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Semiconductor device
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Film Forming Method and Film Forming Apparatus
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Remedies or prophylactics for diseases in association with chemokines
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Semiconductor device
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Substrate processing method, semiconductor device production method, and semiconductor device
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Method for producing material of electronic device
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Bone measuring method
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Method and apparatus for forming film
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Manufacturing method for a field-effect transistor, manufacturing method for a semiconductor device, and apparatus therefor
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Apparatus and method for treating joint disease
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Manufacturing method for a field-effect transistor, manufacturing method for a semiconductor device, and apparatus therefor
App 20020115304 - Matsudo, Tatsuo ; et al. | 2002-08-22 |
Metal interconnection and method for making
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Method for making metal interconnection with chlorine plasma etch
Grant 5,627,102 - Shinriki , et al. May 6, 1 | 1997-05-06 |
Multilevel interconnect structure
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Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same
Grant 5,605,867 - Sato , et al. February 25, 1 | 1997-02-25 |
Method for supplying liquid material and process for forming thin films using the liquid material supplying method
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Method of chemical mechanical polishing planarization of an insulating film using an etching stop
Grant 5,532,191 - Nakano , et al. July 2, 1 | 1996-07-02 |
Method of forming multilayered wiring structure in semiconductor device
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Multilevel interconnect structure and method of manufacturing the same
Grant 5,305,519 - Yamamoto , et al. April 26, 1 | 1994-04-26 |
Process for depositing titanium nitride film by CVD
Grant 5,300,321 - Nakano , et al. April 5, 1 | 1994-04-05 |
Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric
Grant 5,290,736 - Sato , et al. March 1, 1 | 1994-03-01 |
Chemical vapor deposition method for forming thin film
Grant 5,225,245 - Ohta , et al. July 6, 1 | 1993-07-06 |
Chemical vapor deposition apparatus for forming thin film
Grant 5,209,182 - Ohta , et al. May 11, 1 | 1993-05-11 |
Sprinkler head and operation monitor therefor
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