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Patent applications and USPTO patent grants for OKUTSU; HIDEKAZU.The latest application filed is for "transport device having local purge function".
Patent | Date |
---|---|
Transport Device Having Local Purge Function App 20210327737 - SAKATA; KATSUNORI ;   et al. | 2021-10-21 |
Load port and load port atmosphere replacing method Grant 10,354,903 - Sakata , et al. July 16, 2 | 2019-07-16 |
Load Port And Load Port Atmosphere Replacing Method App 20170178942 - SAKATA; Katsunori ;   et al. | 2017-06-22 |
Carrying apparatus and carrying control method for sheet-like substrate App 20060216137 - Sakata; Katsunori ;   et al. | 2006-09-28 |
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