Patent | Date |
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Silicon Carbide Substrate App 20220220638 - OKITA; Kyoko ;   et al. | 2022-07-14 |
Silicon Carbide Substrate App 20220220637 - HONKE; Tsubasa ;   et al. | 2022-07-14 |
Silicon carbide substrate Grant 11,342,418 - Okita , et al. May 24, 2 | 2022-05-24 |
Silicon carbide substrate and silicon carbide epitaxial substrate Grant 11,322,349 - Honke , et al. May 3, 2 | 2022-05-03 |
Recycle Wafer Of Silicon Carbide And Method For Manufacturing Silicon Carbide Semiconductor Device App 20220085172 - HONKE; Tsubasa ;   et al. | 2022-03-17 |
Method for manufacturing silicon carbide substrate, method for manufacturing silicon carbide epitaxial substrate, and method for manufacturing silicon carbide semiconductor device Grant 11,034,058 - Matsumoto , et al. June 15, 2 | 2021-06-15 |
Method For Manufacturing Silicon Carbide Substrate, Method For Manufacturing Silicon Carbide Epitaxial Substrate, And Method For Manufacturing Silicon Carbide Semiconductor Device App 20210060818 - MATSUMOTO; Naoki ;   et al. | 2021-03-04 |
Silicon Carbide Single Crystal Substrate App 20210054529 - OKITA; Kyoko ;   et al. | 2021-02-25 |
Silicon carbide single crystal substrate and method for manufacturing the same Grant 10,872,759 - Okita , et al. December 22, 2 | 2020-12-22 |
Silicon Carbide Substrate App 20200388683 - OKITA; Kyoko ;   et al. | 2020-12-10 |
Silicon Carbide Substrate App 20200385887 - OKITA; Kyoko ;   et al. | 2020-12-10 |
Silicon Carbide Epitaxial Wafer App 20200362470 - HORI; Tsutomu ;   et al. | 2020-11-19 |
Semiconductor device and method for manufacturing same Grant 10,741,683 - Harada , et al. A | 2020-08-11 |
Silicon carbide substrate and method for manufacturing the same Grant 10,704,163 - Okita | 2020-07-07 |
Silicon Carbide Substrate And Silicon Carbide Epitaxial Substrate App 20200083039 - HONKE; Tsubasa ;   et al. | 2020-03-12 |
Silicon carbide substrate Grant 10,319,821 - Ueta , et al. | 2019-06-11 |
Silicon carbide substrate Grant 10,221,501 - Honke , et al. | 2019-03-05 |
Silicon Carbide Substrate And Method For Manufacturing The Same App 20180355513 - OKITA; Kyoko | 2018-12-13 |
Silicon carbide substrate and method for manufacturing the same Grant 10,113,249 - Okita October 30, 2 | 2018-10-30 |
Silicon Carbide Substrate App 20180274129 - HONKE; Tsubasa ;   et al. | 2018-09-27 |
Silicon Carbide Substrate App 20180254323 - UETA; Shunsaku ;   et al. | 2018-09-06 |
Silicon carbide substrate, method for producing same, and method for manufacturing silicon carbide semiconductor device Grant 10,030,319 - Honke , et al. July 24, 2 | 2018-07-24 |
Semiconductor Device And Method For Manufacturing Same App 20180204942 - Harada; Shin ;   et al. | 2018-07-19 |
Silicon carbide single crystal substrate, silicon carbide semiconductor device, and method for manufacturing silicon carbide semiconductor device Grant 9,978,651 - Honke , et al. May 22, 2 | 2018-05-22 |
Silicon carbide semiconductor substrate and method for manufacturing same Grant 9,966,249 - Tanaka , et al. May 8, 2 | 2018-05-08 |
Semiconductor device and method for manufacturing same Grant 9,947,782 - Harada , et al. April 17, 2 | 2018-04-17 |
Silicon carbide single-crystal substrate, silicon carbide epitaxial substrate and method of manufacturing them Grant 9,896,781 - Honke , et al. February 20, 2 | 2018-02-20 |
Silicon Carbide Single Crystal Substrate, Silicon Carbide Semiconductor Device, And Method For Manufacturing Silicon Carbide Semiconductor Device App 20180033703 - HONKE; Tsubasa ;   et al. | 2018-02-01 |
Method of manufacturing silicon carbide substrate Grant 9,844,893 - Okita December 19, 2 | 2017-12-19 |
Silicon Carbide Substrate, Method For Producing Same, And Method For Manufacturing Silicon Carbide Semiconductor Device App 20170335489 - HONKE; Tsubasa ;   et al. | 2017-11-23 |
Silicon Carbide Substrate And Method For Manufacturing The Same App 20170306526 - OKITA; Kyoko | 2017-10-26 |
Method of manufacturing silicon carbide single crystal and silicon carbide single crystal substrate Grant 9,799,735 - Honke , et al. October 24, 2 | 2017-10-24 |
Silicon Carbide Single Crystal Substrate And Method For Manufacturing The Same App 20170256391 - Okita; Kyoko ;   et al. | 2017-09-07 |
Silicon carbide substrate, silicon carbide semiconductor device, and methods for manufacturing silicon carbide substrate and silicon carbide semiconductor device Grant 9,691,608 - Tanaka , et al. June 27, 2 | 2017-06-27 |
Silicon Carbide Single-crystal Substrate, Silicon Carbide Epitaxial Substrate And Method Of Manufacturing Them App 20170073837 - HONKE; Tsubasa ;   et al. | 2017-03-16 |
Silicon Carbide Semiconductor Substrate And Method For Manufacturing Same App 20160233080 - Tanaka; So ;   et al. | 2016-08-11 |
Method Of Manufacturing Silicon Carbide Substrate App 20160229086 - OKITA; Kyoko | 2016-08-11 |
Method Of Manufacturing Silicon Carbide Single Crystal And Silicon Carbide Single Crystal Substrate App 20160155808 - HONKE; Tsubasa ;   et al. | 2016-06-02 |
Method of manufacturing silicon carbide substrate Grant 9,346,187 - Okita May 24, 2 | 2016-05-24 |
Silicon carbide single-crystal substrate Grant 9,324,814 - Okita , et al. April 26, 2 | 2016-04-26 |
Silicon carbide single-crystal substrate Grant 9,318,563 - Okita , et al. April 19, 2 | 2016-04-19 |
Silicon Carbide Substrate, Silicon Carbide Semiconductor Device, And Methods For Manufacturing Silicon Carbide Substrate And Silicon Carbide Semiconductor Device App 20160086798 - Tanaka; So ;   et al. | 2016-03-24 |
Method of manufacturing silicon carbide single crystal and silicon carbide single crystal substrate Grant 9,290,860 - Honke , et al. March 22, 2 | 2016-03-22 |
Silicon Carbide Single-crystal Substrate App 20150221729 - Okita; Kyoko ;   et al. | 2015-08-06 |
Silicon Carbide Single-crystal Substrate App 20150162409 - Okita; Kyoko ;   et al. | 2015-06-11 |
Silicon carbide single-crystal substrate and method for manufacturing same Grant 8,975,643 - Okita , et al. March 10, 2 | 2015-03-10 |
Method for manufacturing silicon carbide substrate and method for manufacturing semiconductor device Grant 8,969,103 - Sasaki , et al. March 3, 2 | 2015-03-03 |
Method Of Manufacturing Silicon Carbide Single Crystal And Silicon Carbide Single Crystal Substrate App 20150010726 - HONKE; Tsubasa ;   et al. | 2015-01-08 |
Method For Manufacturing Silicon Carbide Substrate App 20140315373 - OKITA; Kyoko | 2014-10-23 |
Silicon Carbide Substrate App 20140138709 - SASAKI; Makoto ;   et al. | 2014-05-22 |
Silicon Carbide Single-crystal Substrate And Method For Manufacturing Same App 20140073228 - OKITA; Kyoko ;   et al. | 2014-03-13 |
Method For Manufacturing Silicon Carbide Substrate App 20140030892 - HONKE; Tsubasa ;   et al. | 2014-01-30 |
Light-emitting device Grant 8,629,457 - Nishiguchi , et al. January 14, 2 | 2014-01-14 |
Silicon Carbide Single-crystal Substrate And Method For Manufacturing Same App 20130264584 - OKITA; Kyoko ;   et al. | 2013-10-10 |
Indium phosphide substrate manufacturing method, epitaxial wafer manufacturing method indium phosphide substrate, and epitaxial wafer Grant 8,487,409 - Okita July 16, 2 | 2013-07-16 |
Method for manufacturing silicon carbide substrate Grant 8,435,866 - Nishiguchi , et al. May 7, 2 | 2013-05-07 |
Method For Manufacturing Silicon Carbide Substrate And Method For Manufacturing Semiconductor Device App 20130109110 - Sasaki; Makoto ;   et al. | 2013-05-02 |
Indium Phosphide Substrate Manufacturing Method and Epitaxial Wafer Manufacturing Method App 20130109156 - Okita; Kyoko | 2013-05-02 |
Method Of Manufacturing Silicon Carbide Substrate And Method Of Manufacturing Silicon Carbide Semiconductor Device App 20130017683 - HONKE; Tsubasa ;   et al. | 2013-01-17 |
Semiconductor Device And Method For Manufacturing Same App 20130009171 - Harada; Shin ;   et al. | 2013-01-10 |
Method For Manufacturing Silicon Carbide Substrate App 20120325196 - OKITA; Kyoko ;   et al. | 2012-12-27 |
Method Of Manufacturing Silicon Carbide Substrate App 20120304839 - OKITA; Kyoko | 2012-12-06 |
Method For Manufacturing Combined Substrate Having Silicon Carbide Substrate App 20120276715 - Hori; Tsutomu ;   et al. | 2012-11-01 |
Method And Device For Manufacturing Silicon Carbide Substrate App 20120184113 - Inoue; Hiroki ;   et al. | 2012-07-19 |
Combined Substrate Having Silicon Carbide Substrate App 20120161158 - Hori; Tsutomu ;   et al. | 2012-06-28 |
Silicon Carbide Substrate App 20120161157 - Inoue; Hiroki ;   et al. | 2012-06-28 |
Method For Manufacturing Silicon Carbide Substrate, Method For Manufacturing Semiconductor Device, Silicon Carbide Substrate, And Semiconductor Device App 20120126251 - Sasaki; Makoto ;   et al. | 2012-05-24 |
Silicon Carbide Substrate App 20120091472 - Sasaki; Makoto ;   et al. | 2012-04-19 |
Silicon Carbide Ingot, Silicon Carbide Substrate, Manufacturing Method Thereof, Crucible, And Semiconductor Substrate App 20120070605 - Sasaki; Makoto ;   et al. | 2012-03-22 |
Method For Manufacturing Silicon Carbide Substrate App 20120017826 - Nishiguchi; Taro ;   et al. | 2012-01-26 |
Method For Manufacturing Semiconductor Substrate App 20120015499 - Sasaki; Makoto ;   et al. | 2012-01-19 |
Method For Manufacturing Silicon Carbide Substrate App 20120009761 - Nishiguchi; Taro ;   et al. | 2012-01-12 |
Method For Manufacturing Semiconductor Substrate App 20120003823 - Sasaki; Makoto ;   et al. | 2012-01-05 |
Method Of Manufacturing Semiconductor Substrate App 20120003812 - Sasaki; Makoto ;   et al. | 2012-01-05 |
Method Of Manufacturing Silicon Carbide Substrate App 20110306181 - Sasaki; Makoto ;   et al. | 2011-12-15 |
Silicon Carbide Substrate App 20110284873 - Nishiguchi; Taro ;   et al. | 2011-11-24 |
Method For Manufacturing Silicon Carbide Substrate, Method For Manufacturing Semiconductor Device, Silicon Carbide Substrate, And Semiconductor Device App 20110278594 - NISHIGUCHI; Taro ;   et al. | 2011-11-17 |
Method For Manufacturing Silicon Carbide Substrate, Method For Manufacturing Semiconductor Device, Silicon Carbide Substrate, And Semiconductor Device App 20110278593 - Nishiguchi; Taro ;   et al. | 2011-11-17 |
Method For Manufacturing Silicon Carbide Substrate, Method For Manufacturing Semiconductor Device, Silicon Carbide Substrate, And Semiconductor Device App 20110278595 - Nishiguchi; Taro ;   et al. | 2011-11-17 |
Semiconductor Substrate App 20110233561 - NISHIGUCHI; Taro ;   et al. | 2011-09-29 |
Method For Manufacturing Silicon Carbide Substrate App 20110198027 - NISHIGUCHI; Taro ;   et al. | 2011-08-18 |
Indium Phosphide Substrate Manufacturing Method, Epitaxial Wafer Manufacturing Method, Indium Phosphide Substrate, and Epitaxial Wafer App 20110193196 - Okita; Kyoko | 2011-08-11 |
Light-emitting Device App 20110175108 - Nishiguchi; Taro ;   et al. | 2011-07-21 |
Silicon Carbide Substrate App 20110175107 - NISHIGUCHI; Taro ;   et al. | 2011-07-21 |
Inspection method of compound semiconductor substrate, compound semiconductor substrate, surface treatment method of compound semiconductor substrate, and method of producing compound semiconductor crystal Grant 7,737,043 - Nishiura , et al. June 15, 2 | 2010-06-15 |
Inspection method of compound semiconductor substrate, compound semiconductor substrate, surface treatment method of compound semiconductor substrate, and method of producing compound semiconductor crystal App 20070269989 - Nishiura; Takayuki ;   et al. | 2007-11-22 |
Surface treatment method of compound semiconductor substrate, fabrication method of compound semiconductor, compound semiconductor substrate, and semiconductor wafer App 20070207630 - Nishiura; Takayuki ;   et al. | 2007-09-06 |