layers on Semiconductor Devices
App 20100267248 - Ma; Kai ; et al. | 2010-10-21 |
Method Of Selective Nitridation
App 20100248435 - OLSEN; CHRISTOPHER S. ; et al. | 2010-09-30 |
Methods for Forming Conformal Oxide Layers on Semiconductor Devices
App 20100216317 - Tjandra; Agus S. ; et al. | 2010-08-26 |
Plasma And Thermal Anneal Treatment To Improve Oxidation Resistance Of Metal-containing Films
App 20100120245 - Tjandra; Agus Sofian ; et al. | 2010-05-13 |
Method And Apparatus For Metal Silicide Formation
App 20100075499 - OLSEN; CHRISTOPHER S. | 2010-03-25 |
Method Of Forming An Aluminum Oxide Layer
App 20100055905 - KHER; SHREYAS S. ; et al. | 2010-03-04 |
Post Oxidation Annealing Of Low Temperature Thermal Or Plasma Based Oxidation
App 20090311877 - OLSEN; CHRISTOPHER S. ; et al. | 2009-12-17 |
Plasma Surface Treatment For Si And Metal Nanocrystal Nucleation
App 20090090952 - Olsen; Christopher S. ; et al. | 2009-04-09 |
Method Of Forming Dielectric Layers On A Substrate And Apparatus Therefor
App 20090035927 - OLSEN; CHRISTOPHER S. ; et al. | 2009-02-05 |
Silicon oxynitride gate dielectric formation using multiple annealing steps
Grant 7,429,540 - Olsen September 30, 2 | 2008-09-30 |
Manufacturing method for two-step post nitridation annealing of plasma nitrided gate dielectric
Grant 7,429,538 - Olsen September 30, 2 | 2008-09-30 |
Nitric oxide reoxidation for improved gate leakage reduction of sion gate dielectrics
App 20070010103 - Chua; Thai Cheng ; et al. | 2007-01-11 |
Manufacturing method for two-step post nitridation annealing of plasma nitrided gate dielectric
App 20060292844 - Olsen; Christopher S. | 2006-12-28 |
Method for improving nitrogen profile in plasma nitrided gate dielectric layers
Grant 7,122,454 - Olsen October 17, 2 | 2006-10-17 |
Silicon oxynitride gate dielectric formation using multiple annealing steps
App 20060178018 - Olsen; Christopher S. | 2006-08-10 |
Method for improving nitrogen profile in plasma nitrided gate dielectric layers
App 20040038487 - Olsen, Christopher S. | 2004-02-26 |
Trench fill process for reducing stress in shallow trench isolation
Grant 6,653,200 - Olsen November 25, 2 | 2003-11-25 |
Trench fill process for reducing stress in shallow trench isolation
App 20020102814 - Olsen, Christopher S. | 2002-08-01 |
Method for determining nitrogen concentration in a film of nitrided oxide material
Grant 6,313,466 - Olsen , et al. November 6, 2 | 2001-11-06 |
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