| Patent | Date |
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Position measuring method, position measuring apparatus, and semiconductor device manufacturing method
Grant 10,599,056 - Toshima , et al. | 2020-03-24 |
Position Measuring Method, Position Measuring Apparatus, And Semiconductor Device Manufacturing Method
App 20200081357 - Toshima; Miki ; et al. | 2020-03-12 |
Imprint device and pattern forming method
Grant 9,952,505 - Okamoto , et al. April 24, 2 | 2018-04-24 |
Pattern accuracy detecting apparatus and processing system
Grant 9,941,177 - Kasa , et al. April 10, 2 | 2018-04-10 |
Positional deviation measuring device, non-transitory computer-readable recording medium containing a positional deviation measuring program, and method of manufacturing semiconductor device
Grant 9,784,573 - Sato , et al. October 10, 2 | 2017-10-10 |
Pattern Accuracy Detecting Apparatus And Processing System
App 20170271214 - KASA; Kentaro ; et al. | 2017-09-21 |
Illumination Method, And Illumination Device
App 20160330815 - NAKAGAWA; Seiji ; et al. | 2016-11-10 |
Positional Deviation Measuring Device, Non-transitory Computer-readable Recording Medium Containing A Positional Deviation Measuring Program, And Method Of Manufacturing Semiconductor Device
App 20160245645 - SATO; Hidenori ; et al. | 2016-08-25 |
Method for measuring pattern misalignment
Grant 9,244,365 - Okamoto , et al. January 26, 2 | 2016-01-26 |
EUV mask
Grant 9,146,458 - Hagio , et al. September 29, 2 | 2015-09-29 |
Imprint Device And Pattern Forming Method
App 20150251350 - OKAMOTO; Yosuke ; et al. | 2015-09-10 |
Measurement mark, method for measurement, and measurement apparatus
Grant 8,976,356 - Komine , et al. March 10, 2 | 2015-03-10 |
Exposure apparatus, exposure method, and method of manufacturing semiconductor device
Grant 8,953,163 - Kasa , et al. February 10, 2 | 2015-02-10 |
Mask Distortion Measuring Apparatus And Method Of Measuring Mask Distortion
App 20150009488 - OKAMOTO; Yosuke ; et al. | 2015-01-08 |
Dose-data generating apparatus
Grant 8,914,766 - Okamoto , et al. December 16, 2 | 2014-12-16 |
Exposure Method, Reflection Type Mask, And Semiconductor Device Manufacturing Method
App 20140349219 - MIZUNO; Hiroyuki ; et al. | 2014-11-27 |
Pattern forming method, positional deviation measuring method and photomask
Grant 8,859,167 - Hagio , et al. October 14, 2 | 2014-10-14 |
Method For Measuring Pattern Misalignment
App 20140285652 - OKAMOTO; Yosuke ; et al. | 2014-09-25 |
Exposure System And Exposure Method
App 20140285787 - YONEDA; Eiji ; et al. | 2014-09-25 |
Method for making correction map of dose amount, exposure method, and method for manufacturing semiconductor device
Grant 8,832,607 - Koike , et al. September 9, 2 | 2014-09-09 |
Measurement Mark, Method For Measurement, And Measurement Apparatus
App 20140240704 - KOMINE; Nobuhiro ; et al. | 2014-08-28 |
Electrostatic Chuck, Reticle, And Electrostatic Chuck Method
App 20140240892 - OKAMOTO; Yosuke ; et al. | 2014-08-28 |
Mask and method for fabricating semiconductor device
Grant 8,790,851 - Okamoto , et al. July 29, 2 | 2014-07-29 |
Photomask and method for manufacturing the same
Grant 8,778,570 - Okuda , et al. July 15, 2 | 2014-07-15 |
Euv Exposure Apparatus, Euv Mask, And Method Of Measuring Distortion
App 20140192335 - HAGIO; Yoshinori ; et al. | 2014-07-10 |
Patterning Method And Template
App 20140061969 - OKAMOTO; Yosuke ; et al. | 2014-03-06 |
Exposure Apparatus, Exposure Method, And Method Of Manufacturing Semiconductor Device
App 20140065528 - KASA; Kentaro ; et al. | 2014-03-06 |
Pattern Forming Method, Positional Deviation Measuring Method And Photomask
App 20140065522 - HAGIO; Yoshinori ; et al. | 2014-03-06 |
Dose-data Generating Apparatus
App 20130298087 - Okamoto; Yosuke ; et al. | 2013-11-07 |
Mask And Method For Fabricating Semiconductor Device
App 20130252429 - OKAMOTO; Yosuke ; et al. | 2013-09-26 |
Method For Making Correction Map Of Dose Amount, Exposure Method, And Method For Manufacturing Semiconductor Device
App 20130252176 - KOIKE; Takashi ; et al. | 2013-09-26 |
Dose-data generating apparatus, dose-data generating method, and manufacturing method of semiconductor device
Grant 8,504,951 - Okamoto , et al. August 6, 2 | 2013-08-06 |
Overlay Measuring Method
App 20130148120 - OKAMOTO; Yosuke ; et al. | 2013-06-13 |
Unevenness inspection method, method for manufacturing display panel, and unevenness inspection apparatus
Grant 8,320,658 - Tanizaki , et al. November 27, 2 | 2012-11-27 |
Photomask And Method For Manufacturing The Same
App 20120225374 - OKUDA; Kentaro ; et al. | 2012-09-06 |
Dose-data Generating Apparatus, Dose-data Generating Method, And Manufacturing Method Of Semiconductor Device
App 20120066653 - OKAMOTO; Yosuke ; et al. | 2012-03-15 |
X-ray CT apparatus and image processing apparatus
Grant 7,953,263 - Okamoto , et al. May 31, 2 | 2011-05-31 |
Dentinogenesis Promoter And Dentinogenic Pulp-capping Material
App 20100183563 - Kuboki; Takuo ; et al. | 2010-07-22 |
Method for estimating scattered ray intensity in X-ray CT and X-ray CT apparatus
Grant 7,609,803 - Okamoto , et al. October 27, 2 | 2009-10-27 |
Power supply circuit structure comprising a current sensor, and method of assembling the same
Grant 7,538,448 - Yoshida , et al. May 26, 2 | 2009-05-26 |
Method For Estimating Scattered Ray Intensity In X-ray Ct And X-ray Ct Apparatus
App 20090092222 - OKAMOTO; Yosuke ; et al. | 2009-04-09 |
Device for transmitting speech information
Grant 7,457,741 - Nakagawa , et al. November 25, 2 | 2008-11-25 |
Unevenness Inspection Method, Method For Manufacturing Display Panel, And Unevenness Inspection Apparatus
App 20080063254 - Tanizaki; Hiroyuki ; et al. | 2008-03-13 |
Power supply circuit structure comprising a current sensor, and method of assembling the same
App 20070285864 - Yoshida; Noriyuki ; et al. | 2007-12-13 |
X-ray Ct Apparatus And Image Processing Apparatus
App 20070230653 - OKAMOTO; Yosuke ; et al. | 2007-10-04 |
Device for transmitting speech information
App 20050222845 - Nakagawa, Seiji ; et al. | 2005-10-06 |
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