| Patent | Date |
|---|
EFEM and method of introducing replacement gas thereinto
Grant 11,145,529 - Okabe , et al. October 12, 2 | 2021-10-12 |
EFEM and method of introducing dry air thereinto
Grant 11,133,208 - Okabe September 28, 2 | 2021-09-28 |
Circulating Efem
App 20210287918 - IGARASHI; Hiroshi ; et al. | 2021-09-16 |
Circulating EFEM
Grant 11,049,736 - Igarashi , et al. June 29, 2 | 2021-06-29 |
Controlling method for a wafer transportation part and a load port part on an EFEM
Grant 10,566,227 - Okabe , et al. Feb | 2020-02-18 |
Circulating Efem
App 20190341273 - IGARASHI; Hiroshi ; et al. | 2019-11-07 |
Mini-environment apparatus
Grant 10,340,157 - Okabe , et al. | 2019-07-02 |
Efem
Grant 10,304,702 - Okabe , et al. | 2019-05-28 |
Efem And Method Of Introducing Dry Air Thereinto
App 20190013227 - OKABE; Tsutomu | 2019-01-10 |
Efem And Method Of Introducing Replacement Gas Thereinto
App 20180350647 - OKABE; Tsutomu ; et al. | 2018-12-06 |
Load port device and cleaning gas introducing method into a container on a load port
Grant 10,090,182 - Okabe , et al. October 2, 2 | 2018-10-02 |
Mini-environment Apparatus
App 20170170033 - OKABE; Tsutomu ; et al. | 2017-06-15 |
Load Port Device And Cleaning Gas Introducing Method Into A Container On A Load Port
App 20170170045 - OKABE; Tsutomu ; et al. | 2017-06-15 |
Controling Method For A Wafer Transportation Part And A Load Port Part On An Efem
App 20170170044 - OKABE; Tsutomu ; et al. | 2017-06-15 |
Efem
App 20170170042 - OKABE; Tsutomu ; et al. | 2017-06-15 |
Load port apparatus and clamping device to be used for the same
Grant 9,401,295 - Okabe , et al. July 26, 2 | 2016-07-26 |
Lid opening/closing system for closed container and substrate processing method using same
Grant 9,349,627 - Okabe , et al. May 24, 2 | 2016-05-24 |
Substrate storage pod and lid member thereof, and processing apparatus for a substrate
Grant 8,893,753 - Okabe , et al. November 25, 2 | 2014-11-25 |
Substrate storage pod and lid opening/closing system for the same
Grant 8,876,173 - Igarashi , et al. November 4, 2 | 2014-11-04 |
Lid opening/closing system for closed container
Grant 8,657,346 - Okabe , et al. February 25, 2 | 2014-02-25 |
Closed container and lid opening/closing system therefor
Grant 8,528,947 - Igarashi , et al. September 10, 2 | 2013-09-10 |
Substrate storage pod with replacement function of clean gas
Grant 8,522,836 - Okabe , et al. September 3, 2 | 2013-09-03 |
Lid opening/closing system of an airtight container
Grant 8,413,693 - Okabe April 9, 2 | 2013-04-09 |
Lid opening/closing system of an airtight container
Grant 8,375,998 - Okabe February 19, 2 | 2013-02-19 |
Load Port Apparatus And Clamping Device To Be Used For The Same
App 20130028688 - OKABE; Tsutomu ; et al. | 2013-01-31 |
Closed container and lid opening/closing system therefor
Grant 8,322,759 - Okabe , et al. December 4, 2 | 2012-12-04 |
Method of processing an object in a container and lid opening/closing system used in the method
Grant 8,302,637 - Okabe , et al. November 6, 2 | 2012-11-06 |
Lid Opening/closing System Of An Airtight Container
App 20120261031 - OKABE; Tsutomu | 2012-10-18 |
Contained object transfer system
Grant 8,186,927 - Okabe , et al. May 29, 2 | 2012-05-29 |
Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus
Grant 8,171,964 - Okabe May 8, 2 | 2012-05-08 |
Lid Opening/closing System Of An Airtight Container
App 20120060972 - OKABE; Tsutomu | 2012-03-15 |
Lid opening/closing system of an airtight container
Grant 8,082,955 - Okabe December 27, 2 | 2011-12-27 |
Contained object transfer system
Grant 8,083,456 - Okabe , et al. December 27, 2 | 2011-12-27 |
Gas replacement system
Grant 8,061,738 - Okabe , et al. November 22, 2 | 2011-11-22 |
Substrate Storage Pod And Lid Opening/closing System For The Same
App 20110215028 - Igarashi; Hiroshi ; et al. | 2011-09-08 |
Substrate Storage Pod With Replacement Function Of Clean Gas
App 20110210041 - OKABE; Tsutomu ; et al. | 2011-09-01 |
Substrate Storage Pod And Lid Member Thereof, And Processing Apparatus For A Substrate
App 20110210042 - OKABE; Tsutomu ; et al. | 2011-09-01 |
Lid opening/closing system of an airtight container
Grant 7,841,371 - Okabe November 30, 2 | 2010-11-30 |
Lid Opening/closing System For Closed Container And Substrate Processing Method Using Same
App 20100290888 - Okabe; Tsutomu ; et al. | 2010-11-18 |
Lid opening/closing system for closed container and substrate processing method using same
Grant 7,789,609 - Okabe , et al. September 7, 2 | 2010-09-07 |
Lid Opening/closing System Of An Airtight Container
App 20100212775 - OKABE; Tsutomu | 2010-08-26 |
Lid Opening/closing System For Closed Container
App 20100133270 - Okabe; Tsutomu ; et al. | 2010-06-03 |
Lid opening/closing system of an airtight container
Grant 7,726,353 - Okabe June 1, 2 | 2010-06-01 |
Closed Container And Lid Opening/closing System Therefor
App 20100117377 - OKABE; Tsutomu ; et al. | 2010-05-13 |
Closed Container And Lid Opening/closing System Therefor
App 20100059408 - IGARASHI; Hiroshi ; et al. | 2010-03-11 |
Wafer processing apparatus having dust proof function
Grant 7,670,095 - Okabe , et al. March 2, 2 | 2010-03-02 |
Contained Object Transfer System
App 20090297298 - Okabe; Tsutomu ; et al. | 2009-12-03 |
Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
Grant 7,621,714 - Miyajima , et al. November 24, 2 | 2009-11-24 |
Wafer processing apparatus having dust proof function
Grant 7,614,840 - Okabe , et al. November 10, 2 | 2009-11-10 |
Wafer processing apparatus having dust proof function
Grant 7,607,880 - Okabe , et al. October 27, 2 | 2009-10-27 |
Apparatus And Method For Opening/closing Lid Of Closed Container, Gas Replacement Apparatus Using Same, And Load Port Apparatus
App 20090245978 - Okabe; Tsutomu | 2009-10-01 |
Nterface Seal
App 20090218773 - Okabe; Tsutomu ; et al. | 2009-09-03 |
Contained Object Transfer System
App 20090175709 - OKABE; TSUTOMU ; et al. | 2009-07-09 |
Wafer processing apparatus having dust proof function
Grant 7,537,425 - Okabe , et al. May 26, 2 | 2009-05-26 |
Lid Opening/closing System For Closed Container And Substrate Processing Method Using Same
App 20090035099 - Okabe; Tsutomu ; et al. | 2009-02-05 |
Method Of Processing An Object In A Container And Lid Opening/closing System Used In The Method
App 20090035100 - OKABE; Tsutomu ; et al. | 2009-02-05 |
Wafer detecting device
Grant 7,379,174 - Miyajima , et al. May 27, 2 | 2008-05-27 |
Wafer processing apparatus including clean box stopping mechanism
Grant 7,360,985 - Okabe , et al. April 22, 2 | 2008-04-22 |
Interface Seal
App 20070210533 - Okabe; Tsutomu ; et al. | 2007-09-13 |
Lid Opening/closing System Of An Airtight Container
App 20070151620 - OKABE; Tsutomu | 2007-07-05 |
Lid Opening/closing System Of An Airtight Container
App 20070151619 - OKABE; Tsutomu | 2007-07-05 |
Purge System For A Product Container And Table For Use In The Purge System
App 20060288664 - Okabe; Tsutomu ; et al. | 2006-12-28 |
Wafer detecting device
App 20060087661 - Miyajima; Toshihiko ; et al. | 2006-04-27 |
Wafer processing apparatus capable of mapping wafers
Grant 6,984,839 - Igarashi , et al. January 10, 2 | 2006-01-10 |
Load port for clean system
App 20050265812 - Suzuki, Hitoshi ; et al. | 2005-12-01 |
Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
App 20050095098 - Miyajima, Toshihiko ; et al. | 2005-05-05 |
Load port mounting mechanism
Grant 6,883,770 - Miyajima , et al. April 26, 2 | 2005-04-26 |
Wafer processing apparatus having dust proof function
App 20040187793 - Okabe, Tsutomu ; et al. | 2004-09-30 |
Clean box, clean transfer method and system
Grant 6,796,763 - Miyajima , et al. September 28, 2 | 2004-09-28 |
Wafer processing apparatus having dust proof function
App 20040146378 - Okabe, Tsutomu ; et al. | 2004-07-29 |
Wafer processing apparatus having dust proof function
App 20040127028 - Okabe, Tsutomu ; et al. | 2004-07-01 |
Wafer processing apparatus including clean box stopping mechanism
App 20040127029 - Okabe, Tsutomu ; et al. | 2004-07-01 |
Wafer processing apparatus including clean box stopping mechanism
App 20040127048 - Okabe, Tsutomu ; et al. | 2004-07-01 |
Wafer processing apparatus capable of mapping wafers
App 20040099826 - Igarashi, Hiroshi ; et al. | 2004-05-27 |
Wafer processing apparatus capable of mapping wafers
App 20040099824 - Igarashi, Hiroshi ; et al. | 2004-05-27 |
Clean box, clean transfer method and system
App 20040035493 - Miyajima, Toshihiko ; et al. | 2004-02-26 |
Clean box, clean transfer method and system
Grant 6,641,349 - Miyajima , et al. November 4, 2 | 2003-11-04 |
Inspection data analyzing system
Grant 6,628,817 - Ishikawa , et al. September 30, 2 | 2003-09-30 |
Container and method for sealing the container
Grant 6,390,145 - Okabe , et al. May 21, 2 | 2002-05-21 |
Inspection data analyzing system
App 20020034326 - Ishikawa, Seiji ; et al. | 2002-03-21 |
Lid latch mechanism for clean box
Grant 6,338,604 - Okabe , et al. January 15, 2 | 2002-01-15 |
Inspection data analyzing system
App 20010038708 - Ishikawa, Seiji ; et al. | 2001-11-08 |
Inspection data analyzing system
App 20010001015 - Ishikawa, Seiji ; et al. | 2001-05-10 |
Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device
Grant 6,185,322 - Ishikawa , et al. February 6, 2 | 2001-02-06 |
Semiconductor integrated circuit device fabrication method and its fabrication apparatus
Grant 5,497,331 - Iriki , et al. March 5, 1 | 1996-03-05 |
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