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Patent applications and USPTO patent grants for Okorn-Schmidt; Harald F..The latest application filed is for "high-dielectric constant insulators for feol capacitors".
Patent | Date |
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High-dielectric constant insulators for feol capacitors Grant 6,958,506 - Gousev , et al. October 25, 2 | 2005-10-25 |
High-dielectric constant insulators for feol capacitors App 20040087100 - Gousev, Evgeni P. ;   et al. | 2004-05-06 |
High-dielectric constant insulators for FEOL capacitors Grant 6,667,207 - Ballantine , et al. December 23, 2 | 2003-12-23 |
High-dielectric constant insulators for FEOL capacitors Grant 6,511,873 - Ballantine , et al. January 28, 2 | 2003-01-28 |
High-dielectric constant insulators for FEOL capacitors App 20030017639 - Ballantine, Arne W. ;   et al. | 2003-01-23 |
Method of forming variable oxide thicknesses across semiconductor chips App 20020197836 - Iyer, S. Sundar Kumar ;   et al. | 2002-12-26 |
High-dielectric Constant Insulators For Feol Capacitors App 20020192881 - Ballantine, Arne W. ;   et al. | 2002-12-19 |
Interfacial oxidation process for high-k gate dielectric process integration Grant 6,444,592 - Ballantine , et al. September 3, 2 | 2002-09-03 |
Process for treating a semiconductor substrate Grant 6,354,309 - Arndt , et al. March 12, 2 | 2002-03-12 |
Sonic cleaning with an interference signal Grant 6,276,370 - Fisch , et al. August 21, 2 | 2001-08-21 |
Removal of dielectric oxides Grant 6,200,891 - Jagannathan , et al. March 13, 2 | 2001-03-13 |
Removal of silicon oxide Grant 6,117,796 - Gale , et al. September 12, 2 | 2000-09-12 |
Etching of silicon nitride Grant 6,066,267 - Rath , et al. May 23, 2 | 2000-05-23 |
Method for cleaning semiconductor devices Grant 5,962,384 - Cooper , et al. October 5, 1 | 1999-10-05 |
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