Okabe; Takafumi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Okabe; Takafumi.The latest application filed is for "method and apparatus for inspecting pattern defects".

Company Profile

1.30.33

Okabe; Takafumi - Yokohama N/A JP
Okabe; Takafumi - Tokyo JP
Okabe, Takafumi - Yakohama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for inspecting pattern defects Grant 8,639,019 - Sakai , et al. January 28, 2	2014-01-28
Method And Apparatus For Inspecting Pattern Defects App 20130004057 - SAKAI; Kaoru ; et al.	2013-01-03
Method and apparatus for inspecting pattern defects Grant 8,275,190 - Sakai , et al. September 25, 2	2012-09-25
Method and apparatus for inspecting a pattern formed on a substrate Grant 8,253,934 - Yoshida , et al. August 28, 2	2012-08-28
Pattern Inspection Method And Its Apparatus App 20120076396 - SAKAI; Kaoru ; et al.	2012-03-29
Pattern inspection method and its apparatus Grant 8,090,187 - Sakai , et al. January 3, 2	2012-01-03
Method And Apparatus For Inspecting Pattern Defects App 20110304725 - SAKAI; Kaoru ; et al.	2011-12-15
Method and apparatus for inspecting pattern defects Grant 8,005,292 - Sakai , et al. August 23, 2	2011-08-23
Pattern inspection method and its apparatus Grant 7,949,178 - Sakai , et al. May 24, 2	2011-05-24
Method and apparatus for inspecting pattern defects Grant 7,903,249 - Yoshida , et al. March 8, 2	2011-03-08
Inspection method and its apparatus, inspection system Grant 7,869,966 - Okabe , et al. January 11, 2	2011-01-11
Method And Apparatus For Inspecting Pattern Defects App 20100328446 - SAKAI; Kaoru ; et al.	2010-12-30
Method and apparatus for inspecting pattern defects Grant 7,792,352 - Sakai , et al. September 7, 2	2010-09-07
Pattern Inspection Method And Its Apparatus App 20100172570 - SAKAI; Kaoru ; et al.	2010-07-08
Pattern inspection method and its apparatus Grant 7,711,178 - Sakai , et al. May 4, 2	2010-05-04
Method And Apparatus For Inspecting A Pattern Formed On A Substrate App 20100104173 - Yoshida; Minoru ; et al.	2010-04-29
Method and apparatus for inspecting a pattern formed on a substrate Grant 7,646,477 - Yoshida , et al. January 12, 2	2010-01-12
Pattern Inspection Method And Its Apparatus App 20090226076 - Sakai; Kaoru ; et al.	2009-09-10
Pattern Inspection Method And Its Apparatus App 20090169093 - Sakai; Kaoru ; et al.	2009-07-02
Method And Apparatus For Inspecting Pattern Defects App 20090153840 - Yoshida; Minoru ; et al.	2009-06-18
Method of inspecting defects Grant 7,508,973 - Okabe , et al. March 24, 2	2009-03-24
Method and apparatus for inspecting pattern defects Grant 7,489,395 - Yoshida , et al. February 10, 2	2009-02-10
Pattern inspection method and its apparatus App 20090003682 - Sakai; Kaoru ; et al.	2009-01-01
Pattern inspection method and its apparatus Grant 7,433,508 - Sakai , et al. October 7, 2	2008-10-07
Method And Apparatus For Inspecting Pattern Defects App 20080232674 - Sakai; Kaoru ; et al.	2008-09-25
Method and apparatus for inspecting pattern defects Grant 7,388,979 - Sakai , et al. June 17, 2	2008-06-17
Method and apparatus for inspecting defects and a system for inspecting defects Grant 7,372,561 - Shibata , et al. May 13, 2	2008-05-13
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections Grant 7,333,677 - Sakai , et al. February 19, 2	2008-02-19
Method and apparatus for inspecting defects Grant 7,330,248 - Sakai , et al. February 12, 2	2008-02-12
Pattern Inspection Method And Its Apparatus App 20080031511 - Sakai; Kaoru ; et al.	2008-02-07
Image Alignment Method, Comparative Inspection Method, and Comparative Inspection Device for Comparative Inspections App 20070133863 - Sakai; Kaoru ; et al.	2007-06-14
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections App 20070036422 - Sakai; Kaoru ; et al.	2007-02-15
Method and apparatus for inspecting pattern defects App 20070002318 - Yoshida; Minoru ; et al.	2007-01-04
Defect detection method and its apparatus Grant 7,142,708 - Sakai , et al. November 28, 2	2006-11-28
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections Grant 7,127,126 - Sakai , et al. October 24, 2	2006-10-24
Method and apparatus for inspecting pattern defects Grant 7,110,105 - Yoshida , et al. September 19, 2	2006-09-19
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections Grant 7,020,350 - Sakai , et al. March 28, 2	2006-03-28
Method and apparatus for inspecting defects and a system for inspecting defects App 20050264802 - Shibata, Yukihiro ; et al.	2005-12-01
Method and apparatus for inspecting pattern defects App 20050264800 - Yoshida, Minoru ; et al.	2005-12-01
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections App 20050220333 - Sakai, Kaoru ; et al.	2005-10-06
Method and apparatus for inspecting a pattern formed on a substrate App 20050206888 - Yoshida, Minoru ; et al.	2005-09-22
Method and apparatus for inspecting pattern defects Grant 6,927,847 - Yoshida , et al. August 9, 2	2005-08-09
Method and apparatus for inspecting defects App 20050168730 - Sakai, Kaoru ; et al.	2005-08-04
Method and apparatus for inspecting pattern defects App 20050147287 - Sakai, Kaoru ; et al.	2005-07-07
Method and apparatus for inspecting a pattern formed on a substrate Grant 6,900,888 - Yoshida , et al. May 31, 2	2005-05-31
Method and apparatus for inspecting defects Grant 6,879,392 - Sakai , et al. April 12, 2	2005-04-12
Inspection method and its apparatus, inspection system App 20050033538 - Okabe, Takafumi ; et al.	2005-02-10
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data Grant 6,841,403 - Tanaka , et al. January 11, 2	2005-01-11
Pattern inspection method and its apparatus App 20040240723 - Sakai, Kaoru ; et al.	2004-12-02
Method of inspecting defects App 20040228515 - Okabe, Takafumi ; et al.	2004-11-18
Inspection method and its apparatus, inspection system Grant 6,799,130 - Okabe , et al. September 28, 2	2004-09-28
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data Grant 6,797,526 - Tanaka , et al. September 28, 2	2004-09-28
Method and apparatus for inspecting a pattern formed on a substrate App 20040124363 - Yoshida, Minoru ; et al.	2004-07-01
Pattern inspection method and its apparatus App 20030179921 - Sakai, Kaoru ; et al.	2003-09-25
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data App 20030138978 - Tanaka, Maki ; et al.	2003-07-24
Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data App 20030054573 - Tanaka, Maki ; et al.	2003-03-20
Method and apparatus for inspecting pattern defects App 20030048439 - Yoshida, Minoru ; et al.	2003-03-13
Inspection method and its apparatus, inspection system App 20030050761 - Okabe, Takafumi ; et al.	2003-03-13
Method and apparatus for inspecting defects App 20030025904 - Sakai, Kaoru ; et al.	2003-02-06
Defect detection method and its apparatus App 20030021462 - Sakai, Kaoru ; et al.	2003-01-30
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections App 20010053245 - Sakai, Kaoru ; et al.	2001-12-20
Three-dimensional vision system Grant 4,731,853 - Hata , et al. March 15, 1	1988-03-15