OKADA; Takaya

Patent Applications and Registrations

Patent applications and USPTO patent grants for OKADA; Takaya.The latest application filed is for "projection optical system, exposure apparatus, and exposure method".

Company Profile

0.5.13

OKADA; Takaya - Kumagaya-shi JP
Okada; Takaya - Kumagaya JP
Okada; Takaya - Tokyo N/A JP
Okada; Takaya - Saitama-ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Projection Optical System, Exposure Apparatus, And Exposure Method App 20180052398 - OMURA; Yasuhiro ; et al.	2018-02-22
Projection optical system, exposure apparatus, and exposure method Grant 9,891,539 - Omura , et al. February 13, 2	2018-02-13
Projection Optical System, Exposure Apparatus, And Exposure Method App 20160252825 - OMURA; Yasuhiro ; et al.	2016-09-01
Projection optical system, exposure apparatus, and exposure method Grant 9,360,763 - Omura , et al. June 7, 2	2016-06-07
Projection optical system, exposure apparatus, and exposure method Grant 9,310,696 - Omura , et al. April 12, 2	2016-04-12
Projection Optical System, Exposure Apparatus, And Exposure Method App 20150029476 - OMURA; Yasuhiro ; et al.	2015-01-29
Projection Optical System, Exposure Apparatus, And Exposure Method App 20150029482 - OMURA; Yasuhiro ; et al.	2015-01-29
Projection optical system, exposure apparatus, and exposure method Grant 8,854,601 - Omura , et al. October 7, 2	2014-10-07
Projection Optical System, Exposure Apparatus, And Exposure Method App 20130194560 - OMURA; Yasuhiro ; et al.	2013-08-01
Maintenance Method, Exposure Method, Exposure Apparatus, and Method for Producing Device App 20120307220 - NAGASAKA; Hiroyuki ; et al.	2012-12-06
Projection Optical System, Exposure Apparatus, And Exposure Method App 20120002186 - Omura; Yasuhiro ; et al.	2012-01-05
Optical Element, Optical Element Holding Device, Exposure Apparatus, And Device Manufacturing Method App 20100033700 - Okada; Takaya ; et al.	2010-02-11
Projection optical system, exposure apparatus, and exposure method App 20090046268 - Omura; Yasuhiro ; et al.	2009-02-19
Optical Element Holding Apparatus, Barrel, Exposure Apparatus And Device Manufacturing Method App 20080291555 - OKADA; Takaya	2008-11-27
Exposure Apparatus, Exposure Method, and Device Manufacturing Method App 20080192222 - Okada; Takaya	2008-08-14
Exposure Apparatus and Device Manufacturing Method App 20080106718 - Okada; Takaya ; et al.	2008-05-08
Maintenance Method, Exposure Method, Exposure Apparatus, And Method For Producing Device App 20070285634 - Nagasaka; Hiroyuki ; et al.	2007-12-13

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