Patent | Date |
---|
Laser irradiation method and laser irradiation apparatus Grant 10,369,658 - Tanaka , et al. | 2019-08-06 |
Laser Irradiation Method And Laser Irradiation Apparatus App 20160311057 - TANAKA; Koichiro ;   et al. | 2016-10-27 |
Laser irradiation method and laser irradiation apparatus Grant 9,387,553 - Tanaka , et al. July 12, 2 | 2016-07-12 |
Laser irradiation apparatus and manufacturing method of semiconductor device Grant 8,891,170 - Tanaka , et al. November 18, 2 | 2014-11-18 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 8,670,641 - Tanaka , et al. March 11, 2 | 2014-03-11 |
Method for manufacturing semiconductor device Grant 8,580,700 - Tanaka , et al. November 12, 2 | 2013-11-12 |
Photomask Grant 8,512,917 - Shishido , et al. August 20, 2 | 2013-08-20 |
Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device Grant 8,455,790 - Tanaka , et al. June 4, 2 | 2013-06-04 |
Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method Grant 8,426,324 - Tanaka , et al. April 23, 2 | 2013-04-23 |
Beam Homogenizer, Laser Irradiation Apparatus, And Method For Manufacturing Semiconductor Device App 20130084691 - TANAKA; Koichiro ;   et al. | 2013-04-04 |
Manufacturing method of semiconductor device and laser processing apparatus Grant 8,372,762 - Oishi , et al. February 12, 2 | 2013-02-12 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 8,326,102 - Tanaka , et al. December 4, 2 | 2012-12-04 |
Method for manufacturing semiconductor device and laser irradiation apparatus Grant 8,309,443 - Tanaka , et al. November 13, 2 | 2012-11-13 |
Laser Irradiation Method And Laser Irradiation Apparatus App 20110304920 - TANAKA; Koichiro ;   et al. | 2011-12-15 |
Photomask App 20110269060 - Shishido; Hideaki ;   et al. | 2011-11-03 |
Laser irradiation method and laser irradiation apparatus Grant 8,045,271 - Tanaka , et al. October 25, 2 | 2011-10-25 |
Laser Irradiation Apparatus And Manufacturing Method Of Semiconductor Device App 20110255172 - TANAKA; Koichiro ;   et al. | 2011-10-20 |
Laser irradiation apparatus and manufacturing method of semiconductor device Grant 8,000,016 - Tanaka , et al. August 16, 2 | 2011-08-16 |
Manufacturing Method Of Memory Element, Laser Irradiation Apparatus, And Laser Irradiation Method App 20110183500 - TANAKA; Koichiro ;   et al. | 2011-07-28 |
Beam Homogenizer, Laser Irradiation Apparatus, And Method For Manufacturing Semiconductor Device App 20110170198 - TANAKA; Koichiro ;   et al. | 2011-07-14 |
Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method Grant 7,940,441 - Tanaka , et al. May 10, 2 | 2011-05-10 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 7,916,987 - Tanaka , et al. March 29, 2 | 2011-03-29 |
Manufacturing Method of Semiconductor Device and Laser Processing Apparatus App 20100301026 - Oishi; Hirotada ;   et al. | 2010-12-02 |
Method for manufacturing display device Grant 7,807,483 - Yamazaki , et al. October 5, 2 | 2010-10-05 |
Manufacturing method of semiconductor device and laser processing apparatus Grant 7,732,351 - Oishi , et al. June 8, 2 | 2010-06-08 |
Method For Manufacturing Semiconductor Device And Laser Irradiation Apparatus App 20100048036 - TANAKA; Koichiro ;   et al. | 2010-02-25 |
Laser Irradiation Method And Laser Irradiation Apparatus App 20090291569 - Tanaka; Koichiro ;   et al. | 2009-11-26 |
Method for manufacturing semiconductor device and laser irradiation apparatus Grant 7,618,882 - Tanaka , et al. November 17, 2 | 2009-11-17 |
Laser irradiation method and laser irradiation apparatus Grant 7,595,932 - Tanaka , et al. September 29, 2 | 2009-09-29 |
Laser irradiation apparatus, method of laser irradiation, and method for manufacturing semiconductor device Grant 7,532,378 - Tanaka , et al. May 12, 2 | 2009-05-12 |
Method for manufacturing a semiconductor device and laser irradiation method and laser irradiation apparatus Grant 7,524,712 - Tanaka , et al. April 28, 2 | 2009-04-28 |
Beam homogenizer and laser irradiation apparatus Grant 7,486,856 - Tanaka , et al. February 3, 2 | 2009-02-03 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device App 20080267245 - Tanaka; Koichiro ;   et al. | 2008-10-30 |
Method for manufacturing display device App 20080227232 - Yamazaki; Shunpei ;   et al. | 2008-09-18 |
Laser irradiation apparatus and method of manufacturing semiconductor device Grant 7,405,114 - Oishi July 29, 2 | 2008-07-29 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device Grant 7,387,954 - Tanaka , et al. June 17, 2 | 2008-06-17 |
Manufacturing Method of Semiconductor Device and Laser Processing Apparatus App 20080076267 - Oishi; Hirotada ;   et al. | 2008-03-27 |
Method for manufacturing semiconductor device App 20070197049 - Tanaka; Koichiro ;   et al. | 2007-08-23 |
Laser irradiation apparatus, method of laser irradiation, and method for manufacturing semiconductor device App 20070195834 - Tanaka; Koichiro ;   et al. | 2007-08-23 |
Method for manufacturing a semiconductor device and laser irradiation method and laser irradiation apparatus App 20070184590 - Tanaka; Koichiro ;   et al. | 2007-08-09 |
Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method App 20070184639 - Tanaka; Koichiro ;   et al. | 2007-08-09 |
Laser irradiation apparatus, laser irradiation method, and manufacturing method of semiconductor device App 20070138151 - Tanaka; Koichiro ;   et al. | 2007-06-21 |
Laser irradiation apparatus and manufacturing method of semiconductor device App 20070091978 - Tanaka; Koichiro ;   et al. | 2007-04-26 |
Optical component and laser irradiation apparatus Grant 7,187,507 - Oishi , et al. March 6, 2 | 2007-03-06 |
Method for manufacturing semiconductor device and laser irradiation apparatus App 20060246693 - Tanaka; Koichiro ;   et al. | 2006-11-02 |
Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device App 20060072877 - Tanaka; Koichiro ;   et al. | 2006-04-06 |
Laser irradiation method and laser irradiation apparatus App 20050254395 - Tanaka, Koichiro ;   et al. | 2005-11-17 |
Beam homogenizer and laser irradiation apparatus App 20050213218 - Tanaka, Koichiro ;   et al. | 2005-09-29 |
Optical component and laser irradiation apparatus App 20040240086 - Oishi, Hirotada ;   et al. | 2004-12-02 |
Laser irradiation apparatus and method of manufacturing semiconductor device by using the laser irradiation apparatus App 20040074881 - Oishi, Hirotada | 2004-04-22 |