OKUMURA; Tomohiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for OKUMURA; Tomohiro.The latest application filed is for "temperature estimation device, motor control device, and temperature estimation method".
Company Profile
3.113.133
- OKUMURA; Tomohiro - Tokyo JP
- Okumura; Tomohiro - Osaka JP
- Okumura; Tomohiro - Fujieda N/A JP
- Okumura; Tomohiro - Kadoma JP
- OKUMURA; Tomohiro - Kadoma-shi JP
- Okumura; Tomohiro - Kariya JP
- Okumura; Tomohiro - Fujieda-shi JP
- OKUMURA; Tomohiro - Kariya-city JP
- Okumura, Tomohiro - US
- Okumura; Tomohiro - Osaka-fu JP
- Okumura; Tomohiro - Neyagawa JP
- Okumura; Tomohiro - Hirakata JP
Patent Activity
| Patent | Date |
|---|---|
| Temperature Estimation Device, Motor Control Device, And Temperature Estimation Method App 20210336576 - IKITAKE; Yoshitaka ; et al. | 2021-10-28 |
| Substrate heating apparatus, substrate heating method and method of manufacturing electronic device Grant 10,804,122 - Yamamoto , et al. October 13, 2 | 2020-10-13 |
| Plasma processing apparatus Grant 10,229,814 - Okumura , et al. | 2019-03-12 |
| Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device Grant 10,181,406 - Okumura , et al. Ja | 2019-01-15 |
| Plasma processing apparatus Grant 10,147,585 - Okumura , et al. De | 2018-12-04 |
| Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device Grant 10,141,162 - Okumura , et al. Nov | 2018-11-27 |
| Plasma processing apparatus and plasma processing method Grant 10,115,565 - Okumura , et al. October 30, 2 | 2018-10-30 |
| Substrate Heating Apparatus, Substrate Heating Method And Method Of Manufacturing Electronic Device App 20180211855 - YAMAMOTO; MASAHIRO ; et al. | 2018-07-26 |
| Plasma processing device, plasma processing method and manufacturing method of electronic device Grant 9,978,593 - Okumura May 22, 2 | 2018-05-22 |
| Plasma treatment apparatus and plasma treatment method Grant 9,885,115 - Okumura February 6, 2 | 2018-02-06 |
| Plasma Processing Apparatus, Plasma Processing Method, And Method For Manufacturing Electronic Device App 20170309451 - OKUMURA; TOMOHIRO ; et al. | 2017-10-26 |
| Plasma processing apparatus and plasma processing method Grant 9,799,495 - Okita , et al. October 24, 2 | 2017-10-24 |
| Plasma Processing Device, Plasma Processing Method And Manufacturing Method Of Electronic Device App 20170287712 - OKUMURA; TOMOHIRO | 2017-10-05 |
| Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device Grant 9,741,538 - Okumura , et al. August 22, 2 | 2017-08-22 |
| Plasma processing device and plasma processing method Grant 9,691,593 - Okumura June 27, 2 | 2017-06-27 |
| Plasma Processing Method App 20170178925 - OKUMURA; TOMOHIRO | 2017-06-22 |
| Plasma processing method Grant 9,673,062 - Okumura June 6, 2 | 2017-06-06 |
| Plasma processing device, plasma processing method and method of manufacturing electronic devices Grant 9,627,183 - Okumura April 18, 2 | 2017-04-18 |
| Plasma processing device, and plasma processing method Grant 9,601,330 - Okumura , et al. March 21, 2 | 2017-03-21 |
| Plasma processing apparatus and method, and method of manufacturing electronic device Grant 9,595,458 - Okumura , et al. March 14, 2 | 2017-03-14 |
| Plasma processing apparatus and plasma processing method Grant 9,583,313 - Okumura February 28, 2 | 2017-02-28 |
| Plasma Processing Apparatus And Method, And Method Of Manufacturing Electronic Device App 20160358793 - OKUMURA; TOMOHIRO ; et al. | 2016-12-08 |
| Plasma processing apparatus and plasma processing method Grant 9,502,220 - Okita , et al. November 22, 2 | 2016-11-22 |
| Plasma Processing Apparatus, Plasma Processing Method, And Method For Manufacturing Electronic Device App 20160293455 - OKUMURA; Tomohiro ; et al. | 2016-10-06 |
| Plasma processing apparatus Grant 9,343,269 - Okumura , et al. May 17, 2 | 2016-05-17 |
| Plasma Processing Apparatus, Plasma Processing Method, And Method For Manufacturing Electronic Device App 20160086774 - OKUMURA; TOMOHIRO ; et al. | 2016-03-24 |
| Plasma Processing Apparatus And Plasma Processing Method App 20160064198 - OKITA; Shogo ; et al. | 2016-03-03 |
| Plasma Processing Apparatus And Plasma Processing Method App 20160064196 - OKITA; Shogo ; et al. | 2016-03-03 |
| Semiconductor manufacturing method and semiconductor manufacturing apparatus Grant 9,209,043 - Kitagawa , et al. December 8, 2 | 2015-12-08 |
| Semiconductor Manufacturing Method And Semiconductor Manufacturing Apparatus App 20150325455 - KITAGAWA; DAI ; et al. | 2015-11-12 |
| Plasma Processing Device, And Plasma Processing Method App 20150294866 - OKUMURA; TOMOHIRO ; et al. | 2015-10-15 |
| Polycrystalline-type solar cell panel and process for production thereof Grant 9,105,803 - Nakayama , et al. August 11, 2 | 2015-08-11 |
| Plasma Processing Device And Plasma Processing Method App 20150221475 - OKUMURA; TOMOHIRO | 2015-08-06 |
| Plasma Processing Device And Plasma Processing Method App 20150136735 - OKUMURA; TOMOHIRO | 2015-05-21 |
| Plasma Processing Device, Plasma Processing Method And Method Of Manufacturing Electronic Devices App 20150118867 - OKUMURA; TOMOHIRO | 2015-04-30 |
| Plasma Processing Apparatus And Plasma Processing Method App 20150053645 - OKUMURA; Tomohiro | 2015-02-26 |
| Gel composition for treating mycosis Grant 8,889,155 - Okumura , et al. November 18, 2 | 2014-11-18 |
| Solar cell module and manufacturing method of the same Grant 8,853,523 - Kuromiya , et al. October 7, 2 | 2014-10-07 |
| Plasma Processing Apparatus And Method Thereof App 20140291290 - KITAOKA; Taro ; et al. | 2014-10-02 |
| Plasma processing method Grant 8,802,567 - Okumura , et al. August 12, 2 | 2014-08-12 |
| Plasma Processing Apparatus And Plasma Processing Method App 20140220784 - OKUMURA; TOMOHIRO ; et al. | 2014-08-07 |
| Silicon substrate having textured surface, solar cell having same, and method for producing same Grant 8,772,067 - Nakayama , et al. July 8, 2 | 2014-07-08 |
| Plasma doping method and plasma doping apparatus Grant 8,709,926 - Okumura , et al. April 29, 2 | 2014-04-29 |
| Plasma processing apparatus and plasma processing method Grant 8,703,613 - Okumura , et al. April 22, 2 | 2014-04-22 |
| Plasma Processing Method App 20140094040 - OKUMURA; Tomohiro ; et al. | 2014-04-03 |
| Heat Treatment Apparatus And Heat Treatment Method App 20140076516 - SAITOH; MITSUO ; et al. | 2014-03-20 |
| Plasma doping method with gate shutter Grant 8,652,953 - Okumura , et al. February 18, 2 | 2014-02-18 |
| Plasma processing apparatus and method thereof Grant 8,624,340 - Okumura , et al. January 7, 2 | 2014-01-07 |
| Plasma Doping Method And Apparatus App 20130337641 - OKUMURA; Tomohiro ; et al. | 2013-12-19 |
| Plasma Doping Method And Apparatus App 20130323916 - OKUMURA; Tomohiro ; et al. | 2013-12-05 |
| Solar Cell Module And Manufacturing Method Of The Same App 20130306134 - KUROMIYA; Michiru ; et al. | 2013-11-21 |
| Plasma Processing Apparatus And Plasma Processing Method App 20130230990 - Okumura; Tomohiro ; et al. | 2013-09-05 |
| EGR valve device Grant 8,511,290 - Okumura , et al. August 20, 2 | 2013-08-20 |
| Silicon Substrate Having Textured Surface, Solar Cell Having Same, And Method For Producing Same App 20130183791 - Nakayama; Ichiro ; et al. | 2013-07-18 |
| Thin-film Solar Cell And Manufacturing Method Thereof App 20130174898 - SAITOH; Mitsuo ; et al. | 2013-07-11 |
| Polycrystalline Silicon Solar Cell Panel And Manufacturing Method Thereof App 20130160849 - YAMANISHI; HITOSHI ; et al. | 2013-06-27 |
| Solar Cell Module And Method For Producing The Same App 20130152995 - KUROMIYA; MICHIRU ; et al. | 2013-06-20 |
| Plasma Treatment Apparatus And Plasma Treatment Method App 20130146564 - OKUMURA; TOMOHIRO | 2013-06-13 |
| Plasma doping method and apparatus thereof Grant 8,450,819 - Okumura , et al. May 28, 2 | 2013-05-28 |
| Plasma Processing Apparatus And Plasma Processing Method App 20130115780 - OKUMURA; TOMOHIRO ; et al. | 2013-05-09 |
| Plasma Processing Apparatus And Plasma Processing Method App 20130105460 - OKUMURA; TOMOHIRO ; et al. | 2013-05-02 |
| Polycrystalline-type Solar Cell Panel And Process For Production Thereof App 20130081694 - Nakayama; Ichiro ; et al. | 2013-04-04 |
| Method Of Forming Metal Oxide Film, Metal Oxide Film And Optical Electronic Device App 20130078457 - SAITOH; Mitsuo ; et al. | 2013-03-28 |
| Plasma processing method and apparatus Grant 8,404,573 - Okumura , et al. March 26, 2 | 2013-03-26 |
| Plasma Processing Method And Apparatus App 20130022759 - OKUMURA; Tomohiro ; et al. | 2013-01-24 |
| Plasma Processing Apparatus And Plasma Processing Method App 20120325777 - Okumura; Tomohiro ; et al. | 2012-12-27 |
| Semiconductor device having a fin-type semiconductor region Grant 8,324,685 - Okumura , et al. December 4, 2 | 2012-12-04 |
| Plasma Doping Method With Gate Shutter App 20120285818 - OKUMURA; Tomohiro ; et al. | 2012-11-15 |
| Plasma processing method and apparatus Grant 8,288,259 - Okumura , et al. October 16, 2 | 2012-10-16 |
| Process For Production Of Silicon Powder, Multi-crystal-type Solar Cell Panel, And Process For Production Of The Solar Cell Panel App 20120227808 - Nakayama; Ichiro ; et al. | 2012-09-13 |
| Plasma display panel and method for producing the same Grant 8,264,146 - Kuromiya , et al. September 11, 2 | 2012-09-11 |
| Plasma doping device with gate shutter Grant 8,257,501 - Okumura , et al. September 4, 2 | 2012-09-04 |
| Plasma Doping Method And Apparatus App 20120186519 - Okumura; Tomohiro ; et al. | 2012-07-26 |
| Plasma Doping Method And Apparatus Thereof App 20120115317 - OKUMURA; Tomohiro ; et al. | 2012-05-10 |
| Method for producing plasma display panel with a bright display and a low operating voltage Grant 8,162,710 - Okumura April 24, 2 | 2012-04-24 |
| Display device Grant 8,160,298 - Okumura , et al. April 17, 2 | 2012-04-17 |
| Plasma Processing Apparatus And Method Thereof App 20120058649 - OKUMURA; Tomohiro ; et al. | 2012-03-08 |
| Plasma doping method and apparatus Grant 8,129,202 - Okumura , et al. March 6, 2 | 2012-03-06 |
| Method for producing plasma display panel Grant 8,113,899 - Okumura , et al. February 14, 2 | 2012-02-14 |
| Display unit and method for displaying multiple images Grant 8,098,253 - Okumura , et al. January 17, 2 | 2012-01-17 |
| Plasma display panel and method for producing the same Grant 8,063,563 - Kuromiya , et al. November 22, 2 | 2011-11-22 |
| Plasma Display Panel And Manufacturing Method Thereof App 20110279030 - ASHIDA; Takayuki ; et al. | 2011-11-17 |
| Plasma Doping Method And Apparatus App 20110217830 - OKUMURA; Tomohiro ; et al. | 2011-09-08 |
| Dielectric layer containing carbon for a plasma display panel Grant 8,004,171 - Yamashita , et al. August 23, 2 | 2011-08-23 |
| Plasma Display Panel And Method For Producing The Same App 20110198986 - Kuromiya; Michiru ; et al. | 2011-08-18 |
| Plasma display panel with improved luminance Grant 7,994,719 - Muro , et al. August 9, 2 | 2011-08-09 |
| Method For Producing Plasma Display Panel App 20110171871 - Sekiguchi; Hiroyoshi ; et al. | 2011-07-14 |
| Plasma doping method and plasma doping apparatus Grant 7,939,388 - Okumura , et al. May 10, 2 | 2011-05-10 |
| Egr Valve Device App 20110088670 - Okumura; Tomohiro ; et al. | 2011-04-21 |
| Plasma Processing Method And Apparatus App 20110081787 - OKUMURA; Tomohiro ; et al. | 2011-04-07 |
| Plasma Doping Method and Plasma Doping Apparatus App 20110065267 - Okumura; Tomohiro ; et al. | 2011-03-17 |
| Method For Producing Plasma Display Panel App 20110048631 - OKUMURA; Tomohiro | 2011-03-03 |
| Semiconductor Device, Method For Fabricating The Same, And Plasma Doping System App 20110049628 - Okumura; Tomohiro ; et al. | 2011-03-03 |
| Method for restoring function of plasma display panel and plasma display panel Grant 7,880,395 - Okumura , et al. February 1, 2 | 2011-02-01 |
| Plasma doping method and plasma doping apparatus Grant 7,863,168 - Okumura , et al. January 4, 2 | 2011-01-04 |
| Plasma processing method and plasma processing apparatus Grant 7,858,155 - Okumura , et al. December 28, 2 | 2010-12-28 |
| Method and apparatus of fabricating semiconductor device Grant 7,858,479 - Mizuno , et al. December 28, 2 | 2010-12-28 |
| Plasma processing method and apparatus Grant 7,858,537 - Okumura , et al. December 28, 2 | 2010-12-28 |
| Gel Composition For Treating Mycosis App 20100317695 - Okumura; Tomohiro ; et al. | 2010-12-16 |
| Plasma Display Panel And Method For Producing The Same App 20100289400 - Kuromiya; Michiru ; et al. | 2010-11-18 |
| Method For Producing Plasma Display Panel App 20100291829 - TAKII; Yoshimasa ; et al. | 2010-11-18 |
| Display unit and method for displaying image Grant 7,821,387 - Okumura , et al. October 26, 2 | 2010-10-26 |
| Method for forming impurity-introduced layer, method for cleaning object to be processed apparatus for introducing impurity and method for producing device Grant 7,759,254 - Sasaki , et al. July 20, 2 | 2010-07-20 |
| Glass film, process for production thereof, and optical electronic device Grant 7,755,286 - Okumura , et al. July 13, 2 | 2010-07-13 |
| Method of manufacturing plasma display panel with concave barrier wall portion Grant 7,722,423 - Abe , et al. May 25, 2 | 2010-05-25 |
| Plasma Doping Apparatus App 20100095889 - Kai; Takayuki ; et al. | 2010-04-22 |
| Plasma Doping Method And Apparatus App 20100098837 - OKUMURA; Tomohiro ; et al. | 2010-04-22 |
| Plasma display panel and process for producing the plasma display panel Grant 7,690,961 - Okumura , et al. April 6, 2 | 2010-04-06 |
| Plasma processing apparatus and method Grant 7,686,971 - Saitoh , et al. March 30, 2 | 2010-03-30 |
| Method of controlling impurity doping and impurity doping apparatus Grant 7,666,770 - Sasaki , et al. February 23, 2 | 2010-02-23 |
| Method For Producing Plasma Display Panel App 20100015877 - Okumura; Tomohiro ; et al. | 2010-01-21 |
| Plasma Doping Method And Apparatus App 20100009469 - Kai; Takayuki ; et al. | 2010-01-14 |
| Impurity introducing apparatus and impurity introducing method Grant 7,626,184 - Mizuno , et al. December 1, 2 | 2009-12-01 |
| Impurity introducing apparatus and impurity introducing method Grant 7,622,725 - Mizuno , et al. November 24, 2 | 2009-11-24 |
| Plasma Display Panel And Manufacturing Method Thereof App 20090267511 - Muro; Masahiro ; et al. | 2009-10-29 |
| Method Of Forming Metal Oxide Film, Metal Oxide Film And Optical Electronic Device App 20090263648 - Saitoh; Mitsuo ; et al. | 2009-10-22 |
| Plasma processing method and apparatus Grant 7,604,849 - Yashiro , et al. October 20, 2 | 2009-10-20 |
| Method and apparatus for plasma processing Grant 7,601,619 - Okumura , et al. October 13, 2 | 2009-10-13 |
| Plasma Doping Method and Plasma Doping Apparatus App 20090233385 - Okumura; Tomohiro ; et al. | 2009-09-17 |
| Plasma Doping Method and Apparatus App 20090233383 - Okumura; Tomohiro ; et al. | 2009-09-17 |
| Glass Film, Process For Production Thereof, And Optical Electronic Device App 20090224672 - Okumura; Tomohiro ; et al. | 2009-09-10 |
| Method of doping impurities, and electronic element using the same Grant 7,582,492 - Jin , et al. September 1, 2 | 2009-09-01 |
| Method of plasma doping Grant 7,575,987 - Okumura , et al. August 18, 2 | 2009-08-18 |
| Plasma Doping Method and Apparatus App 20090181526 - Okumura; Tomohiro ; et al. | 2009-07-16 |
| Plasma Doping Method and Plasma Processing Device App 20090176355 - Okumura; Tomohiro ; et al. | 2009-07-09 |
| Impurity Introducing Apparatus and Impurity Introducing Method App 20090140174 - Mizuno; Bunji ; et al. | 2009-06-04 |
| Plasma Processing Apparatus, Plasma Processing Method, Dielectric Window Used Therein, And Manufacturing Method Of Such A Dielectric Window App 20090130335 - Okumura; Tomohiro ; et al. | 2009-05-21 |
| Display Device App 20090102787 - OKUMURA; Tomohiro ; et al. | 2009-04-23 |
| Plasma processing method and apparatus Grant 7,513,214 - Okumura , et al. April 7, 2 | 2009-04-07 |
| Plasma processing method and apparatus Grant 7,510,667 - Okumura , et al. March 31, 2 | 2009-03-31 |
| Method and Apparatus for Plasma Processing App 20090068769 - Okumura; Tomohiro ; et al. | 2009-03-12 |
| Plasma display panel and process for producing the same Grant 7,501,762 - Okumura , et al. March 10, 2 | 2009-03-10 |
| Apparatus And Method For Plasma Doping App 20090042321 - Sasaki; Yuichiro ; et al. | 2009-02-12 |
| Plasma Doping Method and Apparatus App 20090035878 - Sasaki; Yuichiro ; et al. | 2009-02-05 |
| Plasma Doping Method App 20080318399 - SASAKI; Yuichiro ; et al. | 2008-12-25 |
| Plasma processing method and apparatus Grant 7,465,407 - Saitoh , et al. December 16, 2 | 2008-12-16 |
| Method for introducing impurities Grant 7,456,085 - Sasaki , et al. November 25, 2 | 2008-11-25 |
| Plasma Display Panel And Method For Producing The Same App 20080278055 - YAMASHITA; Hideki ; et al. | 2008-11-13 |
| Display unit and method for displaying image App 20080266075 - Okumura; Tomohiro ; et al. | 2008-10-30 |
| Display unit and method for displaying multiple images App 20080266304 - Okumura; Tomohiro ; et al. | 2008-10-30 |
| Plasma Processing Method and Plasma Processing Apparatus App 20080258082 - Okumura; Tomohiro ; et al. | 2008-10-23 |
| Plasma Doping Method And Apparatus App 20080233723 - Okumura; Tomohiro ; et al. | 2008-09-25 |
| Plasma Display Panel and Method for Manufacturing Same App 20080211408 - Yamakita; Hiroyuki ; et al. | 2008-09-04 |
| Impurity Introducing Apparatus And Impurity Introducing Method App 20080210167 - Mizino; Bunji ; et al. | 2008-09-04 |
| Plasma doping method Grant 7,407,874 - Sasaki , et al. August 5, 2 | 2008-08-05 |
| Plasma processing method and apparatus Grant 7,406,925 - Okumura , et al. August 5, 2 | 2008-08-05 |
| Impurity Introducing Apparatus And Impurity Introducing Method App 20080166861 - Mizuno; Bunji ; et al. | 2008-07-10 |
| Method for Introducing Impurities App 20080146009 - Sasaki; Yuichiro ; et al. | 2008-06-19 |
| Plasma doping method and plasma doping apparatus Grant 7,358,511 - Sasaki , et al. April 15, 2 | 2008-04-15 |
| Plasma doping method Grant 7,348,264 - Sasaki , et al. March 25, 2 | 2008-03-25 |
| Plasma Doping Method And Plasma Doping Apparatus App 20080067439 - Sasaki; Yuichiro ; et al. | 2008-03-20 |
| Method of Doping Impurities, and Electronic Element Using the Same App 20080061292 - Jin; Cheng-Guo ; et al. | 2008-03-13 |
| Plasma processing method and apparatus Grant 7,331,306 - Okumura , et al. February 19, 2 | 2008-02-19 |
| Plasma display panel and process for producing the plasma display panel Grant 7,329,989 - Okumura , et al. February 12, 2 | 2008-02-12 |
| Plasma Display Panel And Method Of Manufacturing The Same App 20070292634 - ABE; Takayuki ; et al. | 2007-12-20 |
| Method for restoring function of plasma display panel and plasma display panel App 20070241691 - Okumura; Tomohiro ; et al. | 2007-10-18 |
| Ingredient analysis method and ingredient analysis apparatus Grant 7,280,202 - Okumura , et al. October 9, 2 | 2007-10-09 |
| Plasma display panel and process for producing the plasma display panel App 20070232181 - Okumura; Tomohiro ; et al. | 2007-10-04 |
| Method And Apparatus Of Fabricating Semiconductor Device App 20070212837 - Mizuno; Bunji ; et al. | 2007-09-13 |
| Plasma Doping Method App 20070190759 - Sasaki; Yuichiro ; et al. | 2007-08-16 |
| Plasma doping method and plasma doping apparatus App 20070176124 - Sasaki; Yuichiro ; et al. | 2007-08-02 |
| Plasma doping method App 20070166846 - Sasaki; Yuichiro ; et al. | 2007-07-19 |
| Method of using an adhesive for temperature control during plasma processing Grant 7,232,591 - Okumura , et al. June 19, 2 | 2007-06-19 |
| Plasma doping method and plasma doping apparatus App 20070111548 - Sasaki; Yuichiro ; et al. | 2007-05-17 |
| Method and apparatus for plasma doping App 20070074813 - Okumura; Tomohiro ; et al. | 2007-04-05 |
| Plasma processing method and apparatus App 20070075039 - Yashiro; Yoichiro ; et al. | 2007-04-05 |
| Plasma processing method and apparatus Grant 7,199,064 - Okumura , et al. April 3, 2 | 2007-04-03 |
| Method of plasma doping Grant 7,192,854 - Sasaki , et al. March 20, 2 | 2007-03-20 |
| Method of controlling impurity doping and impurity doping apparatus App 20070059848 - Sasaki; Yuichiro ; et al. | 2007-03-15 |
| Apparatus for plasma doping App 20070037367 - Okumura; Tomohiro ; et al. | 2007-02-15 |
| Method and apparatus for processing electronic parts Grant 7,176,402 - Okumura , et al. February 13, 2 | 2007-02-13 |
| Plasma Doping Method and Plasma Doping Apparatus App 20070026649 - Okumura; Tomohiro ; et al. | 2007-02-01 |
| Plasma processing method and apparatus App 20070020958 - Okumura; Tomohiro ; et al. | 2007-01-25 |
| Plasma display panel and process for producing the same App 20070013312 - Okumura; Tomohiro ; et al. | 2007-01-18 |
| Plasma processing method and apparatus Grant 7,157,659 - Yashiro , et al. January 2, 2 | 2007-01-02 |
| Plasma processing apparatus and method App 20060270220 - Saitoh; Mitsuo ; et al. | 2006-11-30 |
| Method and apparatus for plasma processing Grant 7,135,089 - Okumura , et al. November 14, 2 | 2006-11-14 |
| Plasma processing method and apparatus App 20060169673 - Okumura; Tomohiro ; et al. | 2006-08-03 |
| Atmospheric pressure plasma processing method and apparatus Grant 7,056,416 - Okumura , et al. June 6, 2 | 2006-06-06 |
| Plasma processing method and apparatus for performing uniform plasma processing on a linear portion of an object Grant 7,022,937 - Okumura , et al. April 4, 2 | 2006-04-04 |
| Plasma processing method Grant 7,022,615 - Okumura , et al. April 4, 2 | 2006-04-04 |
| Method of plasma doping App 20050287776 - Sasaki, Yuichiro ; et al. | 2005-12-29 |
| Plasma processing method and apparatus App 20050279458 - Okumura, Tomohiro ; et al. | 2005-12-22 |
| Method and apparatus for processing electronic parts App 20050179171 - Okumura, Tomohiro ; et al. | 2005-08-18 |
| Plasma processing method and apparatus App 20050170669 - Okumura, Tomohiro ; et al. | 2005-08-04 |
| Ingredient analysis method and ingredient analysis apparatus App 20050162647 - Okumura, Tomohiro ; et al. | 2005-07-28 |
| Dry etching method and apparatus App 20050161160 - Tanabe, Hiroshi ; et al. | 2005-07-28 |
| Method and apparatus for plasma processing App 20050145340 - Okumura, Tomohiro ; et al. | 2005-07-07 |
| Plasma processing method and apparatus Grant 6,905,625 - Okumura , et al. June 14, 2 | 2005-06-14 |
| Method for restoring function of plasma display panel and plasma display panel App 20050104532 - Okumura, Tomohiro ; et al. | 2005-05-19 |
| Dry etching method and apparatus Grant 6,893,971 - Tanabe , et al. May 17, 2 | 2005-05-17 |
| Plasma processing method and apparatus App 20050092252 - Okumura, Tomohiro ; et al. | 2005-05-05 |
| Plasma processing method and apparatus App 20050082005 - Okumura, Tomohiro ; et al. | 2005-04-21 |
| Method and apparatus for plasma processing Grant 6,875,307 - Okumura , et al. April 5, 2 | 2005-04-05 |
| Plasma processing method and apparatus thereof Grant 6,864,640 - Okumura , et al. March 8, 2 | 2005-03-08 |
| Plasma processing method and apparatus App 20050040145 - Okumura, Tomohiro ; et al. | 2005-02-24 |
| Plasma display panel and process for producing the same and thin film App 20050040765 - Okumura, Tomohiro ; et al. | 2005-02-24 |
| Plasma processing method and apparatus App 20050011453 - Okumura, Tomohiro ; et al. | 2005-01-20 |
| Plasma processing method and apparatus Grant 6,830,653 - Okumura , et al. December 14, 2 | 2004-12-14 |
| Plasma processing method and apparatus Grant 6,808,759 - Okumura , et al. October 26, 2 | 2004-10-26 |
| Plasma processing method App 20040157447 - Okumura, Tomohiro ; et al. | 2004-08-12 |
| Plasma doping method and plasma doping apparatus App 20040149219 - Okumura, Tomohiro ; et al. | 2004-08-05 |
| Plasma processing method and apparatus App 20040129220 - Saitoh, Mitsuo ; et al. | 2004-07-08 |
| Plasma processing method and apparatus App 20040096581 - Yashiro, Yoichiro ; et al. | 2004-05-20 |
| Plasma processing method and apparatus App 20040075396 - Okumura, Tomohiro ; et al. | 2004-04-22 |
| Matching circuit and plasma processing apparatus Grant 6,707,253 - Sumida , et al. March 16, 2 | 2004-03-16 |
| Plasma processing method and apparatus App 20040045669 - Okumura, Tomohiro ; et al. | 2004-03-11 |
| Apparatus for plasma doping App 20040045507 - Okumura, Tomohiro ; et al. | 2004-03-11 |
| Method and apparatus for plasma doping App 20040036038 - Okumura, Tomohiro ; et al. | 2004-02-26 |
| Plasma processing method and apparatus and tray for plasma processing App 20030215578 - Okumura, Tomohiro ; et al. | 2003-11-20 |
| High frequency power source, plasma processing apparatus, inspection method for plasma processing apparatus, and plasma processing method Grant 6,630,792 - Okumura October 7, 2 | 2003-10-07 |
| Matching circuit and plasma processing apparatus App 20030136519 - Sumida, Kenji ; et al. | 2003-07-24 |
| Dry etching method and apparatus App 20030066817 - Tanabe, Hiroshi ; et al. | 2003-04-10 |
| Plasma processing method and apparatus App 20030026920 - Okumura, Tomohiro ; et al. | 2003-02-06 |
| Plasma processing method and apparatus App 20020153349 - Okumura, Tomohiro ; et al. | 2002-10-24 |
| High frequency power source, plasma processing apparatus, inspection method for plasma processing apparatus, and plasma processing method App 20020113738 - Okumura, Tomohiro | 2002-08-22 |
| Method and apparatus for plasma processing App 20020079058 - Okumura, Tomohiro ; et al. | 2002-06-27 |
| Plasma processsing method and apparatus thereof App 20020047541 - Okumura, Tomohiro ; et al. | 2002-04-25 |
| Plasma processing method and apparatus App 20020038791 - Okumura, Tomohiro ; et al. | 2002-04-04 |
| Plasma processing method and apparatus Grant 6,355,573 - Okumura , et al. March 12, 2 | 2002-03-12 |
| Plasma processing method and apparatus Grant 6,346,915 - Okumura , et al. February 12, 2 | 2002-02-12 |
| Etching and cleaning apparatus App 20020007914 - Okumura, Tomohiro ; et al. | 2002-01-24 |
| Plasma processing method and apparatus App 20010021550 - Okumura, Tomohiro ; et al. | 2001-09-13 |
| Method and device for plasma treatment Grant 6,177,646 - Okumura , et al. January 23, 2 | 2001-01-23 |
| Method for plasma processing Grant 6,093,457 - Okumura , et al. July 25, 2 | 2000-07-25 |
| Apparatus and method for applying RF power apparatus and method for generating plasma and apparatus and method for processing with plasma Grant 6,030,667 - Nakagawa , et al. February 29, 2 | 2000-02-29 |
| Thin film forming method and apparatus Grant 5,916,820 - Okumura , et al. June 29, 1 | 1999-06-29 |
| Plasma processing method and apparatus Grant 5,888,413 - Okumura , et al. March 30, 1 | 1999-03-30 |
| Plasma processing apparatus Grant 5,711,850 - Okumura , et al. January 27, 1 | 1998-01-27 |
| Water-repellent surface structure and its fabrication method Grant 5,693,236 - Okumura , et al. December 2, 1 | 1997-12-02 |
| Vacuum plasma processing apparatus and method Grant 5,609,690 - Watanabe , et al. March 11, 1 | 1997-03-11 |
| Plasma processing apparatus Grant 5,558,722 - Okumura , et al. September 24, 1 | 1996-09-24 |
| Plasma CVD system Grant 5,372,648 - Yamamoto , et al. December 13, 1 | 1994-12-13 |
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