Ohtani; Masami
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ohtani; Masami.The latest application filed is for "substrate processing apparatus and substrate processing method".
Company Profile
0.34.10
- Ohtani; Masami - Shimogyo-ku JP
- Ohtani; Masami - Kyoto JP
- Ohtani, Masami - Kyoto-shi JP
- Ohtani; Masami - Kuga JP
- Ohtani; Masami - Konan JP
- Ohtani; Masami - Higashimatsuyama JP
- Ohtani; Masami - Higashi-Matsuyama JP
Patent Activity
| Patent | Date |
|---|---|
| Multi-channel developer system Grant 8,127,713 - Britcher , et al. March 6, 2 | 2012-03-06 |
| Substrate processing apparatus with integrated cleaning unit Grant 8,031,324 - Fukutomi , et al. October 4, 2 | 2011-10-04 |
| Substrate Processing Apparatus And Substrate Processing Method App 20090014126 - Ohtani; Masami ; et al. | 2009-01-15 |
| Substrate Processing Apparatus With High Throughput Development Units App 20080212049 - Fukutomi; Yoshiteru ; et al. | 2008-09-04 |
| Substrate Processing Apparatus With Integrated Cleaning Unit App 20080198341 - Fukutomi; Yoshiteru ; et al. | 2008-08-21 |
| Substrate Processing Apparatus Including A Substrate Reversing Region App 20080196658 - Fukutomi; Yoshiteru ; et al. | 2008-08-21 |
| Substrate processing apparatus and substrate processing method App 20050204196 - Nishimura, Joichi ; et al. | 2005-09-15 |
| Substrate processing apparatus Grant 6,896,466 - Nishimura , et al. May 24, 2 | 2005-05-24 |
| Substrate processing apparatus Grant 6,790,286 - Nishimura , et al. September 14, 2 | 2004-09-14 |
| Substrate processing apparatus, substrate inspection method and substrate processing system Grant 6,790,287 - Shiga , et al. September 14, 2 | 2004-09-14 |
| Robot Grant 6,688,189 - Hashimoto , et al. February 10, 2 | 2004-02-10 |
| Substrate processing apparatus App 20030164181 - Ohtani, Masami | 2003-09-04 |
| Substrate processing apparatus, substrate inspection method and substrate procesing system App 20020189758 - Shiga, Masayoshi ; et al. | 2002-12-19 |
| Substrate processing apparatus App 20020106269 - Nishimura, Joichi ; et al. | 2002-08-08 |
| Substrate processing apparatus App 20020092368 - Nishimura, Joichi ; et al. | 2002-07-18 |
| Substrate processing apparatus Grant 6,371,713 - Nishimura , et al. April 16, 2 | 2002-04-16 |
| Robot App 20010035065 - Hashimoto, Yasuhiko ; et al. | 2001-11-01 |
| Substrate cleaning apparatus and method Grant 6,286,525 - Nishimura , et al. September 11, 2 | 2001-09-11 |
| Substrate cleaning apparatus and method Grant 6,260,562 - Morinishi , et al. July 17, 2 | 2001-07-17 |
| Method of and apparatus for cleaning substrate Grant 6,151,744 - Ohtani , et al. November 28, 2 | 2000-11-28 |
| Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section Grant 6,099,643 - Ohtani , et al. August 8, 2 | 2000-08-08 |
| Substrate processing apparatus having regulated power consumption and method therefor Grant 6,060,697 - Morita , et al. May 9, 2 | 2000-05-09 |
| Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus Grant 6,051,101 - Ohtani , et al. April 18, 2 | 2000-04-18 |
| Substrate processing apparatus Grant 6,048,400 - Ohtani April 11, 2 | 2000-04-11 |
| Substrate processing apparatus Grant 6,007,629 - Ohtani , et al. December 28, 1 | 1999-12-28 |
| Apparatus for substrate holding Grant 5,989,342 - Ikeda , et al. November 23, 1 | 1999-11-23 |
| Substrate processing apparatus Grant 5,963,753 - Ohtani , et al. October 5, 1 | 1999-10-05 |
| Substrate container cassette, interface mechanism, and substrate processing Grant 5,841,515 - Ohtani November 24, 1 | 1998-11-24 |
| Substrate spin cleaning apparatus Grant 5,829,087 - Nishimura , et al. November 3, 1 | 1998-11-03 |
| Substrate spin cleaning apparatus Grant 5,785,068 - Sasaki , et al. July 28, 1 | 1998-07-28 |
| Treating solution supplying method and substrate treating apparatus Grant 5,765,072 - Ohtani , et al. June 9, 1 | 1998-06-09 |
| Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus Grant 5,647,083 - Sugimoto , et al. July 15, 1 | 1997-07-15 |
| Substrate transport apparatus Grant 5,359,785 - Fukutomi , et al. November 1, 1 | 1994-11-01 |
| Interface apparatus for transporting substrates between substrate processing apparatus Grant 5,308,210 - Ohtani , et al. May 3, 1 | 1994-05-03 |
| Light-transmitting fiber Grant 5,146,535 - Anzai , et al. September 8, 1 | 1992-09-08 |
| Cleaning apparatus having a contact buffer apparatus Grant 4,935,981 - Ohtani , et al. June 26, 1 | 1990-06-26 |
| Wafer transfer apparatus having an improved wafer transfer portion Grant 4,923,054 - Ohtani , et al. May 8, 1 | 1990-05-08 |
| Automotive air conditioning apparatus Grant 4,359,875 - Ohtani November 23, 1 | 1982-11-23 |
| Humidifying apparatus for an air-conditioning equipment Grant 4,323,191 - Chiyoda , et al. April 6, 1 | 1982-04-06 |
| Refrigerant compressor for air conditioning of vehicles Grant 4,265,603 - Chiyoda , et al. May 5, 1 | 1981-05-05 |
| Air conditioning apparatus for vehicle Grant 4,262,738 - Kato , et al. April 21, 1 | 1981-04-21 |
| Vane compressor Grant 4,260,343 - Watanabe , et al. April 7, 1 | 1981-04-07 |
| Vehicle air conditioning apparatus Grant 4,250,956 - Ohtani February 17, 1 | 1981-02-17 |
| Rotary fluid pressure biased vane compressor with pressure release means Grant 4,248,575 - Watanabe , et al. February 3, 1 | 1981-02-03 |
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