Okubo; Tsuneo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Okubo; Tsuneo.The latest application filed is for "method and apparatus of deflection calibration for a charged particle beam exposure apparatus".
- Okubo; Tsuneo - Tokyo JP
- Okubo; Tsuneo - Hachioji JP
- Okubo; Tsuneo - Moriguchi JA
| Patent | Date |
|---|---|
| Method and apparatus of deflection calibration for a charged particle beam exposure apparatus Grant 4,443,703 - Shimazu , et al. April 17, 1 | 1984-04-17 |
| Method of detecting a mark by an electron beam and an apparatus therefor Grant 4,286,154 - Okubo , et al. August 25, 1 | 1981-08-25 |
| Headphone type FM stereo receiver Grant 3,906,160 - Nakamura , et al. September 16, 1 | 1975-09-16 |
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