loadpatents
Patent applications and USPTO patent grants for Okuda; Seiichiro.The latest application filed is for "substrate processing apparatus".
Patent | Date |
---|---|
Substrate processing apparatus Grant 7,479,205 - Okuda , et al. January 20, 2 | 2009-01-20 |
Substrate processing apparatus Grant 7,428,907 - Okuda , et al. September 30, 2 | 2008-09-30 |
Substrate processing apparatus for drying substrate Grant 7,418,970 - Sugimoto , et al. September 2, 2 | 2008-09-02 |
Substrate Processing Apparatus App 20080083501 - ARAI; Kenichiro ;   et al. | 2008-04-10 |
Substrate processing apparatus Grant 7,267,130 - Okuda , et al. September 11, 2 | 2007-09-11 |
Substrate processing apparatus and substrate processing method App 20070028437 - Kimura; Masahiro ;   et al. | 2007-02-08 |
Substrate processing apparatus Grant 6,951,221 - Okuda , et al. October 4, 2 | 2005-10-04 |
Substrate treating apparatus App 20050124518 - Sugimoto, Hiroaki ;   et al. | 2005-06-09 |
Substrate processing apparatus App 20040206379 - Okuda, Seiichiro ;   et al. | 2004-10-21 |
Substrate processing apparatus App 20040206378 - Okuda, Seiichiro ;   et al. | 2004-10-21 |
Substrate processing apparatus App 20040206452 - Okuda, Seiichiro ;   et al. | 2004-10-21 |
Substrate processing apparatus Grant 6,805,769 - Okuda , et al. October 19, 2 | 2004-10-19 |
Substrate processing apparatus App 20040200513 - Okuda, Seiichiro ;   et al. | 2004-10-14 |
Substrate processing apparatus for drying substrate App 20040163683 - Sugimoto, Hiroaki ;   et al. | 2004-08-26 |
Substrate treating apparatus App 20030109205 - Sugimoto, Hiroaki ;   et al. | 2003-06-12 |
Substrate processing apparatus Grant 6,550,988 - Sugimoto , et al. April 22, 2 | 2003-04-22 |
Substrate processing apparatus App 20020051644 - Sugimoto, Hiroaki ;   et al. | 2002-05-02 |
Substrate processing apparatus App 20020043275 - Okuda, Seiichiro ;   et al. | 2002-04-18 |
Substrate processing apparatus App 20020035762 - Okuda, Seiichiro ;   et al. | 2002-03-28 |
Substrate spin treating method and apparatus Grant 5,788,773 - Okuda , et al. August 4, 1 | 1998-08-04 |
Substrate spin coating apparatus Grant 5,762,709 - Sugimoto , et al. June 9, 1 | 1998-06-09 |
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