Patent | Date |
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Method For Evaluating Semiconductor Substrate App 20220285228 - OHTSUKI; Tsuyoshi | 2022-09-08 |
Anodic-oxidation equipment, anodic-oxidation method, and method for producing cathode of anodic-oxidation equipment Grant 11,248,306 - Ohtsuki , et al. February 15, 2 | 2022-02-15 |
Anodic-oxidation Equipment, Anodic-oxidation Method, And Method For Producing Cathode Of Anodic-oxidation Equipment App 20210238762 - OHTSUKI; Tsuyoshi ;   et al. | 2021-08-05 |
Silicon Single Crystal Substrate And Silicon Epitaxial Wafer For Solid-state Image Sensor And Solid-state Image Sensor App 20210159259 - ABE; Takao ;   et al. | 2021-05-27 |
Method for manufacturing semiconductor device and method for evaluating semiconductor device Grant 10,886,129 - Ohtsuki , et al. January 5, 2 | 2021-01-05 |
Method For Manufacturing Semiconductor Device And Method For Evaluating Semiconductor Device App 20190267239 - OHTSUKI; Tsuyoshi ;   et al. | 2019-08-29 |
Method for evaluating a semiconductor wafer Grant 9,935,021 - Ohtsuki April 3, 2 | 2018-04-03 |
Method for evaluating SOI substrate Grant 9,780,006 - Ohtsuki October 3, 2 | 2017-10-03 |
Method for evaluating semiconductor substrate Grant 9,748,151 - Ohtsuki , et al. August 29, 2 | 2017-08-29 |
Semiconductor substrate evaluating method, semiconductor substrate for evaluation, and semiconductor device Grant 9,696,368 - Ohtsuki July 4, 2 | 2017-07-04 |
Method For Evaluating Soi Substrate App 20170047258 - Ohtsuki; Tsuyoshi | 2017-02-16 |
Method For Evaluating Semiconductor Substrate App 20160365293 - OHTSUKI; Tsuyoshi ;   et al. | 2016-12-15 |
Semiconductor Substrate For Flash Lamp Anneal, Anneal Substrate, Semiconductor Device, And Method For Manufacturing Semiconductor Device App 20160351415 - OHTSUKI; Tsuyoshi ;   et al. | 2016-12-01 |
Method For Evaluating A Semiconductor Wafer App 20160079130 - OHTSUKI; Tsuyoshi | 2016-03-17 |
Semiconductor Substrate Evaluating Method, Semiconductor Substrate For Evaluation, And Semiconductor Device App 20150145551 - Ohtsuki; Tsuyoshi | 2015-05-28 |
Bonded substrate and manufacturing method thereof Grant 8,900,971 - Ohtsuki , et al. December 2, 2 | 2014-12-02 |
Method for manufacturing bonded substrate having an insulator layer in part of bonded substrate Grant 8,877,609 - Ohtsuki , et al. November 4, 2 | 2014-11-04 |
Method For Manufacturing Bonded Substrate Having An Insulator Layer In Part Of Bonded Substrate App 20140120695 - Ohtsuki; Tsuyoshi ;   et al. | 2014-05-01 |
Bonded Substrate And Manufacturing Method Thereof App 20130341763 - Ohtsuki; Tsuyoshi ;   et al. | 2013-12-26 |
Semiconductor substrate having multilayer film and method to reuse the substrate by delaminating a porous layer Grant 8,575,722 - Mitani , et al. November 5, 2 | 2013-11-05 |
Method for evaluating oxide dielectric breakdown voltage of a silicon single crystal wafer Grant 8,551,246 - Tahara , et al. October 8, 2 | 2013-10-08 |
Semiconductor Wafer Having Multilayer Film, Method For Producing The Same, And Method For Producing Semiconductor Device App 20110266655 - Mitani; Kiyoshi ;   et al. | 2011-11-03 |
Method for forming oxide film on silicon wafer Grant 8,043,871 - Ohtsuki , et al. October 25, 2 | 2011-10-25 |
Silicon Single Crystal Wafer And Method For Manufacturing Silicon Single Crystal Wafer, And Method For Evaluating Silicon Single Crystal Wafer App 20110045246 - Tahara; Fumio ;   et al. | 2011-02-24 |
Method For Forming Oxide Film On Silicon Wafer App 20110033958 - Ohtsuki; Tsuyoshi ;   et al. | 2011-02-10 |
Method for evaluating semiconductor wafer App 20100022038 - Ohtsuki; Tsuyoshi ;   et al. | 2010-01-28 |
Method for evaluating semiconductor wafer and apparatus for evaluating semiconductor wafer Grant 7,633,305 - Ohtsuki , et al. December 15, 2 | 2009-12-15 |
Apparatus for evaluating semiconductor wafer Grant 7,525,327 - Ohtsuki , et al. April 28, 2 | 2009-04-28 |
Method For Evaluating Soi Wafer App 20080054920 - Ohtsuki; Tsuyoshi ;   et al. | 2008-03-06 |
Method For Evaluating Semiconductor Wafer And Apparatus For Evaluating Semiconductor Wafer App 20070279080 - Ohtsuki; Tsuyoshi ;   et al. | 2007-12-06 |
Apparatus for Evaluating Semiconductor Wafer App 20070273397 - Ohtsuki; Tsuyoshi ;   et al. | 2007-11-29 |