Okumura; Masahiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Okumura; Masahiko.The latest application filed is for "substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid".

Company Profile

0.18.15

Okumura; Masahiko - Setagaya-ku N/A JP
Okumura; Masahiko - Tokyo JP
Okumura; Masahiko - Yaizu JP
OKUMURA; Masahiko - Yaizu-shi JP
Okumura; Masahiko - Tokyo-To JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Immersion lithographic apparatus rinsing outer contour of substrate with immersion space Grant 8,941,808 - Nakano , et al. January 27, 2	2015-01-27
Exposure apparatus, exposure method, and device manufacturing method Grant 8,780,326 - Kiuchi , et al. July 15, 2	2014-07-15
Exposure apparatus, cleaning method, and device fabricating method Grant 8,654,306 - Shiraishi , et al. February 18, 2	2014-02-18
Indicator for pressure container Grant 8,136,472 - Yamauchi , et al. March 20, 2	2012-03-20
Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid App 20120008112 - Nakano; Katsushi ; et al.	2012-01-12
Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid Grant 8,040,489 - Nakano , et al. October 18, 2	2011-10-18
Exposure apparatus, exposure method, and device manufacturing method App 20110222037 - Kiuchi; Tohru ; et al.	2011-09-15
Interferometric position-measuring devices and methods Grant 7,876,452 - Sogard , et al. January 25, 2	2011-01-25
Indicator For Pressure Container App 20100269748 - YAMAUCHI; Junji ; et al.	2010-10-28
Exposure apparatus, cleaning method, and device fabricating method App 20090316120 - Shiraishi; Kenichi ; et al.	2009-12-24
Holding Device And Exposure Apparatus App 20090097009 - OKUMURA; Masahiko	2009-04-16
Indicator for pressure container App 20090056615 - Yamauchi; Junji ; et al.	2009-03-05
Interferometric Position-measuring Devices And Methods App 20080291464 - Sogard; Michael R. ; et al.	2008-11-27
Substrate processing method, exposure apparatus, and method for producing device App 20080246931 - Nakano; Katsushi ; et al.	2008-10-09
Substrate Processing Method, Exposure Apparatus, and Method For Producing Device App 20080143980 - Nakano; Katsushi ; et al.	2008-06-19
Exposure apparatus and device manufacturing method App 20080137047 - Mizutani; Takeyuki ; et al.	2008-06-12
Substrate processing method, exposure apparatus, and method for producing device App 20070242248 - Nakano; Katsushi ; et al.	2007-10-18
Stage apparatus and exposure apparatus App 20070188732 - Shibazaki; Yuichi ; et al.	2007-08-16
Exposure apparatus and stage device, and device manufacturing method Grant 7,068,350 - Nishi , et al. June 27, 2	2006-06-27
Exposure apparatus and stage device, and device manufacturing method App 20050024610 - Nishi, Kenji ; et al.	2005-02-03
System and method for calibrating mirrors of a stage assembly Grant 6,842,248 - Binnard , et al. January 11, 2	2005-01-11
Method and apparatus for positioning substrate and the like Grant 6,624,433 - Okumura , et al. September 23, 2	2003-09-23
Method And Apparatus For Positioning Substrate And The Like App 20020113218 - OKUMURA, MASAHIKO ; et al.	2002-08-22
Method and apparatus for positioning substrate Grant 6,400,445 - Nishi , et al. June 4, 2	2002-06-04
Method for positioning substrate App 20010016293 - Nishi, Kenji ; et al.	2001-08-23
Method for positioning substrate Grant 6,225,012 - Nishi , et al. May 1, 2	2001-05-01
Projection exposure apparatus and method Grant 6,122,036 - Yamasaki , et al. September 19, 2	2000-09-19
Method and apparatus for aligning a mask and a set of substrates to be exposed Grant 5,798,530 - Okumura August 25, 1	1998-08-25
Projection exposure apparatus having an alignment sensor for aligning a mask image with a substrate Grant 5,654,553 - Kawakubo , et al. August 5, 1	1997-08-05
Tilting apparatus Grant 5,473,424 - Okumura December 5, 1	1995-12-05

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