Okubo; Tomoya

Patent Applications and Registrations

Patent applications and USPTO patent grants for Okubo; Tomoya.The latest application filed is for "substrate processing apparatus and substrate processing method".

Company Profile

3.4.9

Okubo; Tomoya - Yamanashi JP
Okubo; Tomoya - Nirasaki-shi JP
Okubo; Tomoya - Nirasaki JP
Okubo, Tomoya - Kitakoma-gun JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus and substrate processing method Grant 10,985,029 - Ogawa , et al. April 20, 2	2021-04-20
Substrate Processing Apparatus And Substrate Processing Method App 20200118830 - OGAWA; Hiroyuki ; et al.	2020-04-16
Substrate processing apparatus and substrate processing method Grant 10,541,145 - Ogawa , et al. Ja	2020-01-21
Substrate Processing Apparatus And Substrate Processing Method App 20180286696 - OGAWA; Hiroyuki ; et al.	2018-10-04
Component For Substrate Processing Apparatus And Method Of Forming Film On The Component App 20120186985 - MITSUHASHI; Kouji ; et al.	2012-07-26
Plasma processing apparatus, focus ring, and susceptor Grant 8,124,539 - Endoh , et al. February 28, 2	2012-02-28
Substrate Heating Apparatus, Substrate Heating Method And Substrate Processing System App 20110183279 - OKUBO; Tomoya ; et al.	2011-07-28
Plasma Processing Apparatus, Focus Ring, And Susceptor App 20110000883 - Endoh; Shosuke ; et al.	2011-01-06
Component For Substrate Processing Apparatus And Method Of Forming Film On The Component App 20080105203 - Mitsuhashi; Kouji ; et al.	2008-05-08
Method of resetting substrate processing apparatus, storage medium storing program for implementing the method, and substrate processing apparatus Grant 7,231,321 - Furuya , et al. June 12, 2	2007-06-12
Method of resetting substrate processing apparatus, storage medium storing program for implementing the method, and substrate processing apparatus App 20060100825 - Furuya; Hajime ; et al.	2006-05-11
Plasma processing apparatus, focus ring, and susceptor App 20040261946 - Endoh, Shosuke ; et al.	2004-12-30
Vacuum processing apparatus App 20040149214 - Hirose, Jun ; et al.	2004-08-05

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