Patent | Date |
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Measuring apparatus and exposure apparatus having the same Grant 8,223,315 - Ohsaki July 17, 2 | 2012-07-17 |
Measurement apparatus, exposure apparatus, and device manufacturing method Grant 7,956,987 - Ohsaki June 7, 2 | 2011-06-07 |
Measurement apparatus, exposure apparatus, and device fabrication method Grant 7,688,424 - Ohsaki , et al. March 30, 2 | 2010-03-30 |
Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics using the interference pattern Grant 7,675,629 - Ohsaki , et al. March 9, 2 | 2010-03-09 |
Measuring Apparatus And Exposure Apparatus Having The Same App 20090274964 - Ohsaki; Yumiko | 2009-11-05 |
Measuring apparatus and exposure apparatus having the same Grant 7,538,854 - Ohsaki May 26, 2 | 2009-05-26 |
Exposure apparatus and device manufacturing method Grant 7,508,493 - Takeuchi , et al. March 24, 2 | 2009-03-24 |
Measurement Apparatus, Exposure Apparatus, And Device Fabrication Method App 20090066925 - Ohsaki; Yumiko ;   et al. | 2009-03-12 |
Measurement Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20080316448 - Ohsaki; Yumiko | 2008-12-25 |
Exposure apparatus and device manufacturing method using the apparatus Grant 7,466,395 - Ohsaki , et al. December 16, 2 | 2008-12-16 |
Exposure Apparatus And Device Manufacturing Method App 20080062427 - Ohsaki; Yumiko ;   et al. | 2008-03-13 |
Exposure Apparatus And Device Manufacturing Method App 20070188730 - Takeuchi; Seiji ;   et al. | 2007-08-16 |
Exposure Apparatus And Device Manufacturing Method Using The Apparatus App 20070019175 - Ohsaki; Yumiko ;   et al. | 2007-01-25 |
Image processing apparatus and method for converting data dependent on a first illuminating light into data dependent on a second illuminating light Grant 7,158,144 - Shiraiwa , et al. January 2, 2 | 2007-01-02 |
Measuring Apparatus And Exposure Apparatus Having The Same App 20060187435 - Ohsaki; Yumiko | 2006-08-24 |
Projection optical system and exposure apparatus Grant 6,975,385 - Ohsaki , et al. December 13, 2 | 2005-12-13 |
Interferometer and interferance measurement method Grant 6,842,255 - Ohsaki , et al. January 11, 2 | 2005-01-11 |
Projection optical system and exposure apparatus App 20040095567 - Ohsaki, Yumiko ;   et al. | 2004-05-20 |
Exposure method based on multiple exposure process Grant 6,709,794 - Ohsaki March 23, 2 | 2004-03-23 |
Exposure method based on multiple exposure process App 20030203318 - Ohsaki, Yumiko | 2003-10-30 |
Mask for multiple exposure Grant 6,620,556 - Ohsaki September 16, 2 | 2003-09-16 |
Exposure method based on multiple exposure process Grant 6,586,168 - Ohsaki July 1, 2 | 2003-07-01 |
Interferometer and interferance measurement method App 20020176090 - Ohsaki, Yumiko ;   et al. | 2002-11-28 |
Image Processing Apparatus, Method And Recording Medium Therefor App 20010040588 - SHIRAIWA, YOSHINOBU ;   et al. | 2001-11-15 |