OIE; Manabu
Patent Applications and Registrations
Patent applications and USPTO patent grants for OIE; Manabu.The latest application filed is for "substrate processing method and substrate processing system".
- OIE; Manabu - Miyagi JP
- Oie; Manabu - Watervliet NY
- Oie; Manabu - Albany NY
| Patent | Date |
|---|---|
| Substrate Processing Method And Substrate Processing System App 20210287922 - MATSUDA; Risako ; et al. | 2021-09-16 |
| Method And Apparatus For Measuring Gas Flow App 20210263540 - Matsuda; Risako ; et al. | 2021-08-26 |
| Integration of a self-forming barrier layer and a ruthenium metal liner in copper metallization Grant 10,157,784 - Yu , et al. Dec | 2018-12-18 |
| Integration Of A Self-forming Barrier Layer And A Ruthenium Metal Liner In Copper Metallization App 20170236752 - Yu; Kai-Hung L. ; et al. | 2017-08-17 |
| Integration of ALD barrier layer and CVD Ru liner for void-free Cu filling Grant 9,607,888 - Yu , et al. March 28, 2 | 2017-03-28 |
| INTEGRATION OF ALD BARRIER LAYER AND CVD Ru LINER FOR VOID-FREE Cu FILLING App 20150221550 - Yu; Kai-Hung ; et al. | 2015-08-06 |
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