Patent | Date |
---|
Substrate Processing Apparatus And Fabrication Process Of A Semiconductor Device App 20120231553 - OKITA; Yoichi ;   et al. | 2012-09-13 |
Semiconductor device and method for manufacturing the same Grant 8,044,447 - Okita , et al. October 25, 2 | 2011-10-25 |
Semiconductor device and method of manufacturing the same Grant 8,034,676 - Okita October 11, 2 | 2011-10-11 |
Plasma etching method and apparatus Grant 7,906,033 - Tachino , et al. March 15, 2 | 2011-03-15 |
Semiconductor Device And Method Of Manufacturing The Same App 20100144104 - OKITA; Yoichi | 2010-06-10 |
Semiconductor device and method of manufacturing the same Grant 7,700,978 - Okita April 20, 2 | 2010-04-20 |
Semiconductor device and method of manufacturing the same Grant 7,595,250 - Okita , et al. September 29, 2 | 2009-09-29 |
Semiconductor device and fabrication method of a semiconductor device Grant 7,550,799 - Okita June 23, 2 | 2009-06-23 |
Method for manufacturing semiconductor device Grant 7,547,558 - Okita , et al. June 16, 2 | 2009-06-16 |
Semiconductor Device And Method For Manufacturing The Same App 20080142865 - Okita; Yoichi ;   et al. | 2008-06-19 |
Semiconductor device and method of manufacturing the same App 20070205450 - Okita; Yoichi | 2007-09-06 |
Substrate processing apparatus and fabrication process of a semiconductor device App 20070178698 - Okita; Yoichi ;   et al. | 2007-08-02 |
Method for fabricating ferroelectric capacitor Grant 7,198,960 - Okita April 3, 2 | 2007-04-03 |
Semiconductor device and method of manufacturing the same App 20060258114 - Okita; Yoichi ;   et al. | 2006-11-16 |
Semiconductor device and method of manufacturing the same Grant 7,102,186 - Okita , et al. September 5, 2 | 2006-09-05 |
Semiconductor device and method of manufacturing the same Grant 6,987,045 - Okita January 17, 2 | 2006-01-17 |
Plasma etching method and apparatus App 20050252885 - Tachino, Yuuichi ;   et al. | 2005-11-17 |
Plasma etching method and apparatus Grant 6,926,800 - Tachino , et al. August 9, 2 | 2005-08-09 |
Method for fabricating ferroelectric capacitor App 20050153463 - Okita, Yoichi | 2005-07-14 |
Method for manufacturing semiconductor device App 20050136554 - Okita, Yoichi ;   et al. | 2005-06-23 |
Semiconductor device and fabrication method of a semiconductor device App 20050133842 - Okita, Yoichi | 2005-06-23 |
Laser Having Active Region Formed Above Substrate App 20050098815 - Okita, Yoichi ;   et al. | 2005-05-12 |
Method of manufacturing the FeRAM semiconductor device with improved contact plug structure Grant 6,825,076 - Okita November 30, 2 | 2004-11-30 |
Semiconductor device and method of manufacturing the same App 20040183112 - Okita, Yoichi | 2004-09-23 |
Semiconductor device and method of manufacturing the same App 20040185663 - Okita, Yoichi | 2004-09-23 |
FeRam semiconductor device with improved contact plug structure Grant 6,720,600 - Okita April 13, 2 | 2004-04-13 |
Semiconductor device having a capacitor and method of manufacturing the same Grant 6,713,798 - Okita March 30, 2 | 2004-03-30 |
Semiconductor device manufacturing method App 20030235944 - Okita, Yoichi | 2003-12-25 |
Semiconductor device and method of manufacturing the same App 20030155595 - Okita, Yoichi | 2003-08-21 |
Semiconductor device and method of manufacturing the same App 20030062563 - Okita, Yoichi | 2003-04-03 |
Plasma etching method and apparatus App 20020023896 - Tachino, Yuuichi ;   et al. | 2002-02-28 |