Okudaira; Sadayuki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Okudaira; Sadayuki.The latest application filed is for "semiconductor integrated circuit arrangement fabrication method".
- Okudaira; Sadayuki - Tokyo JP
- Okudaira; Sadayuki - Ome JP
- Okudaira; Sadayuki - Ohme JP
- Okudaira; Sadayuki - Ome-shi JP
- Okudaira; Sadayuki - Oume JP
- Okudaira; Sadayuki - Kokubunji JP
| Patent | Date |
|---|---|
| Semiconductor integrated circuit arrangement fabrication method Grant RE39,895 - Tokunaga , et al. October 23, 2 | 2007-10-23 |
| Manufacturing method of semiconductor device Grant 6,767,782 - Saikawa , et al. July 27, 2 | 2004-07-27 |
| Semiconductor integrated circuit arrangement fabrication method Grant 5,962,347 - Tokunaga , et al. October 5, 1 | 1999-10-05 |
| Semiconductor integrated circuit arrangement fabrication method Grant 5,874,013 - Tokunaga , et al. February 23, 1 | 1999-02-23 |
| Dry etching method Grant 5,354,416 - Okudaira , et al. * October 11, 1 | 1994-10-11 |
| Dry etching method Grant 5,147,500 - Tachi , et al. September 15, 1 | 1992-09-15 |
| Dry etching method Grant 4,992,136 - Tachi , et al. February 12, 1 | 1991-02-12 |
| Method of dry etching Grant 4,986,877 - Tachi , et al. January 22, 1 | 1991-01-22 |
| Dry etching by alternately etching and depositing Grant 4,985,114 - Okudaira , et al. January 15, 1 | 1991-01-15 |
| Etching method Grant 4,943,344 - Tachi , et al. July 24, 1 | 1990-07-24 |
| Process for surface treatment Grant 4,857,137 - Tachi , et al. August 15, 1 | 1989-08-15 |
| Method of and apparatus for etching Grant 4,844,767 - Okudaira , et al. July 4, 1 | 1989-07-04 |
| Method for microwave plasma processing Grant 4,705,595 - Okudaira , et al. November 10, 1 | 1987-11-10 |
| Dry-processing apparatus Grant 4,624,214 - Suzuki , et al. November 25, 1 | 1986-11-25 |
| Method and apparatus for monitoring etching Grant 4,609,426 - Ogawa , et al. September 2, 1 | 1986-09-02 |
| Thin film deposition Grant 4,599,135 - Tsunekawa , et al. July 8, 1 | 1986-07-08 |
| Method and apparatus for surface treatment by plasma Grant 4,579,623 - Suzuki , et al. April 1, 1 | 1986-04-01 |
| Method and apparatus for plasma process Grant 4,563,240 - Shibata , et al. January 7, 1 | 1986-01-07 |
| Microwave plasma etching apparatus Grant 4,559,100 - Ninomiya , et al. December 17, 1 | 1985-12-17 |
| Method for growing silicon-including film by employing plasma deposition Grant 4,481,229 - Suzuki , et al. November 6, 1 | 1984-11-06 |
| Microwave plasma etching Grant 4,462,863 - Nishimatsu , et al. July 31, 1 | 1984-07-31 |
| Microwave plasma source Grant 4,433,228 - Nishimatsu , et al. February 21, 1 | 1984-02-21 |
| Microwave plasma etching apparatus having fan-shaped discharge Grant 4,430,138 - Suzuki , et al. February 7, 1 | 1984-02-07 |
| Process for plasma etching Grant 4,330,384 - Okudaira , et al. May 18, 1 | 1982-05-18 |
| Dry etching apparatus Grant 4,298,419 - Suzuki , et al. November 3, 1 | 1981-11-03 |
| Plasma etching apparatus Grant 4,101,411 - Suzuki , et al. July 18, 1 | 1978-07-18 |
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