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Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Non-transitory Computer-readable Recording Medium And Substrate Processing Apparatus App 20220208544 - KOSHI; Yasunobu ;   et al. | 2022-06-30 |
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Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium App 20220102136 - NODA; Takaaki ;   et al. | 2022-03-31 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium App 20210407774 - IMAMURA; Tomoki ;   et al. | 2021-12-30 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20200365388 - ASAI; Masayuki ;   et al. | 2020-11-19 |
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medi App 20200258736 - A1 | 2020-08-13 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 10,640,869 - Okuda , et al. | 2020-05-05 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20190093222 - OKUDA; Kazuyuki ;   et al. | 2019-03-28 |
Substrate processing apparatus and semiconductor device manufacturing method Grant 9,963,785 - Asai , et al. May 8, 2 | 2018-05-08 |
Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium Grant 9,895,727 - Nakamura , et al. February 20, 2 | 2018-02-20 |
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Substrate processing apparatus and semiconductor device manufacturing method Grant 9,593,422 - Asai , et al. March 14, 2 | 2017-03-14 |
Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus Grant 9,349,587 - Hirose , et al. May 24, 2 | 2016-05-24 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,218,955 - Sasajima , et al. December 22, 2 | 2015-12-22 |
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Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium Grant 9,177,786 - Sano , et al. November 3, 2 | 2015-11-03 |
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Substrate Processing Apparatus App 20150101533 - OKUDA; Kazuyuki | 2015-04-16 |
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and non-transitory computer-readable recording medium Grant 8,956,984 - Okuda February 17, 2 | 2015-02-17 |
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Method Of Manufacturing Semiconductor Device And Method Of Processing Substrate And Substrate Processing Apparatus App 20140038429 - Hirose; Yoshiro ;   et al. | 2014-02-06 |
Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus Grant 8,575,042 - Ota , et al. November 5, 2 | 2013-11-05 |
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Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Substrate Processing Apparatus, And Non-transitory Computer-readable Recording Medium App 20130171838 - OKUDA; Kazuyuki | 2013-07-04 |
Substrate Processing Apparatus App 20130133696 - OKUDA; Kazuyuki ;   et al. | 2013-05-30 |
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Substrate Processing Apparatus App 20120240348 - OKUDA; Kazuyuki ;   et al. | 2012-09-27 |
Substrate processing apparatus and reaction container Grant 8,261,692 - Kontani , et al. September 11, 2 | 2012-09-11 |
Method Of Manufacturing Semiconductor Device And Method Of Processing Substrate And Substrate Processing Apparatus App 20120220137 - Ota; Yosuke ;   et al. | 2012-08-30 |
Method of producing semiconductor device Grant 8,227,346 - Miya , et al. July 24, 2 | 2012-07-24 |
Substrate processing apparatus Grant 8,211,802 - Okuda , et al. July 3, 2 | 2012-07-03 |
Substrate processing apparatus Grant 8,176,871 - Okuda , et al. May 15, 2 | 2012-05-15 |
Substrate Processing Apparatus And Semiconductor Device Manufacturing Method App 20120100722 - ASAI; Masayuki ;   et al. | 2012-04-26 |
Method Of Producing Semiconductor Device App 20120077350 - MIYA; Hironobu ;   et al. | 2012-03-29 |
Manufacturing Method Of Semiconductor Device, And Semiconductor Device App 20120073751 - MIZUNO; Norikazu ;   et al. | 2012-03-29 |
Method Of Producing Semiconductor Device App 20120034790 - Miya; Hironobu ;   et al. | 2012-02-09 |
Method of producing semiconductor device Grant 8,105,957 - Miya , et al. January 31, 2 | 2012-01-31 |
Manufacturing method of semiconductor device, and semiconductor device Grant 8,093,159 - Mizuno , et al. January 10, 2 | 2012-01-10 |
Substrate Processing Apparatus App 20110300722 - Sakai; Masanori ;   et al. | 2011-12-08 |
Surroundings monitoring device for vehicle Grant 8,054,201 - Okugi , et al. November 8, 2 | 2011-11-08 |
Substrate processing apparatus and reaction container Grant 8,047,158 - Kontani , et al. November 1, 2 | 2011-11-01 |
Production method for semiconductor device Grant 8,039,404 - Miya , et al. October 18, 2 | 2011-10-18 |
Vertical Type Semiconductor Device Producing Apparatus App 20110176967 - Okuda; Kazuyuki ;   et al. | 2011-07-21 |
Substrate Processing Apparatus App 20110130001 - OKUDA; Kazuyuki ;   et al. | 2011-06-02 |
Substrate processing apparatus and reaction container Grant 7,900,580 - Kontani , et al. March 8, 2 | 2011-03-08 |
Substrate Processing Apparatus And Reaction Container App 20100263593 - Kontani; Tadashi ;   et al. | 2010-10-21 |
Production Method For Semiconductor Device And Substrate Processing Apparatus App 20100233887 - Miya; Hironobu ;   et al. | 2010-09-16 |
Production method for semiconductor device and substrate processing apparatus Grant 7,779,785 - Miya , et al. August 24, 2 | 2010-08-24 |
Method of producing a semiconductor device Grant 7,622,396 - Okuda , et al. November 24, 2 | 2009-11-24 |
Production Method For Semiconductor Device And Substrate Processing Apparatus App 20090280652 - Miya; Hironobu ;   et al. | 2009-11-12 |
Manufacturing Method Of Semiconductor Device, And Semiconductor Device App 20090278235 - MIZUNO; Norikazu ;   et al. | 2009-11-12 |
Semiconductor Manufacturing Apparatus App 20090277382 - Mizuno; Norikazu ;   et al. | 2009-11-12 |
Surroundings Monitoring Device For Vehicle App 20090237269 - OKUGI; Tomokazu ;   et al. | 2009-09-24 |
Substrate Processing Method And Substrate Processing Apparatus App 20090205568 - MIZUNO; Norikazu ;   et al. | 2009-08-20 |
Method Of Producing Semiconductor Device App 20090181547 - Okuda; Kazuyuki ;   et al. | 2009-07-16 |
Substrate Processing Apparatus App 20090178694 - OKUDA; Kazuyuki ;   et al. | 2009-07-16 |
Substrate Processing Apparatus App 20090176017 - SAKAI; Masanori ;   et al. | 2009-07-09 |
Substrate Processing Apparatus App 20090151632 - Okuda; Kazuyuki ;   et al. | 2009-06-18 |
Substrate Processing Apparatus and Reaction Container App 20080251015 - KONTANI; Tadashi ;   et al. | 2008-10-16 |
Substrate Processing Apparatus and Reaction Container App 20080251014 - KONTANI; Tadashi ;   et al. | 2008-10-16 |
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Substrate Processing Apparatus and Reaction Container App 20080121180 - KONTANI; Tadashi ;   et al. | 2008-05-29 |
Substrate Processing Method and Substrate Processing Apparatus App 20070292974 - Mizuno; Norikazu ;   et al. | 2007-12-20 |
Substrate processing device App 20060124058 - Sakai; Masanori ;   et al. | 2006-06-15 |
Substrate processing apparatus App 20060060142 - Okuda; Kazuyuki ;   et al. | 2006-03-23 |
Vertical type semiconductor device producing apparatus App 20050217577 - Okuda, Kazuyuki ;   et al. | 2005-10-06 |
Failure detector for communication network in automobile Grant 6,938,190 - Okuda August 30, 2 | 2005-08-30 |
Vertical type semiconductor device producing apparatus Grant 6,905,549 - Okuda , et al. June 14, 2 | 2005-06-14 |
Substrate processing apparatus and reaction container App 20040025786 - Kontani, Tadashi ;   et al. | 2004-02-12 |
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Substrate processing apparatus App 20030024477 - Okuda, Kazuyuki ;   et al. | 2003-02-06 |
Failure detector for communication network in automobile App 20020062460 - Okuda, Kazuyuki | 2002-05-23 |
Data backup apparatus utilized in an electronic control system and data backup method performed in the data backup apparatus Grant 5,668,726 - Kondo , et al. September 16, 1 | 1997-09-16 |