Okumura; Masahide
Patent Applications and Registrations
Patent applications and USPTO patent grants for Okumura; Masahide.The latest application filed is for "charged particle beam lithography apparatus for forming pattern on semi-conductor".
- Okumura; Masahide - Tochigi JP
- Okumura, Masahide - Sagamihara-shi JP
- Okumura; Masahide - Sagamihara JP
- Okumura; Masahide - Hachioji JP
- Okumura; Masahide - Tokyo JA
| Patent | Date |
|---|---|
| Method for producing sheetlike detergent Grant 7,094,744 - Kobayashi , et al. August 22, 2 | 2006-08-22 |
| Method for intermittently forming laid layers Grant 6,881,441 - Kobayashi , et al. April 19, 2 | 2005-04-19 |
| Charged particle beam lithography apparatus for forming pattern on semi-conductor App 20020179856 - Ito, Hiroyuki ; et al. | 2002-12-05 |
| Charged particle beam lithography apparatus for forming pattern on semi-conductor App 20020100881 - Ito, Hiroyuki ; et al. | 2002-08-01 |
| Charged particle beam lithography apparatus for forming pattern on semi-conductor App 20020096651 - Ito, Hiroyuki ; et al. | 2002-07-25 |
| Charged particle beam lithography apparatus for forming pattern on semi-conductor Grant 6,121,625 - Ito , et al. September 19, 2 | 2000-09-19 |
| Charged particle beam exposure apparatus Grant 5,424,550 - Kawano , et al. June 13, 1 | 1995-06-13 |
| Piezoelectric actuator control apparatus Grant 4,841,191 - Takada , et al. June 20, 1 | 1989-06-20 |
| Charged particle beam lithography system Grant 4,829,444 - Saitou , et al. May 9, 1 | 1989-05-09 |
| Mark position detection system for use in charged particle beam apparatus Grant 4,808,829 - Okumura , et al. February 28, 1 | 1989-02-28 |
| Electron beam lithography apparatus Grant 4,692,579 - Saitou , et al. September 8, 1 | 1987-09-08 |
| Charged particle beam microprobe apparatus Grant 4,670,652 - Ichihashi , et al. June 2, 1 | 1987-06-02 |
| Small-dimension measurement system by scanning electron beam Grant 4,600,839 - Ichihashi , et al. July 15, 1 | 1986-07-15 |
| Electron beam control system Grant 4,437,008 - Matsuda , et al. March 13, 1 | 1984-03-13 |
| Vacuum valve apparatus Grant 4,099,704 - Okumura , et al. July 11, 1 | 1978-07-11 |
| Field emision electron gun with controlled power supply Grant 4,090,106 - Okumura , et al. May 16, 1 | 1978-05-16 |
| Field emission apparatus Grant 4,059,783 - Nakaizumi , et al. November 22, 1 | 1977-11-22 |
| Stereoscopic measuring apparatus Grant 4,039,829 - Kato , et al. August 2, 1 | 1977-08-02 |
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