Ohno; Yasunori
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ohno; Yasunori.The latest application filed is for "microwave-powered plasma-generating apparatus and method".
- Ohno; Yasunori - Mito JP
- Ohno; Yasunori - Hitachi JP
| Patent | Date |
|---|---|
| Microwave-powered plasma-generating apparatus and method Grant 5,266,146 - Ohno , et al. November 30, 1 | 1993-11-30 |
| Plasma generating apparatus Grant 5,133,825 - Hakamata , et al. July 28, 1 | 1992-07-28 |
| Method and apparatus for forming a film Grant 5,064,520 - Miyake , et al. November 12, 1 | 1991-11-12 |
| Ion source device Grant 4,847,476 - Sato , et al. July 11, 1 | 1989-07-11 |
| High frequency plasma generation apparatus Grant 4,716,491 - Ohno , et al. December 29, 1 | 1987-12-29 |
| Ion source Grant 4,713,585 - Ohno , et al. December 15, 1 | 1987-12-15 |
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