Okubo; Shingo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Okubo; Shingo.The latest application filed is for "vapor disposition of silicon-containing films using penta-substituted disilanes".

Company Profile

1.8.10

Okubo; Shingo - Tsukuba JP
OKUBO; Shingo - Ibaraki JP
Okubo; Shingo - Tsukuba-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Vapor Disposition Of Silicon-containing Films Using Penta-substituted Disilanes App 20190027357 - Girard; Jean-Marc ; et al.	2019-01-24
Vapor Deposition Of Silicon-containing Films Using Penta-substituted Disilanes App 20170186597 - GIRARD; Jean-Marc ; et al.	2017-06-29
Vapor deposition of silicon-containing films using penta-substituted disilanes Grant 9,633,838 - Girard , et al. April 25, 2	2017-04-25
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,548,198 - Hirose , et al. January 17, 2	2017-01-17
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,343,290 - Hirose , et al. May 17, 2	2016-05-17
Silicon/carbon Composite, Silicon Alloy/carbon Composite, And Methods For Producing The Same App 20160118154 - DUMONT; Aurelie ; et al.	2016-04-28
Vapor Deposition Of Silicon-containing Films Using Penta-substituted Disilanes App 20160111272 - GIRARD; Jean-Marc ; et al.	2016-04-21
Metal heterocyclic compounds for deposition of thin films Grant 9,109,281 - Gatineau , et al. August 18, 2	2015-08-18
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20140287598 - HIROSE; Yoshiro ; et al.	2014-09-25
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20140287596 - HIROSE; Yoshiro ; et al.	2014-09-25
Metal Heterocyclic Compounds For Deposition Of Thin Films App 20140119977 - GATINEAU; Julien ; et al.	2014-05-01
Metal heterocyclic compounds for deposition of thin films Grant 8,636,845 - Gatineau , et al. January 28, 2	2014-01-28
Metal piperidinate and metal pyridinate precursors for thin film deposition Grant 8,236,381 - Okubo August 7, 2	2012-08-07
Tellurium precursors for film deposition Grant 8,101,237 - Okubo , et al. January 24, 2	2012-01-24
Metal Piperidinate And Metal Pyridinate Precursors For Thin Film Deposition App 20100034695 - Okubo; Shingo	2010-02-11
Tellurium Precursors For Film Deposition App 20090299084 - OKUBO; Shingo ; et al.	2009-12-03
Germanium Precursors For Gst Film Deposition App 20090162973 - GATINEAU; Julien ; et al.	2009-06-25

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