Patent | Date |
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Method for producing a moisture sensor at the wafer level and moisture sensor Grant 11,428,661 - Haubold , et al. August 30, 2 | 2022-08-30 |
Mems Sensor With Particle Filter And Method For Producing It App 20220033249 - BROCKMEIER; Andre ;   et al. | 2022-02-03 |
Mems Devices Comprising Spring Element And Comb Drive And Associated Production Methods App 20210373322 - ALBERT; Stephan Gerhard ;   et al. | 2021-12-02 |
Sensor Device Including Sensor Unit for a Gaseous Medium App 20210003466 - Leuschner; Rainer ;   et al. | 2021-01-07 |
Generating A Mems Device With Glass Cover And Mems Device App 20200385264 - BROCKMEIER; Andre ;   et al. | 2020-12-10 |
Sensor device including sensor unit for a gaseous medium Grant 10,859,457 - Leuschner , et al. December 8, 2 | 2020-12-08 |
Method for Producing a Moisture Sensor at the Wafer Level and Moisture Sensor App 20200166471 - Haubold; Marco ;   et al. | 2020-05-28 |
Sensor Device Including Sensor Unit for a Gaseous Medium App 20180136064 - Leuschner; Rainer ;   et al. | 2018-05-17 |
Differential pressure sensor with a capacitive read out system Grant 9,726,561 - Besling , et al. August 8, 2 | 2017-08-08 |
Sensor device and method for making thereof Grant 9,670,057 - Oldsen June 6, 2 | 2017-06-06 |
Pressure sensor with geter embedded in membrane Grant 9,557,238 - Besling , et al. January 31, 2 | 2017-01-31 |
Die interconnect Grant 9,385,099 - van Gemert , et al. July 5, 2 | 2016-07-05 |
Gas Sensor App 20160139038 - Oldsen; Marten ;   et al. | 2016-05-19 |
Suspended membrane for capacitive pressure sensor Grant 9,340,412 - Besling , et al. May 17, 2 | 2016-05-17 |
Suspended Membrane For Capacitive Pressure Sensor App 20160023893 - Besling; Willem ;   et al. | 2016-01-28 |
Cmos Pressure Sensor With Getter Using Ti-w Wire Embedded In Membrane App 20160025583 - Besling; Willem ;   et al. | 2016-01-28 |
Die Interconnect App 20150279803 - van Gemert; Leonardus Antonius Elisabeth ;   et al. | 2015-10-01 |
Differential Pressure Sensor App 20140338459 - Besling; Willem Frederik Adrianus ;   et al. | 2014-11-20 |
Micromechanical housing comprising at least two cavities having different internal pressure and/or different gas compositions and method for the production thereof Grant 8,546,928 - Merz , et al. October 1, 2 | 2013-10-01 |
Microsystem and method for the production of a microsystem Grant 8,526,098 - Hofmann , et al. September 3, 2 | 2013-09-03 |
Cover for microsystems and method for producing a cover Grant 8,517,545 - Quenzer , et al. August 27, 2 | 2013-08-27 |
Electrostatic comb-drive micromechanical actuator Grant 8,213,066 - Hofmann , et al. July 3, 2 | 2012-07-03 |
Housing for micro-mechanical and micro-optical components used in mobile applications Grant 8,201,452 - Oldsen , et al. June 19, 2 | 2012-06-19 |
Micro-mirror actuator having encapsulation capability and method for the production thereof Grant 8,169,678 - Hofmann , et al. May 1, 2 | 2012-05-01 |
Electrostatic Comb-drive Micromechanical Actuator App 20120075685 - Hofmann; Ulrich ;   et al. | 2012-03-29 |
Solder material lining a cover wafer attached to wafer substrate Grant 8,039,950 - Oldsen , et al. October 18, 2 | 2011-10-18 |
Cover For Microsystems And Method For Producing A Cover App 20100330332 - Quenzer; Hans Joachim ;   et al. | 2010-12-30 |
Microsystem And Method For The Production Of A Microsystem App 20100296151 - Hofmann; Ulrich ;   et al. | 2010-11-25 |
Micromechanical Device and Method for Projecting Electromagnetic Radiation App 20100277782 - Quenzer; Hans-Joachim ;   et al. | 2010-11-04 |
Micro-mirror Actuator Having Encapsulation Capability And Method For The Production Thereof App 20100085622 - Hofmann; Ulrich ;   et al. | 2010-04-08 |
Housing For Micro-mechanical And Micro-optical Components Used In Mobile Applications App 20100061073 - Oldsen; Marten ;   et al. | 2010-03-11 |
Micromechanical Housing Comprising At Least Two Cavities Having Different Internal Pressure And/or Different Gas Compositions And Method For The Production Thereof App 20100025845 - Merz; Peter ;   et al. | 2010-02-04 |
Cover Wafer or Component Cover, Wafer Part, or Component That Can Be Inserted Using Microsystems Technology, and Soldering Method for Connecting Corresponding Wafer or Component Parts App 20080317995 - Oldsen; Marten ;   et al. | 2008-12-25 |
Method of creating a predefined internal pressure within a cavity of a semiconductor device Grant 7,410,828 - Quenzer , et al. August 12, 2 | 2008-08-12 |