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Power modulation for etching high aspect ratio features
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Process for performing self-limited etching of organic materials
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Multi-frequency power modulation for etching high aspect ratio features
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Method Of Plasma Etching Of Silicon-containing Organic Film Using Sulfur-based Chemistry
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Selective SiARC removal
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Process For Performing Self-limited Etching Of Organic Materials
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Selective SiARC Removal
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Multi-frequency Power Modulation For Etching High Aspect Ratio Features
App 20170345619 - Ohtake; Hiroto | 2017-11-30 |
Power Modulation For Etching High Aspect Ratio Features
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Plasma etching method
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Multilayer Film Etching Method And Plasma Processing Apparatus
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Semiconductor device manufacturing method
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Plasma Etching Method
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Plasma Processing Method
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Method Of Selectively Removing A Region Formed Of Silicon Oxide And Plasma Processing Apparatus
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Semiconductor Device Manufacturing Method
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Plasma Etching Method
App 20140332372 - Kamada; Tomiko ; et al. | 2014-11-13 |
Etching Method
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Semiconductor device capable of reducing interelectrode leak current and manufacturing method thereof
Grant 8,803,285 - Ohtake , et al. August 12, 2 | 2014-08-12 |
Highly selective spacer etch process with reduced sidewall spacer slimming
Grant 8,664,125 - Raley , et al. March 4, 2 | 2014-03-04 |
Wiring structure and method for manufacturing the same
Grant 8,592,303 - Tada , et al. November 26, 2 | 2013-11-26 |
Highly Selective Spacer Etch Process With Reduced Sidewall Spacer Slimming
App 20130164940 - RALEY; Angelique Denise ; et al. | 2013-06-27 |
Dry Metal Etching Method
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Semiconductor Device
App 20120013023 - TADA; Munehiro ; et al. | 2012-01-19 |
Method Of Producing A Dual Damascene Multilayer Interconnection And Multilayer Interconnection Structure
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Semiconductor device, method for manufacturing semiconductor device and apparatus for manufacturing semiconductor
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Multilayer wiring structure, semiconductor device, pattern transfer mask and method for manufacturing multilayer wiring structure
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Wiring Structure And Method For Manufacturing The Same
App 20100151675 - TADA; Munehiro ; et al. | 2010-06-17 |
Wiring structure and method for manufacturing the same
Grant 7,701,060 - Tada , et al. April 20, 2 | 2010-04-20 |
Semiconductor device and having trench interconnection
Grant 7,622,808 - Ohtake , et al. November 24, 2 | 2009-11-24 |
Semiconductor Device, Method For Manufacturing Semiconductor Device And Apparatus For Manufacturing Semiconductor
App 20090267198 - Tada; Munehiro ; et al. | 2009-10-29 |
Semiconductor device and its manufacturing method
Grant 7,482,694 - Ohtake , et al. January 27, 2 | 2009-01-27 |
Method Of Producing Multilayer Interconnection And Multilayer Interconnection Structure
App 20090014887 - Ohtake; Hiroto ; et al. | 2009-01-15 |
Multilayer Wiring Structure, Semiconductor Device, Pattern Transfer Mask and Method for Manufacturing Multilayer Wiring Structure
App 20080136043 - Ohtake; Hiroto ; et al. | 2008-06-12 |
Semiconductor Device Capable Of Reducing Interelectrode Leak Current And Manufacturing Method Thereof
App 20070262417 - Ohtake; Hiroto ; et al. | 2007-11-15 |
Wiring structure and method for manufacturing the same
App 20070013069 - Tada; Munehiro ; et al. | 2007-01-18 |
Semiconductor device having trench interconnection and manufacturing method of semiconductor device
App 20060131754 - Ohtake; Hiroto ; et al. | 2006-06-22 |
Method of manufacturing a semiconductor device capable of etching a multi-layer of organic films at a high selectivity
Grant 6,972,453 - Ohtake , et al. December 6, 2 | 2005-12-06 |
Semiconductor device and its manufacturing method
App 20050253272 - Ohtake, Hiroto ; et al. | 2005-11-17 |
Method of manufacturing a semiconductor device capable of etching a multi-layer of organic films at a high selectivity
App 20020155639 - Ohtake, Hiroto ; et al. | 2002-10-24 |
Method for plasma treatment and apparatus for plasma treatment
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