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Method of inspecting a semiconductor device and an apparatus thereof Grant 8,274,651 - Hamamatsu , et al. September 25, 2 | 2012-09-25 |
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Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20120006131 - Hamamatsu; Akira ;   et al. | 2012-01-12 |
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Method of inspecting a semiconductor device and an apparatus thereof Grant 8,040,503 - Hamamatsu , et al. October 18, 2 | 2011-10-18 |
Method Of Apparatus For Detecting Particles On A Specimen App 20110228258 - HAMAMATSU; Akira ;   et al. | 2011-09-22 |
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Method of apparatus for detecting particles on a specimen Grant 7,952,700 - Hamamatsu , et al. May 31, 2 | 2011-05-31 |
Method of detecting defects on an object Grant 7,940,383 - Noguchi , et al. May 10, 2 | 2011-05-10 |
Method for inspecting defect and apparatus for inspecting defect Grant 7,903,244 - Hamamatsu , et al. March 8, 2 | 2011-03-08 |
Method Of Apparatus For Detecting Particles On A Specimen App 20110032515 - HAMAMATSU; Akira ;   et al. | 2011-02-10 |
Method of apparatus for detecting particles on a specimen Grant 7,817,261 - Hamamatsu , et al. October 19, 2 | 2010-10-19 |
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Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20100140474 - HAMAMATSU; Akira ;   et al. | 2010-06-10 |
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Inspection Method And Inspection Apparatus App 20100002227 - HAMAMATSU; Akira ;   et al. | 2010-01-07 |
Method of inspecting a semiconductor device and an apparatus thereof Grant 7,643,138 - Hamamatsu , et al. January 5, 2 | 2010-01-05 |
Method and apparatus for detecting defects Grant 7,643,139 - Ohshima , et al. January 5, 2 | 2010-01-05 |
Method For Inspecting Defect And Apparatus For Inspecting Defect App 20090323054 - HAMAMATSU; Akira ;   et al. | 2009-12-31 |
Apparatus and method for testing defects Grant 7,639,350 - Noguchi , et al. December 29, 2 | 2009-12-29 |
Method for inspecting defect and apparatus for inspecting defect Grant 7,586,594 - Hamamatsu , et al. September 8, 2 | 2009-09-08 |
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Method and apparatus for detecting defects on a wafer Grant 7,567,343 - Ohshima , et al. July 28, 2 | 2009-07-28 |
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Method Of Inspecting A Semiconductor Device And An Apparatus Thereof App 20080291437 - Hamamatsu; Akira ;   et al. | 2008-11-27 |
Apparatus and method for testing defects Grant 7,443,496 - Noguchi , et al. October 28, 2 | 2008-10-28 |
Method and apparatus for detecting defects Grant 7,426,023 - Ohshima , et al. September 16, 2 | 2008-09-16 |
Method Of Apparatus For Detecting Particles On A Specimen App 20080204724 - Hamamatsu; Akira ;   et al. | 2008-08-28 |
Method of inspecting a semiconductor device and an apparatus thereof Grant 7,417,723 - Hamamatsu , et al. August 26, 2 | 2008-08-26 |
Defect detector and defect detecting method Grant 7,417,721 - Uto , et al. August 26, 2 | 2008-08-26 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,411,207 - Nishiyama , et al. August 12, 2 | 2008-08-12 |
Method of apparatus for detecting particles on a specimen Grant 7,369,223 - Hamamatsu , et al. May 6, 2 | 2008-05-06 |
Semiconductor device inspection method Grant 7,332,359 - Hamamatsu , et al. February 19, 2 | 2008-02-19 |
Inspection method and inspection apparatus Grant 7,315,363 - Hamamatsu , et al. January 1, 2 | 2008-01-01 |
Method And Its Apparatus For Inspecting Particles Or Defects Of A Semiconductor Device App 20070265797 - Nishiyama; Hidetoshi ;   et al. | 2007-11-15 |
Method For Inspecting Defect And Apparatus For Inspecting Defect App 20070247616 - HAMAMATSU; AKIRA ;   et al. | 2007-10-25 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 7,262,425 - Nishiyama , et al. August 28, 2 | 2007-08-28 |
Method for inspecting defect and apparatus for inspecting defect Grant 7,248,352 - Hamamatsu , et al. July 24, 2 | 2007-07-24 |
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Method and apparatus for detecting defects on a wafer App 20070070337 - Ohshima; Yoshimasa ;   et al. | 2007-03-29 |
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 7,177,020 - Morioka , et al. February 13, 2 | 2007-02-13 |
Method of inspecting a semiconductor device and an apparatus thereof App 20060215153 - Hamamatsu; Akira ;   et al. | 2006-09-28 |
Apparatus and method for testing defects Grant 7,098,055 - Noguchi , et al. August 29, 2 | 2006-08-29 |
Method and apparatus for detecting defects App 20060139629 - Ohshima; Yoshimasa ;   et al. | 2006-06-29 |
Defect detector and defect detecting method App 20060124874 - Uto; Sachio ;   et al. | 2006-06-15 |
Method of inspecting a semiconductor device and an apparatus thereof Grant 7,061,602 - Hamamatsu , et al. June 13, 2 | 2006-06-13 |
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Method and apparatus for detecting defects App 20060068512 - Ohshima; Yoshimasa ;   et al. | 2006-03-30 |
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Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process App 20050206887 - Morioka, Hiroshi ;   et al. | 2005-09-22 |
Method of inspecting a semiconductor device and an apparatus thereof App 20050196033 - Hamamatsu, Akira ;   et al. | 2005-09-08 |
Method and its apparatus for inspecting particles or defects of a semiconductor device Grant 6,936,835 - Nishiyama , et al. August 30, 2 | 2005-08-30 |
Method and apparatus for reviewing defects App 20050122508 - Uto, Sachio ;   et al. | 2005-06-09 |
Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process Grant 6,894,773 - Morioka , et al. May 17, 2 | 2005-05-17 |
Method of inspecting a semiconductor device and an apparatus thereof Grant 6,888,959 - Hamamatsu , et al. May 3, 2 | 2005-05-03 |
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Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system Grant 6,650,409 - Noguchi , et al. November 18, 2 | 2003-11-18 |
Apparatus and method of inspecting foreign particle or defect on a sample Grant 6,597,448 - Nishiyama , et al. July 22, 2 | 2003-07-22 |
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Method and its apparatus for inspecting particles or defects of a semiconductor device App 20030001120 - Nishiyama, Hidetoshi ;   et al. | 2003-01-02 |
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