Okubo; Yukiharu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Okubo; Yukiharu.The latest application filed is for "reticle protection member, reticle carrying device, exposure device and method for carrying reticle".

Company Profile

0.16.18

Okubo; Yukiharu - Kumagaya N/A JP
Okubo; Yukiharu - Kumagaya-shi JP
Okubo; Yukiharu - Saitama JP
Okubo; Yukiharu - Kawasaki JP
Okubo; Yukiharu - Tokyo JP
Okubo, Yukiharu - Kawasaki-shi JP
Okubo, Yukiharu - Kunagaya-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Reticle protection member, reticle carrying device, exposure device and method for carrying reticle Grant 8,921,812 - Suzuki , et al. December 30, 2	2014-12-30
Reticle Protection Member, Reticle Carrying Device, Exposure Device And Method For Carrying Reticle App 20120200835 - SUZUKI; Motoko ; et al.	2012-08-09
Reticle protection member, reticle carrying device, exposure device and method for carrying reticle Grant 8,168,959 - Suzuki , et al. May 1, 2	2012-05-01
Reticle Protection Member, Reticle Carrying Device, Exposure Device and Method for Carrying Reticle App 20090103061 - Suzuki; Motoko ; et al.	2009-04-23
Reticle protection member, reticle carrying device, exposure device and method for carrying reticle Grant 7,453,549 - Suzuki , et al. November 18, 2	2008-11-18
Electron beam apparatus and device production method using the electron beam apparatus Grant 7,439,502 - Nakasuji , et al. October 21, 2	2008-10-21
Electron beam apparatus and device production method using the electron beam apparatus App 20080173815 - Nakasuji; Mamoru ; et al.	2008-07-24
Electron beam apparatus and device production method using the electron beam apparatus App 20070272859 - Nakasuji; Mamoru ; et al.	2007-11-29
Reticle protection member, reticle carrying device, exposure device and method for carrying reticle App 20070206173 - Suzuki; Motoko ; et al.	2007-09-06
Electron beam apparatus and device fabrication method using the electron beam apparatus Grant 7,244,932 - Nakasuji , et al. July 17, 2	2007-07-17
Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus Grant 6,977,377 - Okubo December 20, 2	2005-12-20
Scanning device and method including electric charge movement Grant 6,953,944 - Kohama , et al. October 11, 2	2005-10-11
Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same Grant 6,900,878 - Okubo , et al. May 31, 2	2005-05-31
Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus App 20050006604 - Okubo, Yukiharu	2005-01-13
Scanning device and method including electric charge movement App 20040238740 - Kohama, Yoshiaki ; et al.	2004-12-02
Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus Grant 6,781,123 - Okubo August 24, 2	2004-08-24
Method of making a static pressure air bearing Grant 6,735,867 - Tsuda , et al. May 18, 2	2004-05-18
Reticle-holding pods and methods for holding thin, circular reticles, and reticle-handling systems utilizing same App 20040057030 - Okubo, Yukiharu ; et al.	2004-03-25
Scanning device and scanning method Grant 6,670,602 - Kohama , et al. December 30, 2	2003-12-30
Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus App 20030205668 - Okubo, Yukiharu	2003-11-06
Stage devices exhibiting reduced deformation, and microlithography systems comprising same App 20030178579 - Tanaka, Keiichi ; et al.	2003-09-25
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same Grant 6,583,597 - Tanaka , et al. June 24, 2	2003-06-24
Charged particle beam control element, method of fabricating charged particle beam control element, and charged beam apparatus Grant 6,566,658 - Okubo May 20, 2	2003-05-20
Static pressure air bearing Grant 6,499,880 - Tsuda , et al. December 31, 2	2002-12-31
Static pressure air bearing App 20020181808 - Tsuda, Takuma ; et al.	2002-12-05
Charged particle beam apparatus App 20020158198 - Kohama, Yoshiaki ; et al.	2002-10-31
Electron beam apparatus and device production method using the electron beam apparatus App 20020148961 - Nakasuji, Mamoru ; et al.	2002-10-17
Stage devices configured for use in a vacuum environment of a charged-particle-beam microlithography apparatus App 20020089657 - Okubo, Yukiharu	2002-07-11
Charged particle beam apparatus App 20020074939 - Okubo, Yukiharu	2002-06-20
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same App 20020070699 - Tanaka, Keiichi ; et al.	2002-06-13
Static pressure air bearing App 20020034345 - Tsuda, Takuma ; et al.	2002-03-21
Charged-particle-beam microlithography stage including actuators for moving a reticle or substrate relative to the stage, and associated methods App 20020021428 - Nakano, Katsushi ; et al.	2002-02-21
Projection apparatus and method Grant 5,633,755 - Manabe , et al. May 27, 1	1997-05-27

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